JPS6431478A - Manufacture of josephson element - Google Patents

Manufacture of josephson element

Info

Publication number
JPS6431478A
JPS6431478A JP62188010A JP18801087A JPS6431478A JP S6431478 A JPS6431478 A JP S6431478A JP 62188010 A JP62188010 A JP 62188010A JP 18801087 A JP18801087 A JP 18801087A JP S6431478 A JPS6431478 A JP S6431478A
Authority
JP
Japan
Prior art keywords
coupler
film
superconducting
bridge
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62188010A
Other languages
Japanese (ja)
Inventor
Ko Azuma
Katsuyuki Kaiho
Mikio Nakagawa
Tsukasa Kono
Yoshimitsu Ikeno
Nobuyuki Sadakata
Masaru Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Fujikura Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP62188010A priority Critical patent/JPS6431478A/en
Publication of JPS6431478A publication Critical patent/JPS6431478A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a Josephson element having uniform element characteristic and to simplify the manufacturing steps of the element by forming a coupler made of a superconducting material for coupling superconducting thin films separated on a substrate, and irradiating the coupler with an electron beam to superconduct at least part of the coupler, thereby forming a bridge. CONSTITUTION:Thin films 13a, 13b are formed of thin superconducting films 12 on a substrate 10 disposed on parts separated from the film 12 on the film 12 by sputtering with a target of Nb3Ge. The film 13b is used as a coupler 14 for coupling the films 12. Then, the upper and lower centers of the coupler 14 are irradiated with a focused electron beam along a direction of an arrow. Thus, the part of the coupler 14 irradiated with the beam is crystallized to provide superconducting characteristic to form a bridge 15. The thickness of the bridge 15 is controlled by controlling the thickness of the coupler 14 (the film 13b).
JP62188010A 1987-07-28 1987-07-28 Manufacture of josephson element Pending JPS6431478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62188010A JPS6431478A (en) 1987-07-28 1987-07-28 Manufacture of josephson element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62188010A JPS6431478A (en) 1987-07-28 1987-07-28 Manufacture of josephson element

Publications (1)

Publication Number Publication Date
JPS6431478A true JPS6431478A (en) 1989-02-01

Family

ID=16216068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62188010A Pending JPS6431478A (en) 1987-07-28 1987-07-28 Manufacture of josephson element

Country Status (1)

Country Link
JP (1) JPS6431478A (en)

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