FR2331884B1 - - Google Patents
Info
- Publication number
- FR2331884B1 FR2331884B1 FR7633868A FR7633868A FR2331884B1 FR 2331884 B1 FR2331884 B1 FR 2331884B1 FR 7633868 A FR7633868 A FR 7633868A FR 7633868 A FR7633868 A FR 7633868A FR 2331884 B1 FR2331884 B1 FR 2331884B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P30/00—Ion implantation into wafers, substrates or parts of devices
- H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
- H10P30/202—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials
- H10P30/204—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the semiconductor materials into Group IV semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/225—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P30/00—Ion implantation into wafers, substrates or parts of devices
- H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
- H10P30/21—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping of electrically active species
- H10P30/212—Through-implantation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P30/00—Ion implantation into wafers, substrates or parts of devices
- H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
- H10P30/22—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/944—Shadow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/983—Zener diodes
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7513161A NL7513161A (nl) | 1975-11-11 | 1975-11-11 | Werkwijze ter vervaardiging van een halfgeleider- inrichting, en inrichting vervaardigd volgens de werkwijze. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2331884A1 FR2331884A1 (fr) | 1977-06-10 |
| FR2331884B1 true FR2331884B1 (online.php) | 1982-06-18 |
Family
ID=19824830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7633868A Granted FR2331884A1 (fr) | 1975-11-11 | 1976-11-10 | Procede pour fabriquer un dispositif semi-conducteur, et dispositif fabrique de la sorte |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4104085A (online.php) |
| JP (1) | JPS5260579A (online.php) |
| AU (1) | AU505948B2 (online.php) |
| CA (1) | CA1071333A (online.php) |
| DE (1) | DE2650511C2 (online.php) |
| FR (1) | FR2331884A1 (online.php) |
| GB (1) | GB1553417A (online.php) |
| IT (1) | IT1070048B (online.php) |
| NL (1) | NL7513161A (online.php) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2802838A1 (de) * | 1978-01-23 | 1979-08-16 | Siemens Ag | Mis-feldeffekttransistor mit kurzer kanallaenge |
| US4357178A (en) * | 1978-12-20 | 1982-11-02 | Ibm Corporation | Schottky barrier diode with controlled characteristics and fabrication method |
| FR2445617A1 (fr) * | 1978-12-28 | 1980-07-25 | Ibm France | Resistance a tension de claquage amelioree obtenue par une double implantation ionique dans un substrat semi-conducteur et son procede de fabrication |
| JPS5826829B2 (ja) * | 1979-08-30 | 1983-06-06 | 富士通株式会社 | ダイナミックメモリセルの製造方法 |
| NL7907680A (nl) * | 1979-10-18 | 1981-04-22 | Philips Nv | Zenerdiode. |
| DE3003391C2 (de) * | 1980-01-31 | 1984-08-30 | Josef Dipl.-Phys. Dr. 8041 Fahrenzhausen Kemmer | Strahlungsdetektor mit einem passivierten pn-Halbleiterübergang |
| JPS5856481A (ja) * | 1981-09-30 | 1983-04-04 | Fujitsu Ltd | ゲルマニウム受光素子の製造方法 |
| US4473941A (en) * | 1982-12-22 | 1984-10-02 | Ncr Corporation | Method of fabricating zener diodes |
| DE3581348D1 (de) * | 1984-09-28 | 1991-02-21 | Siemens Ag | Verfahren zum herstellen eines pn-uebergangs mit hoher durchbruchsspannung. |
| US4579626A (en) * | 1985-02-28 | 1986-04-01 | Rca Corporation | Method of making a charge-coupled device imager |
| US4910158A (en) * | 1987-11-23 | 1990-03-20 | Hughes Aircraft Company | Zener diode emulation and method of forming the same |
| US4968634A (en) * | 1988-05-20 | 1990-11-06 | Siemens Aktiengesellschaft | Fabrication process for photodiodes responsive to blue light |
| CN1011991B (zh) * | 1988-08-29 | 1991-03-13 | 里特机械公司 | 在纺织机械内的一种加热方法 |
| JPH02159775A (ja) * | 1988-12-14 | 1990-06-19 | Toshiba Corp | 半導体受光素子及びその製造方法 |
| US5256579A (en) * | 1989-04-03 | 1993-10-26 | Massachusetts Institute Of Technology | Tunable-frequency Gunn diodes fabrication with focused ion beams |
| US5550069A (en) * | 1990-06-23 | 1996-08-27 | El Mos Electronik In Mos Technologie Gmbh | Method for producing a PMOS transistor |
| DE4020076A1 (de) * | 1990-06-23 | 1992-01-09 | El Mos Elektronik In Mos Techn | Verfahren zur herstellung eines pmos-transistors sowie pmos-transistor |
| JPH07245397A (ja) * | 1994-03-07 | 1995-09-19 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
| US5384273A (en) * | 1994-04-26 | 1995-01-24 | Motorola Inc. | Method of making a semiconductor device having a short gate length |
| WO1997011498A1 (en) * | 1995-09-18 | 1997-03-27 | Philips Electronics N.V. | A varicap diode and method of manufacturing a varicap diode |
| JPH10242394A (ja) * | 1997-02-27 | 1998-09-11 | Matsushita Electron Corp | 半導体装置の製造方法 |
| JP3016371B2 (ja) * | 1997-03-26 | 2000-03-06 | 日本電気株式会社 | 光検出器の製造方法 |
| DE19837395C2 (de) * | 1998-08-18 | 2001-07-19 | Infineon Technologies Ag | Verfahren zur Herstellung eines eine strukturierte Isolationsschicht enthaltenden Halbleiterbauelements |
| US6815363B2 (en) * | 2000-08-11 | 2004-11-09 | The Regents Of The University Of California | Method for nanomachining high aspect ratio structures |
| US7887711B2 (en) * | 2002-06-13 | 2011-02-15 | International Business Machines Corporation | Method for etching chemically inert metal oxides |
| DE102009017505B4 (de) * | 2008-11-21 | 2014-07-10 | Ketek Gmbh | Strahlungsdetektor, Verwendung eines Strahlungsdetektors und Verfahren zur Herstellung eines Strahlungsdetektors |
| US8350365B1 (en) * | 2011-01-13 | 2013-01-08 | Xilinx, Inc. | Mitigation of well proximity effect in integrated circuits |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3697829A (en) * | 1968-12-30 | 1972-10-10 | Gen Electric | Semiconductor devices with improved voltage breakdown characteristics |
| BE756039A (fr) * | 1969-09-15 | 1971-02-15 | Western Electric Co | Procede pour former, par implantation d'ions, une zone localisee dans un corps de semi-conducteur |
| US3666548A (en) * | 1970-01-06 | 1972-05-30 | Ibm | Monocrystalline semiconductor body having dielectrically isolated regions and method of forming |
| JPS5624392B2 (online.php) * | 1971-08-11 | 1981-06-05 | ||
| DE2207654B2 (de) * | 1972-02-18 | 1974-02-14 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Verfahren zum Herstellen einer Zenerdiode |
| US3769109A (en) * | 1972-04-19 | 1973-10-30 | Bell Telephone Labor Inc | PRODUCTION OF SiO{11 {11 TAPERED FILMS |
-
1975
- 1975-11-11 NL NL7513161A patent/NL7513161A/xx unknown
-
1976
- 1976-11-03 US US05/738,530 patent/US4104085A/en not_active Expired - Lifetime
- 1976-11-04 DE DE2650511A patent/DE2650511C2/de not_active Expired
- 1976-11-05 CA CA264,987A patent/CA1071333A/en not_active Expired
- 1976-11-08 IT IT29113/76A patent/IT1070048B/it active
- 1976-11-08 GB GB46337/76A patent/GB1553417A/en not_active Expired
- 1976-11-09 AU AU19442/76A patent/AU505948B2/en not_active Expired
- 1976-11-10 FR FR7633868A patent/FR2331884A1/fr active Granted
- 1976-11-11 JP JP51134758A patent/JPS5260579A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2650511C2 (de) | 1983-10-27 |
| IT1070048B (it) | 1985-03-25 |
| AU1944276A (en) | 1978-05-18 |
| JPS5260579A (en) | 1977-05-19 |
| CA1071333A (en) | 1980-02-05 |
| NL7513161A (nl) | 1977-05-13 |
| DE2650511A1 (de) | 1977-05-12 |
| JPS5756786B2 (online.php) | 1982-12-01 |
| AU505948B2 (en) | 1979-12-06 |
| FR2331884A1 (fr) | 1977-06-10 |
| GB1553417A (en) | 1979-09-26 |
| US4104085A (en) | 1978-08-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |