FR2393266A1 - Procede et appareil de mesure de l'epaisseur de couches minces par fluorescence des rayons x - Google Patents

Procede et appareil de mesure de l'epaisseur de couches minces par fluorescence des rayons x

Info

Publication number
FR2393266A1
FR2393266A1 FR7715153A FR7715153A FR2393266A1 FR 2393266 A1 FR2393266 A1 FR 2393266A1 FR 7715153 A FR7715153 A FR 7715153A FR 7715153 A FR7715153 A FR 7715153A FR 2393266 A1 FR2393266 A1 FR 2393266A1
Authority
FR
France
Prior art keywords
measuring
ray fluorescence
thickness
thin layers
fluorescence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7715153A
Other languages
English (en)
French (fr)
Other versions
FR2393266B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of FR2393266A1 publication Critical patent/FR2393266A1/fr
Application granted granted Critical
Publication of FR2393266B1 publication Critical patent/FR2393266B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7715153A 1976-05-18 1977-05-17 Procede et appareil de mesure de l'epaisseur de couches minces par fluorescence des rayons x Granted FR2393266A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68746276A 1976-05-18 1976-05-18

Publications (2)

Publication Number Publication Date
FR2393266A1 true FR2393266A1 (fr) 1978-12-29
FR2393266B1 FR2393266B1 (enExample) 1982-03-19

Family

ID=24760542

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7715153A Granted FR2393266A1 (fr) 1976-05-18 1977-05-17 Procede et appareil de mesure de l'epaisseur de couches minces par fluorescence des rayons x

Country Status (6)

Country Link
JP (1) JPS52140355A (enExample)
CA (1) CA1086870A (enExample)
DE (1) DE2721589A1 (enExample)
FR (1) FR2393266A1 (enExample)
GB (1) GB1561313A (enExample)
NL (1) NL185306C (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI59489C (fi) * 1978-11-21 1981-08-10 Enso Gutzeit Oy Foerfarande foer maetning av belaeggningsmaengder
JPS5758300U (enExample) * 1980-09-22 1982-04-06
DE3129049A1 (de) * 1981-07-23 1983-02-24 Hoesch Werke Ag, 4600 Dortmund Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech
JPS60140105A (ja) * 1983-12-27 1985-07-25 Shimadzu Corp 多層膜分析装置
JPS60142205A (ja) * 1983-12-29 1985-07-27 Shimadzu Corp 多層膜分析装置
DD278866A1 (de) * 1987-11-20 1990-05-16 Akad Wissenschaften Ddr Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen
JP3706989B2 (ja) * 1999-04-07 2005-10-19 富士通株式会社 蛍光ｘ線を用いた膜厚測定方法
JP4966160B2 (ja) * 2007-10-26 2012-07-04 シャープ株式会社 膜厚測定方法
JP5494322B2 (ja) * 2009-12-28 2014-05-14 株式会社デンソー Ｃｎｔワイヤの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146631B2 (enExample) * 1971-12-29 1976-12-10
JPS4919222A (enExample) * 1972-06-15 1974-02-20

Also Published As

Publication number Publication date
FR2393266B1 (enExample) 1982-03-19
NL185306B (nl) 1989-10-02
GB1561313A (en) 1980-02-20
JPS52140355A (en) 1977-11-22
CA1086870A (en) 1980-09-30
JPS5735768B2 (enExample) 1982-07-30
NL185306C (nl) 1990-03-01
NL7705443A (nl) 1977-11-22
DE2721589A1 (de) 1977-12-01

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