IT1076194B - Procedimento,e dispositivo per il rivestimento uniforme di substrati a superficie - Google Patents

Procedimento,e dispositivo per il rivestimento uniforme di substrati a superficie

Info

Publication number
IT1076194B
IT1076194B IT2359677A IT2359677A IT1076194B IT 1076194 B IT1076194 B IT 1076194B IT 2359677 A IT2359677 A IT 2359677A IT 2359677 A IT2359677 A IT 2359677A IT 1076194 B IT1076194 B IT 1076194B
Authority
IT
Italy
Prior art keywords
procedure
uniform coating
surface substrates
substrates
uniform
Prior art date
Application number
IT2359677A
Other languages
English (en)
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Application granted granted Critical
Publication of IT1076194B publication Critical patent/IT1076194B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT2359677A 1976-06-02 1977-05-16 Procedimento,e dispositivo per il rivestimento uniforme di substrati a superficie IT1076194B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762624700 DE2624700A1 (de) 1976-06-02 1976-06-02 Verfahren und vorrichtung zum gleichfoermigen beschichten von flaechigen substraten

Publications (1)

Publication Number Publication Date
IT1076194B true IT1076194B (it) 1985-04-27

Family

ID=5979603

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2359677A IT1076194B (it) 1976-06-02 1977-05-16 Procedimento,e dispositivo per il rivestimento uniforme di substrati a superficie

Country Status (5)

Country Link
CH (1) CH630417A5 (it)
DE (1) DE2624700A1 (it)
FR (1) FR2353649A1 (it)
GB (1) GB1529418A (it)
IT (1) IT1076194B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151059A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
DE3067724D1 (en) * 1980-02-07 1984-06-14 Matsushita Electric Ind Co Ltd Method of forming a glass spacer in the magnetic gap of a magnetic head
ATE7714T1 (de) * 1980-07-01 1984-06-15 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Verfahren zur massenherstellung von legierungen und vorrichtung hierfuer.
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
GB2234988B (en) * 1989-08-16 1993-12-08 Qpl Limited Improvements in vacuum deposition machines
DE19643702B4 (de) * 1996-10-23 2007-11-29 Ald Vacuum Technologies Ag Vakuumbeschichtungsvorrichtung zum allseitigen Beschichten eines Substrats durch Rotation des Substrats im Materialstrom
EP1167566B1 (en) * 2000-06-22 2011-01-26 Panasonic Electric Works Co., Ltd. Apparatus for and method of vacuum vapor deposition

Also Published As

Publication number Publication date
FR2353649A1 (fr) 1977-12-30
GB1529418A (en) 1978-10-18
FR2353649B3 (it) 1980-07-18
CH630417A5 (en) 1982-06-15
DE2624700A1 (de) 1977-12-15

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