FR2379914A1 - Dispositif de formation d'image a semi-conducteurs - Google Patents

Dispositif de formation d'image a semi-conducteurs

Info

Publication number
FR2379914A1
FR2379914A1 FR7802995A FR7802995A FR2379914A1 FR 2379914 A1 FR2379914 A1 FR 2379914A1 FR 7802995 A FR7802995 A FR 7802995A FR 7802995 A FR7802995 A FR 7802995A FR 2379914 A1 FR2379914 A1 FR 2379914A1
Authority
FR
France
Prior art keywords
substrate
semiconductor
training device
semiconductor image
image training
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7802995A
Other languages
English (en)
Other versions
FR2379914B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2379914A1 publication Critical patent/FR2379914A1/fr
Application granted granted Critical
Publication of FR2379914B1 publication Critical patent/FR2379914B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/112Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
    • H01L31/113Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
    • H01L31/1136Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232Field-effect technology
    • H01L21/8234MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823406Combination of charge coupled devices, i.e. CCD, or BBD
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14643Photodiode arrays; MOS imagers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14643Photodiode arrays; MOS imagers
    • H01L27/14645Colour imagers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Light Receiving Elements (AREA)

Abstract

Elément de formation de fraction d'image pour dispositif de formation d'image à semi-conducteur, comportant au moins une photodiode à jonction pn et un détecteur de signal lumineux juxtaposé, disposés dans une partie superficielle d'un substrat semi-conducteur à conductibilité d'un premier type. Dans une région semi-conductrice constituant ladite photodiode et à conductibilité de type opposée à celle du substrat, est au moins une région de fenêtre évidant la région semi-conductrice jusqu'au niveau général du substrat et constituée par un ressaut de ce dernier. Une telle structure améliore la sensibilité au bleu et la qualité d'image, tant en couleur qu'en noir et blanc, du dispositif.
FR7802995A 1977-02-04 1978-02-03 Dispositif de formation d'image a semi-conducteurs Granted FR2379914A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1071277A JPS5396720A (en) 1977-02-04 1977-02-04 Solid image pickup element

Publications (2)

Publication Number Publication Date
FR2379914A1 true FR2379914A1 (fr) 1978-09-01
FR2379914B1 FR2379914B1 (fr) 1983-02-11

Family

ID=11757905

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7802995A Granted FR2379914A1 (fr) 1977-02-04 1978-02-03 Dispositif de formation d'image a semi-conducteurs

Country Status (6)

Country Link
US (1) US4148051A (fr)
JP (1) JPS5396720A (fr)
DE (1) DE2804466C3 (fr)
FR (1) FR2379914A1 (fr)
GB (1) GB1594185A (fr)
NL (1) NL7801284A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449377A1 (fr) * 1979-02-19 1980-09-12 Hitachi Ltd Dispositif de formation d'image a semi-conducteur

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017196B2 (ja) * 1978-01-23 1985-05-01 株式会社日立製作所 固体撮像素子
US4198646A (en) * 1978-10-13 1980-04-15 Hughes Aircraft Company Monolithic imager for near-IR
JPS6033342B2 (ja) * 1979-06-04 1985-08-02 株式会社日立製作所 固体撮像装置
US4266237A (en) * 1979-09-07 1981-05-05 Honeywell Inc. Semiconductor apparatus
JPS606147B2 (ja) * 1979-12-07 1985-02-15 株式会社東芝 固体撮像装置
US4365262A (en) * 1980-11-26 1982-12-21 Handotai Kenkyu Shinkokai Semiconductor image sensor
JPS6212962U (fr) * 1985-07-05 1987-01-26
DE3715674A1 (de) * 1987-05-11 1988-12-01 Messerschmitt Boelkow Blohm Halbleiter mit kapazitiver auslese der ladungstraeger und integrierter gleichspannungszufuehrung
US5307169A (en) * 1991-05-07 1994-04-26 Olympus Optical Co., Ltd. Solid-state imaging device using high relative dielectric constant material as insulating film
JP4604307B2 (ja) * 2000-01-27 2011-01-05 ソニー株式会社 撮像装置とその製造方法及びカメラシステム
DE102005007358B4 (de) * 2005-02-17 2008-05-08 Austriamicrosystems Ag Lichtempfindliches Bauelement
CN101356653B (zh) * 2006-02-14 2012-01-25 独立行政法人产业技术综合研究所 光控场效应晶体管和使用它的集成光电检测器
US8120078B2 (en) * 2007-11-19 2012-02-21 Infineon Technologies Ag Photodiode structure
US8247854B2 (en) * 2009-10-08 2012-08-21 Electronics And Telecommunications Research Institute CMOS image sensor
JP2014199898A (ja) * 2013-03-11 2014-10-23 ソニー株式会社 固体撮像素子および製造方法、並びに、電子機器

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3601668A (en) * 1969-11-07 1971-08-24 Fairchild Camera Instr Co Surface depletion layer photodevice
US3812518A (en) * 1973-01-02 1974-05-21 Gen Electric Photodiode with patterned structure

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3676715A (en) * 1970-06-26 1972-07-11 Bell Telephone Labor Inc Semiconductor apparatus for image sensing and dynamic storage
CA948331A (en) * 1971-03-16 1974-05-28 Michael F. Tompsett Charge transfer imaging devices
US3983573A (en) * 1974-03-12 1976-09-28 Nippon Electric Company, Ltd. Charge-coupled linear image sensing device
JPS5937629B2 (ja) * 1975-01-30 1984-09-11 ソニー株式会社 固体撮像体
JPS5310433B2 (fr) * 1975-03-10 1978-04-13
GB1562287A (en) * 1976-03-27 1980-03-12 Marconi Co Ltd Imaging device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3601668A (en) * 1969-11-07 1971-08-24 Fairchild Camera Instr Co Surface depletion layer photodevice
US3812518A (en) * 1973-01-02 1974-05-21 Gen Electric Photodiode with patterned structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/74 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449377A1 (fr) * 1979-02-19 1980-09-12 Hitachi Ltd Dispositif de formation d'image a semi-conducteur

Also Published As

Publication number Publication date
JPS5730349B2 (fr) 1982-06-28
FR2379914B1 (fr) 1983-02-11
US4148051A (en) 1979-04-03
NL7801284A (nl) 1978-08-08
DE2804466B2 (de) 1980-02-14
JPS5396720A (en) 1978-08-24
DE2804466C3 (de) 1980-10-09
DE2804466A1 (de) 1978-08-10
GB1594185A (en) 1981-07-30

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Legal Events

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