FR2372335A1 - Turbine de pompe turbomoleculaire - Google Patents

Turbine de pompe turbomoleculaire

Info

Publication number
FR2372335A1
FR2372335A1 FR7735741A FR7735741A FR2372335A1 FR 2372335 A1 FR2372335 A1 FR 2372335A1 FR 7735741 A FR7735741 A FR 7735741A FR 7735741 A FR7735741 A FR 7735741A FR 2372335 A1 FR2372335 A1 FR 2372335A1
Authority
FR
France
Prior art keywords
rotor
turbomolecular pump
pump impeller
blades
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7735741A
Other languages
English (en)
Other versions
FR2372335B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Publication of FR2372335A1 publication Critical patent/FR2372335A1/fr
Application granted granted Critical
Publication of FR2372335B1 publication Critical patent/FR2372335B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49316—Impeller making
    • Y10T29/4932—Turbomachine making
    • Y10T29/49325—Shaping integrally bladed rotor

Abstract

a. Turbine de pompe turbomoléculaire. b. Cette pompe turbomoléculaire comprend un rotor 1 de turbine intérieur qui porte des aubes 2 de rotor formant des couronnes et qui, pour fournir l'effet d'aspiration, tournent autour d'un axe 3 à une vitesse élevée par rapport à des aubes 5 de stator montées fixes dans le carter 4 de la pompe. Les aubes 2 de rotor de chaque couronne sont des constituants de disques 6 rotoriques qui sont fixés au rotor entre des bagues 7 d'entretoisement serrées sur le rotor. c. Industrie chimique.
FR7735741A 1976-11-29 1977-11-28 Turbine de pompe turbomoleculaire Granted FR2372335A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2654055A DE2654055B2 (de) 1976-11-29 1976-11-29 Rotor- und Statorscheibe für Turbomolekularpumpe

Publications (2)

Publication Number Publication Date
FR2372335A1 true FR2372335A1 (fr) 1978-06-23
FR2372335B1 FR2372335B1 (fr) 1984-03-23

Family

ID=5994193

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7735741A Granted FR2372335A1 (fr) 1976-11-29 1977-11-28 Turbine de pompe turbomoleculaire

Country Status (5)

Country Link
US (1) US4309143A (fr)
JP (1) JPS5368411A (fr)
DE (1) DE2654055B2 (fr)
FR (1) FR2372335A1 (fr)
GB (1) GB1585674A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2633674A1 (fr) * 1988-02-26 1990-01-05 Novikov Nikolai Pompe turbomoleculaire a vide

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
JPH0261387A (ja) * 1988-08-24 1990-03-01 Seiko Seiki Co Ltd ターボ分子ポンプ
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
DE4300274A1 (de) * 1993-01-08 1994-07-14 Leybold Ag Vakuumpumpe mit Rotor
US5496149A (en) * 1995-03-10 1996-03-05 Basf Corporation Thin plate turbine
US6589009B1 (en) * 1997-06-27 2003-07-08 Ebara Corporation Turbo-molecular pump
US6332752B2 (en) 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
DE10052637B4 (de) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
DE102004012713A1 (de) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE102004023961A1 (de) * 2004-05-14 2005-12-01 Leybold Vacuum Gmbh Verfahren zur Herstellung einer Turbomolekularpumpen-Statorstufe
DE102005027097A1 (de) * 2005-06-11 2006-12-14 Pfeiffer Vacuum Gmbh Statorscheibe für Turbomolekularpumpe
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
US11274671B2 (en) * 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
JP7049052B2 (ja) * 2016-09-27 2022-04-06 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる固定円板
WO2020055897A1 (fr) * 2018-09-10 2020-03-19 Fieldpiece Instruments, Inc. Pompe à vide légère à surfaces oxydées
JP2021014800A (ja) * 2019-07-10 2021-02-12 エドワーズ株式会社 真空ポンプの製造方法、真空ポンプおよび真空ポンプ用のステータ
GB2590955B (en) * 2020-01-09 2022-06-15 Edwards Ltd Vacuum pump
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3020102A (en) * 1960-03-09 1962-02-06 Arthur Pfeiffer G M B H Molecular pumps
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
FR2086525A5 (fr) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
DE2052120A1 (de) * 1970-10-23 1972-04-27 Pfeiffer Vakuumtechnik Lageranordnung für Molekularpumpen und Turbomolekularpumpen
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
CH583856A5 (fr) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2633674A1 (fr) * 1988-02-26 1990-01-05 Novikov Nikolai Pompe turbomoleculaire a vide

Also Published As

Publication number Publication date
US4309143A (en) 1982-01-05
JPS5368411A (en) 1978-06-17
DE2654055B2 (de) 1979-11-08
FR2372335B1 (fr) 1984-03-23
GB1585674A (en) 1981-03-11
DE2654055A1 (de) 1978-06-01

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Legal Events

Date Code Title Description
ST Notification of lapse