FR2390009A1 - - Google Patents

Info

Publication number
FR2390009A1
FR2390009A1 FR7812678A FR7812678A FR2390009A1 FR 2390009 A1 FR2390009 A1 FR 2390009A1 FR 7812678 A FR7812678 A FR 7812678A FR 7812678 A FR7812678 A FR 7812678A FR 2390009 A1 FR2390009 A1 FR 2390009A1
Authority
FR
France
Prior art keywords
conductive coating
constitutes
insulating layer
electrically conductive
memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7812678A
Other languages
English (en)
Other versions
FR2390009B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2390009A1 publication Critical patent/FR2390009A1/fr
Application granted granted Critical
Publication of FR2390009B1 publication Critical patent/FR2390009B1/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/35Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices with charge storage in a depletion layer, e.g. charge coupled devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/404Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

L'invention concerne un montage intégré monolithique comportant des éléments de mémoire à un transistor. Ce dispositif comporte sur une couche isolante 11 recouvrant une couche semi-conductrice 1, un premier revêtement électriquement conducteur qui constitue une électrode de référence 10 commune aux condensateurs de mémoire Cl, C2 de tous les éléments de mémoire est placé à un potentiel de référence, et au-dessus du premier revêtement conducteur, en en étant séparé par une autre couche isolante 12, un second revêtement electriquement conducteur, qui constitue les électrodes 8, 9 des condensateurs de mémoire C1, C2, isolées les unes par rapport aux autres et chargées par les potentiels d'information devant être mémorisés. Application notamment aux mémoires dynamiques intégrées à semi-conducteurs.
FR7812678A 1977-05-06 1978-04-28 Expired FR2390009B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19772720533 DE2720533A1 (de) 1977-05-06 1977-05-06 Monolithisch integrierte schaltungsanordnung mit ein-transistor- speicherelementen

Publications (2)

Publication Number Publication Date
FR2390009A1 true FR2390009A1 (fr) 1978-12-01
FR2390009B1 FR2390009B1 (fr) 1982-10-22

Family

ID=6008278

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7812678A Expired FR2390009B1 (fr) 1977-05-06 1978-04-28

Country Status (5)

Country Link
US (1) US4197554A (fr)
JP (1) JPS53138687A (fr)
DE (1) DE2720533A1 (fr)
FR (1) FR2390009B1 (fr)
GB (1) GB1588089A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0183517A2 (fr) * 1984-11-26 1986-06-04 Fujitsu Limited Interconnexions pour un dispositif semi-conducteur à mémoire

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL173572C (nl) * 1976-02-12 1984-02-01 Philips Nv Halfgeleiderinrichting.
US4360823A (en) * 1977-03-16 1982-11-23 U.S. Philips Corporation Semiconductor device having an improved multilayer wiring system
US4475118A (en) * 1978-12-21 1984-10-02 National Semiconductor Corporation Dynamic MOS RAM with storage cells having a mainly insulated first plate
JPS5593252A (en) * 1979-01-05 1980-07-15 Mitsubishi Electric Corp Substrate potential generating apparatus
JPS5846178B2 (ja) * 1980-12-03 1983-10-14 富士通株式会社 半導体装置
DE3137708A1 (de) * 1981-09-22 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Integratorschaltung mit einem differenzverstaerker
JPS6014462A (ja) * 1983-07-05 1985-01-25 Oki Electric Ind Co Ltd 半導体メモリ素子
US4591738A (en) * 1983-10-27 1986-05-27 International Business Machines Corporation Charge pumping circuit
US4833521A (en) * 1983-12-13 1989-05-23 Fairchild Camera & Instrument Corp. Means for reducing signal propagation losses in very large scale integrated circuits
US4652898A (en) * 1984-07-19 1987-03-24 International Business Machines Corporation High speed merged charge memory
JPH0815206B2 (ja) * 1986-01-30 1996-02-14 三菱電機株式会社 半導体記憶装置
US5049958A (en) * 1989-01-27 1991-09-17 Texas Instruments Incorporated Stacked capacitors for VLSI semiconductor devices
JPH0748553B2 (ja) * 1989-03-14 1995-05-24 シャープ株式会社 半導体装置
KR920009748B1 (ko) * 1990-05-31 1992-10-22 삼성전자 주식회사 적층형 캐패시터셀의 구조 및 제조방법
JP2823393B2 (ja) * 1991-09-09 1998-11-11 シャープ株式会社 半導体メモリ素子及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2191270A1 (fr) * 1972-06-30 1974-02-01 Ibm
DE2441385A1 (de) * 1974-08-29 1976-03-11 Siemens Ag Ein-transistor-speicherelement
FR2341177A1 (fr) * 1976-02-12 1977-09-09 Philips Nv Dispositif semiconducteur, servant a l'emmagasinage et a la lecture d'information

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3387286A (en) * 1967-07-14 1968-06-04 Ibm Field-effect transistor memory
BE789501A (fr) * 1971-09-30 1973-03-29 Siemens Ag Condensateur electrique dans un circuit integre, utilise notamment comme memoire pour une memoire a semiconducteur
JPS619741B2 (fr) * 1975-02-20 1986-03-25 Fujitsu Ltd
US4012757A (en) * 1975-05-05 1977-03-15 Intel Corporation Contactless random-access memory cell and cell pair
DE2553591C2 (de) * 1975-11-28 1977-11-17 Siemens AG, 1000 Berlin und 8000 München Speichermatrix mit einem oder mehreren Ein-Transistor-Speicherelementen
JPS5279679A (en) * 1975-12-26 1977-07-04 Toshiba Corp Semiconductor memory device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2191270A1 (fr) * 1972-06-30 1974-02-01 Ibm
DE2441385A1 (de) * 1974-08-29 1976-03-11 Siemens Ag Ein-transistor-speicherelement
FR2341177A1 (fr) * 1976-02-12 1977-09-09 Philips Nv Dispositif semiconducteur, servant a l'emmagasinage et a la lecture d'information

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/72 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0183517A2 (fr) * 1984-11-26 1986-06-04 Fujitsu Limited Interconnexions pour un dispositif semi-conducteur à mémoire
EP0183517A3 (en) * 1984-11-26 1986-12-30 Fujitsu Limited Semiconductor memory device wirings
US4807017A (en) * 1984-11-26 1989-02-21 Fujitsu Limited Semiconductor memory device with wirings having ensured cross-sections

Also Published As

Publication number Publication date
DE2720533A1 (de) 1978-11-09
JPS53138687A (en) 1978-12-04
US4197554A (en) 1980-04-08
GB1588089A (en) 1981-04-15
FR2390009B1 (fr) 1982-10-22
JPS6123663B2 (fr) 1986-06-06
DE2720533C2 (fr) 1989-05-11

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