JPS6431478A - Manufacture of josephson element - Google Patents
Manufacture of josephson elementInfo
- Publication number
- JPS6431478A JPS6431478A JP62188010A JP18801087A JPS6431478A JP S6431478 A JPS6431478 A JP S6431478A JP 62188010 A JP62188010 A JP 62188010A JP 18801087 A JP18801087 A JP 18801087A JP S6431478 A JPS6431478 A JP S6431478A
- Authority
- JP
- Japan
- Prior art keywords
- coupler
- film
- superconducting
- bridge
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To obtain a Josephson element having uniform element characteristic and to simplify the manufacturing steps of the element by forming a coupler made of a superconducting material for coupling superconducting thin films separated on a substrate, and irradiating the coupler with an electron beam to superconduct at least part of the coupler, thereby forming a bridge. CONSTITUTION:Thin films 13a, 13b are formed of thin superconducting films 12 on a substrate 10 disposed on parts separated from the film 12 on the film 12 by sputtering with a target of Nb3Ge. The film 13b is used as a coupler 14 for coupling the films 12. Then, the upper and lower centers of the coupler 14 are irradiated with a focused electron beam along a direction of an arrow. Thus, the part of the coupler 14 irradiated with the beam is crystallized to provide superconducting characteristic to form a bridge 15. The thickness of the bridge 15 is controlled by controlling the thickness of the coupler 14 (the film 13b).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62188010A JPS6431478A (en) | 1987-07-28 | 1987-07-28 | Manufacture of josephson element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62188010A JPS6431478A (en) | 1987-07-28 | 1987-07-28 | Manufacture of josephson element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6431478A true JPS6431478A (en) | 1989-02-01 |
Family
ID=16216068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62188010A Pending JPS6431478A (en) | 1987-07-28 | 1987-07-28 | Manufacture of josephson element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6431478A (en) |
-
1987
- 1987-07-28 JP JP62188010A patent/JPS6431478A/en active Pending
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