JPS4887904A - - Google Patents
Info
- Publication number
- JPS4887904A JPS4887904A JP1166773A JP1166773A JPS4887904A JP S4887904 A JPS4887904 A JP S4887904A JP 1166773 A JP1166773 A JP 1166773A JP 1166773 A JP1166773 A JP 1166773A JP S4887904 A JPS4887904 A JP S4887904A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22308272A | 1972-02-03 | 1972-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4887904A true JPS4887904A (fr) | 1973-11-19 |
Family
ID=22834951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1166773A Pending JPS4887904A (fr) | 1972-02-03 | 1973-01-30 |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS4887904A (fr) |
| BE (1) | BE791212A (fr) |
| CA (1) | CA981507A (fr) |
| DE (1) | DE2259180A1 (fr) |
| FR (1) | FR2171724A5 (fr) |
| GB (1) | GB1387350A (fr) |
| IT (1) | IT972853B (fr) |
| NL (1) | NL7215272A (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4890738A (fr) * | 1972-03-06 | 1973-11-27 | ||
| JPS5890636A (ja) * | 1981-11-24 | 1983-05-30 | Fuji Photo Film Co Ltd | 光重合性組成物を用いた感光材料による画像形成方法および現像ユニツト |
| JPS58115435A (ja) * | 1981-12-14 | 1983-07-09 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | パタ−ン状フオトレジストの形成方法 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2529054C2 (de) * | 1975-06-30 | 1982-04-29 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zur Herstellung eines zur Vorlage negativen Resistbildes |
| DE3038605A1 (de) | 1980-10-13 | 1982-06-03 | Hoechst Ag, 6000 Frankfurt | Verfahren zur herstellung von reliefkopien |
| DE3731333A1 (de) * | 1987-09-15 | 1989-03-30 | Schering Ag | Verfahren zur herstellung von leiternetzwerken |
| JPH1026834A (ja) * | 1996-07-09 | 1998-01-27 | Tokyo Ohka Kogyo Co Ltd | 画像形成方法 |
| US11581187B2 (en) * | 2018-12-20 | 2023-02-14 | Xia Tai Xin Semiconductor (Qing Dao) Ltd. | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same |
-
0
- BE BE791212D patent/BE791212A/fr unknown
-
1972
- 1972-10-10 CA CA153,534A patent/CA981507A/en not_active Expired
- 1972-10-11 GB GB4680472A patent/GB1387350A/en not_active Expired
- 1972-11-10 NL NL7215272A patent/NL7215272A/xx not_active Application Discontinuation
- 1972-12-02 DE DE19722259180 patent/DE2259180A1/de active Pending
- 1972-12-18 FR FR7245032A patent/FR2171724A5/fr not_active Expired
- 1972-12-22 IT IT3350772A patent/IT972853B/it active
-
1973
- 1973-01-30 JP JP1166773A patent/JPS4887904A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4890738A (fr) * | 1972-03-06 | 1973-11-27 | ||
| JPS5228370B2 (fr) * | 1972-03-06 | 1977-07-26 | ||
| JPS5890636A (ja) * | 1981-11-24 | 1983-05-30 | Fuji Photo Film Co Ltd | 光重合性組成物を用いた感光材料による画像形成方法および現像ユニツト |
| JPS58115435A (ja) * | 1981-12-14 | 1983-07-09 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | パタ−ン状フオトレジストの形成方法 |
| JPH0216911B2 (fr) * | 1981-12-14 | 1990-04-18 | Intaanashonaru Bijinesu Mashiinzu Corp |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2171724A5 (fr) | 1973-09-21 |
| BE791212A (fr) | 1973-03-01 |
| CA981507A (en) | 1976-01-13 |
| IT972853B (it) | 1974-05-31 |
| NL7215272A (fr) | 1973-08-07 |
| GB1387350A (en) | 1975-03-19 |
| DE2259180A1 (de) | 1973-08-09 |