FR1458344A - Procédé et appareil de revêtement par électrophorèse - Google Patents

Procédé et appareil de revêtement par électrophorèse

Info

Publication number
FR1458344A
FR1458344A FR29050A FR29050A FR1458344A FR 1458344 A FR1458344 A FR 1458344A FR 29050 A FR29050 A FR 29050A FR 29050 A FR29050 A FR 29050A FR 1458344 A FR1458344 A FR 1458344A
Authority
FR
France
Prior art keywords
coating method
electrophoresis coating
electrophoresis
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR29050A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consolidated Vacuum Corp
Original Assignee
Consolidated Vacuum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US390800A external-priority patent/US3305473A/en
Application filed by Consolidated Vacuum Corp filed Critical Consolidated Vacuum Corp
Priority to FR29050A priority Critical patent/FR1458344A/fr
Application granted granted Critical
Publication of FR1458344A publication Critical patent/FR1458344A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C23C14/355—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
FR29050A 1964-08-20 1965-08-20 Procédé et appareil de revêtement par électrophorèse Expired FR1458344A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR29050A FR1458344A (fr) 1964-08-20 1965-08-20 Procédé et appareil de revêtement par électrophorèse

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US390800A US3305473A (en) 1964-08-20 1964-08-20 Triode sputtering apparatus for depositing uniform coatings
US475970A US3393142A (en) 1964-08-20 1965-07-30 Cathode sputtering apparatus with plasma confining means
FR29050A FR1458344A (fr) 1964-08-20 1965-08-20 Procédé et appareil de revêtement par électrophorèse

Publications (1)

Publication Number Publication Date
FR1458344A true FR1458344A (fr) 1966-03-04

Family

ID=27242450

Family Applications (1)

Application Number Title Priority Date Filing Date
FR29050A Expired FR1458344A (fr) 1964-08-20 1965-08-20 Procédé et appareil de revêtement par électrophorèse

Country Status (1)

Country Link
FR (1) FR1458344A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423065A1 (fr) * 1978-04-12 1979-11-09 Battelle Memorial Institute Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2423065A1 (fr) * 1978-04-12 1979-11-09 Battelle Memorial Institute Procede de fabrication d'electrodes pour piles a combustible, dispositif pour la mise en oeuvre du procede et electrodes resultant de ce procede

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