FR2348562A1 - Source d'ions - Google Patents

Source d'ions

Info

Publication number
FR2348562A1
FR2348562A1 FR7710953A FR7710953A FR2348562A1 FR 2348562 A1 FR2348562 A1 FR 2348562A1 FR 7710953 A FR7710953 A FR 7710953A FR 7710953 A FR7710953 A FR 7710953A FR 2348562 A1 FR2348562 A1 FR 2348562A1
Authority
FR
France
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7710953A
Other languages
English (en)
French (fr)
Other versions
FR2348562B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Publication of FR2348562A1 publication Critical patent/FR2348562A1/fr
Application granted granted Critical
Publication of FR2348562B1 publication Critical patent/FR2348562B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
FR7710953A 1976-04-13 1977-04-12 Source d'ions Granted FR2348562A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB15111/76A GB1574611A (en) 1976-04-13 1976-04-13 Ion sources

Publications (2)

Publication Number Publication Date
FR2348562A1 true FR2348562A1 (fr) 1977-11-10
FR2348562B1 FR2348562B1 (OSRAM) 1982-07-23

Family

ID=10053248

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7710953A Granted FR2348562A1 (fr) 1976-04-13 1977-04-12 Source d'ions

Country Status (6)

Country Link
US (1) US4088919A (OSRAM)
JP (1) JPS5916385B2 (OSRAM)
DE (1) DE2716202A1 (OSRAM)
FR (1) FR2348562A1 (OSRAM)
GB (1) GB1574611A (OSRAM)
NL (1) NL183554C (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2510305A1 (fr) * 1981-07-24 1983-01-28 Europ Agence Spatiale Reservoir pour source ionique a emission de champ, notamment pour propulseur ionique a applications spatiales, et procede de fabrication d'un tel reservoir
EP0080170A1 (en) * 1981-11-24 1983-06-01 Hitachi, Ltd. Field-emission-type ion source

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2805273C3 (de) * 1978-02-08 1982-03-18 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Einrichtung zum Erzeugen eines Strahles beschleunigter Ionen durch Kontaktionisation
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
JPS5633468A (en) * 1979-08-23 1981-04-03 Atomic Energy Authority Uk Spray generating source of fine droplet and ion of liquid material
JPS56112058A (en) * 1980-02-08 1981-09-04 Hitachi Ltd High brightness ion source
US4318029A (en) * 1980-05-12 1982-03-02 Hughes Aircraft Company Liquid metal ion source
US4318030A (en) * 1980-05-12 1982-03-02 Hughes Aircraft Company Liquid metal ion source
JPS5830055A (ja) * 1981-08-18 1983-02-22 New Japan Radio Co Ltd イオンビ−ム源
JPS5838906B2 (ja) * 1981-09-03 1983-08-26 日本電子株式会社 金属イオン源
JPS58137941A (ja) * 1982-02-10 1983-08-16 Jeol Ltd イオン源
US4577135A (en) * 1982-02-22 1986-03-18 United Kingdom Atomic Energy Authority Liquid metal ion sources
JPS58163135A (ja) * 1982-03-20 1983-09-27 Nippon Denshi Zairyo Kk イオン源
JPS58178944A (ja) * 1982-04-14 1983-10-20 Hitachi Ltd イオン源
US4629931A (en) * 1984-11-20 1986-12-16 Hughes Aircraft Company Liquid metal ion source
JPS60138831A (ja) * 1984-11-30 1985-07-23 Hitachi Ltd 荷電粒子源
US4638210A (en) * 1985-04-05 1987-01-20 Hughes Aircraft Company Liquid metal ion source
DE3677062D1 (de) * 1985-06-04 1991-02-28 Denki Kagaku Kogyo Kk Quelle geladener teilchen.
JPS61211937A (ja) * 1985-11-15 1986-09-20 Hitachi Ltd 電界放出型イオン源
US4731562A (en) * 1986-05-27 1988-03-15 The United States Of America As Represented By The Department Of Energy Electrohydrodynamically driven large-area liquid ion sources
DE3817604C2 (de) * 1987-05-27 2000-05-18 Mitsubishi Electric Corp Ionenstrahlgenerator
DE3845007C2 (de) * 1987-05-27 2000-09-28 Mitsubishi Electric Corp System zur Herstellung von Dünnschichten mittels eines Ionenstrahlgenerators
JPS6417190U (OSRAM) * 1987-07-22 1989-01-27
DE3817897A1 (de) * 1988-01-06 1989-07-20 Jupiter Toy Co Die erzeugung und handhabung von ladungsgebilden hoher ladungsdichte
US5153901A (en) * 1988-01-06 1992-10-06 Jupiter Toy Company Production and manipulation of charged particles
US5054046A (en) * 1988-01-06 1991-10-01 Jupiter Toy Company Method of and apparatus for production and manipulation of high density charge
US5123039A (en) * 1988-01-06 1992-06-16 Jupiter Toy Company Energy conversion using high charge density
CA1330827C (en) * 1988-01-06 1994-07-19 Jupiter Toy Company Production and manipulation of high charge density
US5018180A (en) * 1988-05-03 1991-05-21 Jupiter Toy Company Energy conversion using high charge density
US5584740A (en) * 1993-03-31 1996-12-17 The United States Of America As Represented By The Secretary Of The Navy Thin-film edge field emitter device and method of manufacture therefor
US5727978A (en) * 1995-12-19 1998-03-17 Advanced Micro Devices, Inc. Method of forming electron beam emitting tungsten filament
EP1622184B1 (en) * 2004-07-28 2011-05-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method of producing same
DE102007027097B4 (de) * 2007-06-12 2010-12-30 Forschungszentrum Dresden - Rossendorf E.V. Flüssigmetall-Ionenquelle zur Erzeugung von Lithium-Ionenstrahlen
AT506340B1 (de) * 2008-01-25 2012-04-15 Fotec Forschungs & Technologi Verfahren zur herstellung einer ionenquelle
US8453426B2 (en) * 2009-04-06 2013-06-04 Raytheon Company Current controlled field emission thruster
EP3923313B1 (en) * 2019-07-23 2023-09-27 Param Corporation Electron gun device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1442998A (en) * 1973-01-24 1976-07-21 Atomic Energy Authority Uk Field emission ion sources

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122882A (en) * 1960-11-23 1964-03-03 Aerojet General Co Propulsion means
US3475636A (en) * 1967-11-14 1969-10-28 Hughes Aircraft Co Liquid-metal arc cathode with maximized electron/atom emission ratio
US3852595A (en) * 1972-09-21 1974-12-03 Stanford Research Inst Multipoint field ionization source
DE2333866A1 (de) * 1973-07-03 1975-01-23 Max Planck Gesellschaft Felddesorptions-ionenquelle und verfahren zu ihrer herstellung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1442998A (en) * 1973-01-24 1976-07-21 Atomic Energy Authority Uk Field emission ion sources

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
EXBK/63 *
EXBK/74 *
EXBK/75 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2510305A1 (fr) * 1981-07-24 1983-01-28 Europ Agence Spatiale Reservoir pour source ionique a emission de champ, notamment pour propulseur ionique a applications spatiales, et procede de fabrication d'un tel reservoir
EP0080170A1 (en) * 1981-11-24 1983-06-01 Hitachi, Ltd. Field-emission-type ion source

Also Published As

Publication number Publication date
NL183554C (nl) 1988-11-16
DE2716202A1 (de) 1977-11-03
FR2348562B1 (OSRAM) 1982-07-23
JPS52125998A (en) 1977-10-22
US4088919A (en) 1978-05-09
JPS5916385B2 (ja) 1984-04-14
NL7703981A (nl) 1977-10-17
GB1574611A (en) 1980-09-10
NL183554B (nl) 1988-06-16

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Legal Events

Date Code Title Description
TP Transmission of property