IT1089022B - Procedimento e dispositivo per rivestire substrati di vetro o ceramica,in modo continuo,mediante spruzzamento catodico - Google Patents

Procedimento e dispositivo per rivestire substrati di vetro o ceramica,in modo continuo,mediante spruzzamento catodico

Info

Publication number
IT1089022B
IT1089022B IT2998477A IT2998477A IT1089022B IT 1089022 B IT1089022 B IT 1089022B IT 2998477 A IT2998477 A IT 2998477A IT 2998477 A IT2998477 A IT 2998477A IT 1089022 B IT1089022 B IT 1089022B
Authority
IT
Italy
Prior art keywords
procedure
continuously
ceramic substrates
coating glass
cathodic spraying
Prior art date
Application number
IT2998477A
Other languages
English (en)
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Application granted granted Critical
Publication of IT1089022B publication Critical patent/IT1089022B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Breeding Of Plants And Reproduction By Means Of Culturing (AREA)
IT2998477A 1976-11-26 1977-11-24 Procedimento e dispositivo per rivestire substrati di vetro o ceramica,in modo continuo,mediante spruzzamento catodico IT1089022B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762653736 DE2653736A1 (de) 1976-11-26 1976-11-26 Verfahren und vorrichtung zur kontinuierlichen beschichtung von glas- oder keramiksubstraten mittels kathodenzerstaeubung

Publications (1)

Publication Number Publication Date
IT1089022B true IT1089022B (it) 1985-06-10

Family

ID=5994034

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2998477A IT1089022B (it) 1976-11-26 1977-11-24 Procedimento e dispositivo per rivestire substrati di vetro o ceramica,in modo continuo,mediante spruzzamento catodico

Country Status (5)

Country Link
JP (1) JPS5367684A (it)
CH (1) CH620946A5 (it)
DE (1) DE2653736A1 (it)
FR (1) FR2372243A1 (it)
IT (1) IT1089022B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119672A (ja) * 1984-11-14 1986-06-06 Ulvac Corp ロ−ドロツク室のベント方法
US4640221A (en) * 1985-10-30 1987-02-03 International Business Machines Corporation Vacuum deposition system with improved mass flow control
JPS6461645A (en) * 1987-09-01 1989-03-08 Yasuda Susumu Dangerous harmful gas detecting method
DE102007022431A1 (de) * 2007-05-09 2008-11-13 Leybold Optics Gmbh Behandlungssystem für flache Substrate
DE102008056125A1 (de) * 2008-11-06 2010-05-12 Leybold Optics Gmbh Testglaswechselsystem zur selektiven Beschichtung und optischen Messung von Schichteigenschaften in einer Vakuumbeschichtungsanlage
CN111926306B (zh) * 2020-09-22 2020-12-22 上海陛通半导体能源科技股份有限公司 基于多工艺腔传送的沉积设备及晶圆沉积方法
CN114823432B (zh) * 2022-06-28 2022-09-02 江苏邑文微电子科技有限公司 半导体真空传输平台及其控制方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1321861A (en) * 1970-01-13 1973-07-04 Ultra Electronics Ltd Vacuum deposition
DE2116190C3 (de) * 1971-04-02 1979-08-30 Flachglas Ag Delog-Detag, 4650 Gelsenkirchen Vorrichtung zum Beschichten großflächiger Platten wie Glasscheiben, Keramik- oder Kunststoffplatten und dergleichen mittels Kathodenzerstäubung

Also Published As

Publication number Publication date
FR2372243A1 (fr) 1978-06-23
DE2653736A1 (de) 1978-06-01
CH620946A5 (en) 1980-12-31
JPS5367684A (en) 1978-06-16

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