FR2417778A1 - Detecteur de bords a sondes multiples a quatre quadrants pour l'essai de plaquettes semi-conductrices - Google Patents

Detecteur de bords a sondes multiples a quatre quadrants pour l'essai de plaquettes semi-conductrices

Info

Publication number
FR2417778A1
FR2417778A1 FR7903696A FR7903696A FR2417778A1 FR 2417778 A1 FR2417778 A1 FR 2417778A1 FR 7903696 A FR7903696 A FR 7903696A FR 7903696 A FR7903696 A FR 7903696A FR 2417778 A1 FR2417778 A1 FR 2417778A1
Authority
FR
France
Prior art keywords
probes
edge detector
quadrants
conductive plates
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7903696A
Other languages
English (en)
Other versions
FR2417778B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of FR2417778A1 publication Critical patent/FR2417778A1/fr
Application granted granted Critical
Publication of FR2417778B1 publication Critical patent/FR2417778B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

L'invention concerne un détecteur de bords à sondes multiples à quatre quadrants pour l'essai de plaquettes semi-conductrices. Il comporte quatre sondes de détection fixées sur une plaque de circuit imprimé et portant chacune une matière piézo-électrique qui délivre un signal quand la sonde se deforme au moment où elle entre en contact avec une plaquette semiconductrice. Un circuit de détection à quatre canaux vérifie que les quatre sondes sont entrées en contact avec la plaquette et délivre à ce moment un signal qui permet l'exécution des essais. L'invention s'applique notamment au contrôle des pastilles de circuits intégrés.
FR7903696A 1978-02-21 1979-02-14 Detecteur de bords a sondes multiples a quatre quadrants pour l'essai de plaquettes semi-conductrices Granted FR2417778A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/879,038 US4219771A (en) 1978-02-21 1978-02-21 Four-quadrant, multiprobe-edge sensor for semiconductor wafer probing

Publications (2)

Publication Number Publication Date
FR2417778A1 true FR2417778A1 (fr) 1979-09-14
FR2417778B1 FR2417778B1 (fr) 1983-06-03

Family

ID=25373314

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7903696A Granted FR2417778A1 (fr) 1978-02-21 1979-02-14 Detecteur de bords a sondes multiples a quatre quadrants pour l'essai de plaquettes semi-conductrices

Country Status (7)

Country Link
US (1) US4219771A (fr)
JP (1) JPS54158175A (fr)
DE (1) DE2906041A1 (fr)
FR (1) FR2417778A1 (fr)
GB (1) GB2014743B (fr)
IT (1) IT1162272B (fr)
NL (1) NL7901287A (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951370A (en) * 1979-11-05 1990-08-28 Texas Instruments Incorporated Method of making an intelligent multiprobe tip
EP0028719B1 (fr) * 1979-11-05 1984-05-30 Texas Instruments Incorporated Sonde pour tester des circuits intégrés
US4390885A (en) * 1981-06-26 1983-06-28 Texas Instruments Incorporated Apparatus and method for fluid transfer
US4888550A (en) * 1981-09-14 1989-12-19 Texas Instruments Incorporated Intelligent multiprobe tip
US4780670A (en) * 1985-03-04 1988-10-25 Xerox Corporation Active probe card for high resolution/low noise wafer level testing
US4749942A (en) * 1985-09-26 1988-06-07 Tektronix, Inc. Wafer probe head
IL79820A0 (en) * 1985-09-26 1986-11-30 Tektronix Inc Wafer probe head,and method of assembling same
JPS62134243U (fr) * 1986-02-14 1987-08-24
JPH0342682Y2 (fr) * 1986-02-18 1991-09-06
DE3628104A1 (de) * 1986-08-19 1988-02-25 Feinmetall Gmbh Kontaktelement fuer pruefkarten
US4758785A (en) * 1986-09-03 1988-07-19 Tektronix, Inc. Pressure control apparatus for use in an integrated circuit testing station
US5331275A (en) * 1991-12-09 1994-07-19 Fujitsu Limited Probing device and system for testing an integrated circuit
US5608172A (en) * 1995-03-16 1997-03-04 Texas Instruments Incorporated Die bond touch down detector
US5883519A (en) * 1996-02-23 1999-03-16 Kinetic Probe, Llc Deflection device
US6252414B1 (en) * 1998-08-26 2001-06-26 International Business Machines Corporation Method and apparatus for testing circuits having different configurations with a single test fixture
DE102004027886A1 (de) * 2004-05-28 2005-12-22 Feinmetall Gmbh Prüfeinrichtung zur elektrischen Prüfung eines Prüflings sowie Verfahren zur Herstellung einer Prüfeinrichtung
KR101061593B1 (ko) * 2008-04-21 2011-09-01 윌테크놀러지(주) 프로브 카드
US8963567B2 (en) * 2011-10-31 2015-02-24 International Business Machines Corporation Pressure sensing and control for semiconductor wafer probing
CN109427923B (zh) * 2017-08-25 2020-06-16 中国科学院大连化学物理研究所 一种半导体薄膜四象限光照传感器及其制备方法
JP2023006993A (ja) * 2021-07-01 2023-01-18 株式会社日本マイクロニクス 検査装置、位置調整ユニット及び位置調整方法
CN114252753B (zh) * 2021-12-24 2022-08-19 中国科学院长春光学精密机械与物理研究所 一种用于筛选四象限探测器的方法和系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1063381A (en) * 1963-01-18 1967-03-30 Wilmot Breeden Ltd Improvements in or relating to surface testing apparatus
FR2040836A5 (fr) * 1965-08-11 1971-01-22 Transistor Automation
US3810017A (en) * 1972-05-15 1974-05-07 Teledyne Inc Precision probe for testing micro-electronic units
US3849728A (en) * 1973-08-21 1974-11-19 Wentworth Labor Inc Fixed point probe card and an assembly and repair fixture therefor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2558563A (en) * 1948-10-29 1951-06-26 Gen Electric Piezoelectric strain gauge
US2782636A (en) * 1950-08-21 1957-02-26 Max P Peucker Internal balances for wind force measurements on aerodynamic objects
US3093710A (en) * 1959-07-06 1963-06-11 Gulton Ind Inc Piezoelectric electromechanical transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1063381A (en) * 1963-01-18 1967-03-30 Wilmot Breeden Ltd Improvements in or relating to surface testing apparatus
FR2040836A5 (fr) * 1965-08-11 1971-01-22 Transistor Automation
US3810017A (en) * 1972-05-15 1974-05-07 Teledyne Inc Precision probe for testing micro-electronic units
US3849728A (en) * 1973-08-21 1974-11-19 Wentworth Labor Inc Fixed point probe card and an assembly and repair fixture therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/77 *

Also Published As

Publication number Publication date
NL7901287A (nl) 1979-08-23
JPS6330585B2 (fr) 1988-06-20
GB2014743B (en) 1982-08-04
DE2906041A1 (de) 1979-10-11
JPS54158175A (en) 1979-12-13
IT7948061A0 (it) 1979-02-20
GB2014743A (en) 1979-08-30
US4219771A (en) 1980-08-26
IT1162272B (it) 1987-03-25
FR2417778B1 (fr) 1983-06-03

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