FR2331884B1 - - Google Patents

Info

Publication number
FR2331884B1
FR2331884B1 FR7633868A FR7633868A FR2331884B1 FR 2331884 B1 FR2331884 B1 FR 2331884B1 FR 7633868 A FR7633868 A FR 7633868A FR 7633868 A FR7633868 A FR 7633868A FR 2331884 B1 FR2331884 B1 FR 2331884B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7633868A
Other languages
French (fr)
Other versions
FR2331884A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2331884A1 publication Critical patent/FR2331884A1/fr
Application granted granted Critical
Publication of FR2331884B1 publication Critical patent/FR2331884B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00Ion implantation into wafers, substrates or parts of devices
    • H10P30/20Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/202Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials
    • H10P30/204Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials into Group IV semiconductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00Ion implantation into wafers, substrates or parts of devices
    • H10P30/20Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/21Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping of electrically active species
    • H10P30/212Through-implantation
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00Ion implantation into wafers, substrates or parts of devices
    • H10P30/20Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/22Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping using masks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/942Masking
    • Y10S438/944Shadow
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/983Zener diodes
FR7633868A 1975-11-11 1976-11-10 Procede pour fabriquer un dispositif semi-conducteur, et dispositif fabrique de la sorte Granted FR2331884A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7513161A NL7513161A (nl) 1975-11-11 1975-11-11 Werkwijze ter vervaardiging van een halfgeleider- inrichting, en inrichting vervaardigd volgens de werkwijze.

Publications (2)

Publication Number Publication Date
FR2331884A1 FR2331884A1 (fr) 1977-06-10
FR2331884B1 true FR2331884B1 (online.php) 1982-06-18

Family

ID=19824830

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7633868A Granted FR2331884A1 (fr) 1975-11-11 1976-11-10 Procede pour fabriquer un dispositif semi-conducteur, et dispositif fabrique de la sorte

Country Status (9)

Country Link
US (1) US4104085A (online.php)
JP (1) JPS5260579A (online.php)
AU (1) AU505948B2 (online.php)
CA (1) CA1071333A (online.php)
DE (1) DE2650511C2 (online.php)
FR (1) FR2331884A1 (online.php)
GB (1) GB1553417A (online.php)
IT (1) IT1070048B (online.php)
NL (1) NL7513161A (online.php)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2802838A1 (de) * 1978-01-23 1979-08-16 Siemens Ag Mis-feldeffekttransistor mit kurzer kanallaenge
US4357178A (en) * 1978-12-20 1982-11-02 Ibm Corporation Schottky barrier diode with controlled characteristics and fabrication method
FR2445617A1 (fr) * 1978-12-28 1980-07-25 Ibm France Resistance a tension de claquage amelioree obtenue par une double implantation ionique dans un substrat semi-conducteur et son procede de fabrication
JPS5826829B2 (ja) * 1979-08-30 1983-06-06 富士通株式会社 ダイナミックメモリセルの製造方法
NL7907680A (nl) * 1979-10-18 1981-04-22 Philips Nv Zenerdiode.
DE3003391C2 (de) * 1980-01-31 1984-08-30 Josef Dipl.-Phys. Dr. 8041 Fahrenzhausen Kemmer Strahlungsdetektor mit einem passivierten pn-Halbleiterübergang
JPS5856481A (ja) * 1981-09-30 1983-04-04 Fujitsu Ltd ゲルマニウム受光素子の製造方法
US4473941A (en) * 1982-12-22 1984-10-02 Ncr Corporation Method of fabricating zener diodes
DE3581348D1 (de) * 1984-09-28 1991-02-21 Siemens Ag Verfahren zum herstellen eines pn-uebergangs mit hoher durchbruchsspannung.
US4579626A (en) * 1985-02-28 1986-04-01 Rca Corporation Method of making a charge-coupled device imager
US4910158A (en) * 1987-11-23 1990-03-20 Hughes Aircraft Company Zener diode emulation and method of forming the same
US4968634A (en) * 1988-05-20 1990-11-06 Siemens Aktiengesellschaft Fabrication process for photodiodes responsive to blue light
CN1011991B (zh) * 1988-08-29 1991-03-13 里特机械公司 在纺织机械内的一种加热方法
JPH02159775A (ja) * 1988-12-14 1990-06-19 Toshiba Corp 半導体受光素子及びその製造方法
US5256579A (en) * 1989-04-03 1993-10-26 Massachusetts Institute Of Technology Tunable-frequency Gunn diodes fabrication with focused ion beams
US5550069A (en) * 1990-06-23 1996-08-27 El Mos Electronik In Mos Technologie Gmbh Method for producing a PMOS transistor
DE4020076A1 (de) * 1990-06-23 1992-01-09 El Mos Elektronik In Mos Techn Verfahren zur herstellung eines pmos-transistors sowie pmos-transistor
JPH07245397A (ja) * 1994-03-07 1995-09-19 Oki Electric Ind Co Ltd 半導体装置の製造方法
US5384273A (en) * 1994-04-26 1995-01-24 Motorola Inc. Method of making a semiconductor device having a short gate length
WO1997011498A1 (en) * 1995-09-18 1997-03-27 Philips Electronics N.V. A varicap diode and method of manufacturing a varicap diode
JPH10242394A (ja) * 1997-02-27 1998-09-11 Matsushita Electron Corp 半導体装置の製造方法
JP3016371B2 (ja) * 1997-03-26 2000-03-06 日本電気株式会社 光検出器の製造方法
DE19837395C2 (de) * 1998-08-18 2001-07-19 Infineon Technologies Ag Verfahren zur Herstellung eines eine strukturierte Isolationsschicht enthaltenden Halbleiterbauelements
US6815363B2 (en) * 2000-08-11 2004-11-09 The Regents Of The University Of California Method for nanomachining high aspect ratio structures
US7887711B2 (en) * 2002-06-13 2011-02-15 International Business Machines Corporation Method for etching chemically inert metal oxides
DE102009017505B4 (de) * 2008-11-21 2014-07-10 Ketek Gmbh Strahlungsdetektor, Verwendung eines Strahlungsdetektors und Verfahren zur Herstellung eines Strahlungsdetektors
US8350365B1 (en) * 2011-01-13 2013-01-08 Xilinx, Inc. Mitigation of well proximity effect in integrated circuits

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3697829A (en) * 1968-12-30 1972-10-10 Gen Electric Semiconductor devices with improved voltage breakdown characteristics
BE756039A (fr) * 1969-09-15 1971-02-15 Western Electric Co Procede pour former, par implantation d'ions, une zone localisee dans un corps de semi-conducteur
US3666548A (en) * 1970-01-06 1972-05-30 Ibm Monocrystalline semiconductor body having dielectrically isolated regions and method of forming
JPS5624392B2 (online.php) * 1971-08-11 1981-06-05
DE2207654B2 (de) * 1972-02-18 1974-02-14 Deutsche Itt Industries Gmbh, 7800 Freiburg Verfahren zum Herstellen einer Zenerdiode
US3769109A (en) * 1972-04-19 1973-10-30 Bell Telephone Labor Inc PRODUCTION OF SiO{11 {11 TAPERED FILMS

Also Published As

Publication number Publication date
DE2650511C2 (de) 1983-10-27
IT1070048B (it) 1985-03-25
AU1944276A (en) 1978-05-18
JPS5260579A (en) 1977-05-19
CA1071333A (en) 1980-02-05
NL7513161A (nl) 1977-05-13
DE2650511A1 (de) 1977-05-12
JPS5756786B2 (online.php) 1982-12-01
AU505948B2 (en) 1979-12-06
FR2331884A1 (fr) 1977-06-10
GB1553417A (en) 1979-09-26
US4104085A (en) 1978-08-01

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Legal Events

Date Code Title Description
ST Notification of lapse