FR2372243A1 - Procede et installation pour revetir, en continu, des substrats en verre ou en ceramique par pulverisation cathodique - Google Patents

Procede et installation pour revetir, en continu, des substrats en verre ou en ceramique par pulverisation cathodique

Info

Publication number
FR2372243A1
FR2372243A1 FR7734925A FR7734925A FR2372243A1 FR 2372243 A1 FR2372243 A1 FR 2372243A1 FR 7734925 A FR7734925 A FR 7734925A FR 7734925 A FR7734925 A FR 7734925A FR 2372243 A1 FR2372243 A1 FR 2372243A1
Authority
FR
France
Prior art keywords
substrates
magazines
chamber
sputtering
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7734925A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2372243A1 publication Critical patent/FR2372243A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
  • Breeding Of Plants And Reproduction By Means Of Culturing (AREA)

Abstract

a. Procédé et installation pour revêtir, en continu, des substrats en verre ou en céramique, par pulvérisation cathodique. b. Procédé caractérisé en ce qu'on introduit dans la chambre de sas les substrats en plusieurs pièces stockées dans des magasins, ces substrats étant disposés parallèlement avec un intervalle entre eux, on les amène, après mise sous vide, avec les magasins dans la chambre de pulvérisation, en ce qu'on prélève individuellement, dans la chambre de pulvérisation, les substrats dans l'ordre dans les magasins et on les dépose sur un dispositif de transport, en ce que les substrats parcourent la chambre de pulvérisation le long d'une bande en circulation sans fin, en ce qu'après pulvérisation, on stocke à nouveau les substrats individuellement et dans l'ordre dans un magasin, et en ce qu'on sort par sas les magasins contenant les substrats revêtus de la chambre de pulvérisation par l'intermédiaire de la chambre de sas. c. L'invention s'applique au revêtement de substrats par pulvérisation cathodique.
FR7734925A 1976-11-26 1977-11-21 Procede et installation pour revetir, en continu, des substrats en verre ou en ceramique par pulverisation cathodique Withdrawn FR2372243A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762653736 DE2653736A1 (de) 1976-11-26 1976-11-26 Verfahren und vorrichtung zur kontinuierlichen beschichtung von glas- oder keramiksubstraten mittels kathodenzerstaeubung

Publications (1)

Publication Number Publication Date
FR2372243A1 true FR2372243A1 (fr) 1978-06-23

Family

ID=5994034

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7734925A Withdrawn FR2372243A1 (fr) 1976-11-26 1977-11-21 Procede et installation pour revetir, en continu, des substrats en verre ou en ceramique par pulverisation cathodique

Country Status (5)

Country Link
JP (1) JPS5367684A (fr)
CH (1) CH620946A5 (fr)
DE (1) DE2653736A1 (fr)
FR (1) FR2372243A1 (fr)
IT (1) IT1089022B (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119672A (ja) * 1984-11-14 1986-06-06 Ulvac Corp ロ−ドロツク室のベント方法
US4640221A (en) * 1985-10-30 1987-02-03 International Business Machines Corporation Vacuum deposition system with improved mass flow control
JPS6461645A (en) * 1987-09-01 1989-03-08 Yasuda Susumu Dangerous harmful gas detecting method
DE102007022431A1 (de) * 2007-05-09 2008-11-13 Leybold Optics Gmbh Behandlungssystem für flache Substrate
DE102008056125A1 (de) * 2008-11-06 2010-05-12 Leybold Optics Gmbh Testglaswechselsystem zur selektiven Beschichtung und optischen Messung von Schichteigenschaften in einer Vakuumbeschichtungsanlage
CN111926306B (zh) * 2020-09-22 2020-12-22 上海陛通半导体能源科技股份有限公司 基于多工艺腔传送的沉积设备及晶圆沉积方法
CN114823432B (zh) * 2022-06-28 2022-09-02 江苏邑文微电子科技有限公司 半导体真空传输平台及其控制方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2100725A1 (de) * 1970-01-13 1971-07-22 Ultra Electronics Ltd Halbkontinuierhches Abscheidungs verfahren
DE2249297B1 (de) * 1971-04-02 1973-11-15 Flachglas AG Delog Detag, 8510 Fürth Vorrichtung zum beschichten grossflaechiger platten wie glasscheiben, keramik- oder kunststoffplatten und dergleichen mittels kathodenzerstaeubung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2100725A1 (de) * 1970-01-13 1971-07-22 Ultra Electronics Ltd Halbkontinuierhches Abscheidungs verfahren
DE2249297B1 (de) * 1971-04-02 1973-11-15 Flachglas AG Delog Detag, 8510 Fürth Vorrichtung zum beschichten grossflaechiger platten wie glasscheiben, keramik- oder kunststoffplatten und dergleichen mittels kathodenzerstaeubung

Also Published As

Publication number Publication date
CH620946A5 (en) 1980-12-31
DE2653736A1 (de) 1978-06-01
IT1089022B (it) 1985-06-10
JPS5367684A (en) 1978-06-16

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Legal Events

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ST Notification of lapse