FR2356710A1 - Nouvelle composition pour l'attaque d'une pellicule d'aluminium et son application - Google Patents

Nouvelle composition pour l'attaque d'une pellicule d'aluminium et son application

Info

Publication number
FR2356710A1
FR2356710A1 FR7719837A FR7719837A FR2356710A1 FR 2356710 A1 FR2356710 A1 FR 2356710A1 FR 7719837 A FR7719837 A FR 7719837A FR 7719837 A FR7719837 A FR 7719837A FR 2356710 A1 FR2356710 A1 FR 2356710A1
Authority
FR
France
Prior art keywords
weight
attack
parts
application
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7719837A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GAF Corp
Original Assignee
GAF Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GAF Corp filed Critical GAF Corp
Publication of FR2356710A1 publication Critical patent/FR2356710A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/20—Acidic compositions for etching aluminium or alloys thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Printing Plates And Materials Therefor (AREA)

Abstract

L'invention décrit une composition pour l'attaque sélective de zones non protégées d'une pellicule de A1 ou d'un alliage d'A1 sur un substrat. La composition comprend environ 65 à 90 parties en poids d'acide phosphorique, 0,5 à environ 5 parties en poids d'un constituant du type acide perchlorique et environ 9 à 30 parties en poids d'eau; elle peut éventuellement contenir aussi 0 à environ 5 % en poids d'un agent neutre ou anionique de mouillage. La composition peut servir à produire des dispositifs et appareils de micro-électronique, des circuits imprimés, des plaques de photo-lithographie, etc.
FR7719837A 1976-06-29 1977-06-28 Nouvelle composition pour l'attaque d'une pellicule d'aluminium et son application Withdrawn FR2356710A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/700,906 US4080246A (en) 1976-06-29 1976-06-29 Novel etching composition and method for using same

Publications (1)

Publication Number Publication Date
FR2356710A1 true FR2356710A1 (fr) 1978-01-27

Family

ID=24815317

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7719837A Withdrawn FR2356710A1 (fr) 1976-06-29 1977-06-28 Nouvelle composition pour l'attaque d'une pellicule d'aluminium et son application

Country Status (8)

Country Link
US (1) US4080246A (fr)
JP (1) JPS538334A (fr)
CA (1) CA1079614A (fr)
DE (1) DE2728886A1 (fr)
FR (1) FR2356710A1 (fr)
GB (1) GB1543884A (fr)
IT (1) IT1080399B (fr)
NL (1) NL7707192A (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374041A (en) * 1974-03-01 1983-02-15 Environmental Sciences Associates, Inc. Testing reagent
US4230522A (en) * 1978-12-26 1980-10-28 Rockwell International Corporation PNAF Etchant for aluminum and silicon
JPS56501226A (fr) * 1979-08-30 1981-08-27
US4389482A (en) * 1981-12-14 1983-06-21 International Business Machines Corporation Process for forming photoresists with strong resistance to reactive ion etching and high sensitivity to mid- and deep UV-light
US4661436A (en) * 1983-06-17 1987-04-28 Petrarch System, Inc. Process of forming high contrast resist pattern in positive photoagent material using alkalai developer with fluorocarbon surfactant
US4474864A (en) * 1983-07-08 1984-10-02 International Business Machines Corporation Method for dose calculation of photolithography projection printers through bleaching of photo-active compound in a photoresist
EP0155231B2 (fr) * 1984-03-07 1997-01-15 Ciba-Geigy Ag Procédé pour réaliser des images
US4681857A (en) * 1984-08-15 1987-07-21 Kawasaki Steel Corporation Method for detecting phosphorus segregates in metallic material
EP0224680B1 (fr) * 1985-12-05 1992-01-15 International Business Machines Corporation Compositions photoréserves à base de quinonediazides sensibilisées par des acides polyamides ayant un taux de dissolution réduit dans les révélateurs basiques
US4942108A (en) * 1985-12-05 1990-07-17 International Business Machines Corporation Process of making diazoquinone sensitized polyamic acid based photoresist compositions having reduced dissolution rates in alkaline developers
US4781788A (en) * 1986-12-29 1988-11-01 Delco Electronics Corporation Process for preparing printed circuit boards
GB8813891D0 (en) * 1988-06-11 1988-07-13 Micro Image Technology Ltd Solutions of perhalogenated compounds
CA2065724A1 (fr) * 1991-05-01 1992-11-02 Thomas R. Anthony Methode de production d'articles par depot chimique en phase vapeur et mandrins de support connexes
JP2734839B2 (ja) * 1991-10-09 1998-04-02 シャープ株式会社 アルミニウム用エッチング液およびエッチング方法並びにアルミニウムエッチング製品
US5242542A (en) * 1992-08-17 1993-09-07 Alain Masse Solution and method for removing zinc from the surface of a galvanized metal
US5279707A (en) * 1992-10-23 1994-01-18 Time Savers Die discoloration remover solution and method
US6270688B1 (en) * 1994-04-07 2001-08-07 Raytheon Company Chemical polishing of barium strontium titanate
AT410043B (de) * 1997-09-30 2003-01-27 Sez Ag Verfahren zum planarisieren von halbleitersubstraten
JP4510979B2 (ja) 2000-02-23 2010-07-28 ルネサスエレクトロニクス株式会社 ルテニウム又は酸化ルテニウム除去液の使用方法、及びルテニウム又は酸化ルテニウムの除去方法
US7255782B2 (en) * 2004-04-30 2007-08-14 Kenneth Crouse Selective catalytic activation of non-conductive substrates
JP5173642B2 (ja) * 2008-07-18 2013-04-03 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
JP5520515B2 (ja) * 2009-04-15 2014-06-11 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
EP2477247A1 (fr) * 2009-09-07 2012-07-18 NGK Insulators, Ltd. Procédé de fabrication d'un élément à film piézoélectrique/électrostrictif

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE695182C (de) * 1939-01-25 1940-08-19 Mahle Kg Verfahren zur Erzeugung von Poren auf Laufflaechentmaschinen
DE1196933B (de) * 1961-03-30 1965-07-15 Telefunken Patent Verfahren zum AEtzen von Silizium-Halbleiter-koerpern
US3715250A (en) * 1971-03-29 1973-02-06 Gen Instrument Corp Aluminum etching solution
US3905907A (en) * 1972-12-22 1975-09-16 Furukawa Electric Co Ltd Solutions for chemical dissolution treatment of metal materials
US3962108A (en) * 1975-11-03 1976-06-08 Kti Chemical, Inc. Chemical stripping solution

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3202612A (en) * 1960-12-05 1965-08-24 Monsanto Co Composition for bright polishing aluminum
US3833434A (en) * 1973-02-20 1974-09-03 Hitachi Ltd Method of forming multi-layer interconnections
US3953263A (en) * 1973-11-26 1976-04-27 Hitachi, Ltd. Process for preventing the formation of nitrogen monoxide in treatment of metals with nitric acid or mixed acid

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE695182C (de) * 1939-01-25 1940-08-19 Mahle Kg Verfahren zur Erzeugung von Poren auf Laufflaechentmaschinen
DE1196933B (de) * 1961-03-30 1965-07-15 Telefunken Patent Verfahren zum AEtzen von Silizium-Halbleiter-koerpern
US3715250A (en) * 1971-03-29 1973-02-06 Gen Instrument Corp Aluminum etching solution
US3905907A (en) * 1972-12-22 1975-09-16 Furukawa Electric Co Ltd Solutions for chemical dissolution treatment of metal materials
US3962108A (en) * 1975-11-03 1976-06-08 Kti Chemical, Inc. Chemical stripping solution

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EXBK/67 *
EXBK/70 *

Also Published As

Publication number Publication date
NL7707192A (nl) 1978-01-02
GB1543884A (en) 1979-04-11
CA1079614A (fr) 1980-06-17
DE2728886A1 (de) 1978-01-05
US4080246A (en) 1978-03-21
JPS538334A (en) 1978-01-25
IT1080399B (it) 1985-05-16

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Legal Events

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ST Notification of lapse