BE791212A - Procede pour le durcissement des reserves - Google Patents

Procede pour le durcissement des reserves

Info

Publication number
BE791212A
BE791212A BE791212DA BE791212A BE 791212 A BE791212 A BE 791212A BE 791212D A BE791212D A BE 791212DA BE 791212 A BE791212 A BE 791212A
Authority
BE
Belgium
Prior art keywords
reserves
hardening
Prior art date
Application number
Other languages
English (en)
Inventor
W D Cross
Original Assignee
Buckbee Mears Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE791212A publication Critical patent/BE791212A/fr

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/38—Treatment before imagewise removal, e.g. prebaking
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
BE791212D 1972-02-03 Procede pour le durcissement des reserves BE791212A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22308272A 1972-02-03 1972-02-03

Publications (1)

Publication Number Publication Date
BE791212A true BE791212A (fr) 1973-03-01

Family

ID=22834951

Family Applications (1)

Application Number Title Priority Date Filing Date
BE791212D BE791212A (fr) 1972-02-03 Procede pour le durcissement des reserves

Country Status (8)

Country Link
JP (1) JPS4887904A (fr)
BE (1) BE791212A (fr)
CA (1) CA981507A (fr)
DE (1) DE2259180A1 (fr)
FR (1) FR2171724A5 (fr)
GB (1) GB1387350A (fr)
IT (1) IT972853B (fr)
NL (1) NL7215272A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5228370B2 (fr) * 1972-03-06 1977-07-26
DE2529054C2 (de) * 1975-06-30 1982-04-29 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur Herstellung eines zur Vorlage negativen Resistbildes
DE3038605A1 (de) 1980-10-13 1982-06-03 Hoechst Ag, 6000 Frankfurt Verfahren zur herstellung von reliefkopien
JPS5890636A (ja) * 1981-11-24 1983-05-30 Fuji Photo Film Co Ltd 光重合性組成物を用いた感光材料による画像形成方法および現像ユニツト
US4389482A (en) * 1981-12-14 1983-06-21 International Business Machines Corporation Process for forming photoresists with strong resistance to reactive ion etching and high sensitivity to mid- and deep UV-light
DE3731333A1 (de) * 1987-09-15 1989-03-30 Schering Ag Verfahren zur herstellung von leiternetzwerken
JPH1026834A (ja) * 1996-07-09 1998-01-27 Tokyo Ohka Kogyo Co Ltd 画像形成方法
US11581187B2 (en) * 2018-12-20 2023-02-14 Xia Tai Xin Semiconductor (Qing Dao) Ltd. Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same

Also Published As

Publication number Publication date
CA981507A (en) 1976-01-13
GB1387350A (en) 1975-03-19
FR2171724A5 (fr) 1973-09-21
IT972853B (it) 1974-05-31
JPS4887904A (fr) 1973-11-19
DE2259180A1 (de) 1973-08-09
NL7215272A (fr) 1973-08-07

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