FR2363883A1 - Microscope a balayage a transmission, a faisceau corpusculaire - Google Patents
Microscope a balayage a transmission, a faisceau corpusculaireInfo
- Publication number
- FR2363883A1 FR2363883A1 FR7724359A FR7724359A FR2363883A1 FR 2363883 A1 FR2363883 A1 FR 2363883A1 FR 7724359 A FR7724359 A FR 7724359A FR 7724359 A FR7724359 A FR 7724359A FR 2363883 A1 FR2363883 A1 FR 2363883A1
- Authority
- FR
- France
- Prior art keywords
- radiation
- scanning microscope
- screen
- transmission scanning
- corpuscular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/295—Electron or ion diffraction tubes
- H01J37/2955—Electron or ion diffraction tubes using scanning ray
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
L'invention concerne un microscope à balayage à transmission, à faisceau corpusculaire. Dans ce microscope comportant une source de rayonnement 1 envoyant un rayonnement 2 focalisé par une lentille 3 sur un objet 4, a été dévié par un système déviateur 5, un écran transparent 11 est disposé sur le trajet du rayonnement derrière l'objet 4 et un système optique 12 est disposé de manière à former l'image de l'écran 11 sur la cible d'un tube de prise de vues de télévision 13, cependant qu'il est prévu un détecteur 18 détectant le rayonnement émanant de l'écran 11. Application notamment aux microscopes à balayage utilisés pour les examens cristallographiques.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762640260 DE2640260C3 (de) | 1976-09-03 | 1976-09-03 | Durchstrahl ungs-Raster-Korpuskularstrahlniikroskop |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2363883A1 true FR2363883A1 (fr) | 1978-03-31 |
FR2363883B1 FR2363883B1 (fr) | 1980-04-04 |
Family
ID=5987354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7724359A Granted FR2363883A1 (fr) | 1976-09-03 | 1977-08-08 | Microscope a balayage a transmission, a faisceau corpusculaire |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5331955A (fr) |
DE (1) | DE2640260C3 (fr) |
FR (1) | FR2363883A1 (fr) |
GB (1) | GB1588234A (fr) |
NL (1) | NL7709151A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2160739A (en) * | 1984-06-23 | 1985-12-24 | Mclennan Marine Limited | Night vision systems |
JPS6196643A (ja) * | 1984-10-18 | 1986-05-15 | Fuji Photo Film Co Ltd | 透過型電子顕微鏡 |
JPH071688B2 (ja) * | 1991-02-15 | 1995-01-11 | 株式会社島津製作所 | 走査型反射電子回折顕微鏡 |
JPH06213832A (ja) * | 1993-01-18 | 1994-08-05 | Shimadzu Corp | 回折電子検出装置 |
JP4255843B2 (ja) * | 2004-01-13 | 2009-04-15 | 日本電子株式会社 | 透過電子顕微鏡 |
CN111919277B (zh) * | 2018-04-02 | 2023-08-01 | 株式会社日立高新技术 | 电子显微镜 |
-
1976
- 1976-09-03 DE DE19762640260 patent/DE2640260C3/de not_active Expired
-
1977
- 1977-08-08 FR FR7724359A patent/FR2363883A1/fr active Granted
- 1977-08-18 NL NL7709151A patent/NL7709151A/xx not_active Application Discontinuation
- 1977-08-29 JP JP10351677A patent/JPS5331955A/ja active Pending
- 1977-09-02 GB GB3668177A patent/GB1588234A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7709151A (nl) | 1978-03-07 |
JPS5331955A (en) | 1978-03-25 |
GB1588234A (en) | 1981-04-15 |
DE2640260A1 (de) | 1978-03-09 |
DE2640260B2 (de) | 1978-06-22 |
DE2640260C3 (de) | 1979-03-01 |
FR2363883B1 (fr) | 1980-04-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |