BE756039A - Procede pour former, par implantation d'ions, une zone localisee dans un corps de semi-conducteur - Google Patents

Procede pour former, par implantation d'ions, une zone localisee dans un corps de semi-conducteur

Info

Publication number
BE756039A
BE756039A BE756039DA BE756039A BE 756039 A BE756039 A BE 756039A BE 756039D A BE756039D A BE 756039DA BE 756039 A BE756039 A BE 756039A
Authority
BE
Belgium
Prior art keywords
implantation
ions
forming
semiconductor body
localized zone
Prior art date
Application number
Other languages
English (en)
Inventor
M P Lepselter
H A Waggener
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE756039A publication Critical patent/BE756039A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/043—Dual dielectric
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/106—Masks, special

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)
  • Semiconductor Memories (AREA)
  • Drying Of Semiconductors (AREA)
BE756039D 1969-09-15 Procede pour former, par implantation d'ions, une zone localisee dans un corps de semi-conducteur BE756039A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85785969A 1969-09-15 1969-09-15

Publications (1)

Publication Number Publication Date
BE756039A true BE756039A (fr) 1971-02-15

Family

ID=25326877

Family Applications (1)

Application Number Title Priority Date Filing Date
BE756039D BE756039A (fr) 1969-09-15 Procede pour former, par implantation d'ions, une zone localisee dans un corps de semi-conducteur

Country Status (8)

Country Link
US (1) US3617391A (fr)
JP (1) JPS4838091B1 (fr)
BE (1) BE756039A (fr)
DE (1) DE2045303A1 (fr)
FR (1) FR2061709B1 (fr)
GB (1) GB1294515A (fr)
NL (1) NL7013398A (fr)
SE (1) SE352777B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3860454A (en) * 1973-06-27 1975-01-14 Ibm Field effect transistor structure for minimizing parasitic inversion and process for fabricating
NL7513161A (nl) * 1975-11-11 1977-05-13 Philips Nv Werkwijze ter vervaardiging van een halfgeleider- inrichting, en inrichting vervaardigd volgens de werkwijze.
US7825488B2 (en) * 2006-05-31 2010-11-02 Advanced Analogic Technologies, Inc. Isolation structures for integrated circuits and modular methods of forming the same
US8350365B1 (en) * 2011-01-13 2013-01-08 Xilinx, Inc. Mitigation of well proximity effect in integrated circuits

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3434894A (en) * 1965-10-06 1969-03-25 Ion Physics Corp Fabricating solid state devices by ion implantation
US3431150A (en) * 1966-10-07 1969-03-04 Us Air Force Process for implanting grids in semiconductor devices
US3533158A (en) * 1967-10-30 1970-10-13 Hughes Aircraft Co Method of utilizing an ion beam to form custom circuits

Also Published As

Publication number Publication date
DE2045303A1 (de) 1971-03-18
GB1294515A (en) 1972-11-01
SE352777B (fr) 1973-01-08
FR2061709B1 (fr) 1976-09-03
US3617391A (en) 1971-11-02
NL7013398A (fr) 1971-03-17
JPS4838091B1 (fr) 1973-11-15
FR2061709A1 (fr) 1971-06-25

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