FR2329763A1 - Perfectionnements apportes aux procedes de depot de films minces sur des supports - Google Patents
Perfectionnements apportes aux procedes de depot de films minces sur des supportsInfo
- Publication number
- FR2329763A1 FR2329763A1 FR7533158A FR7533158A FR2329763A1 FR 2329763 A1 FR2329763 A1 FR 2329763A1 FR 7533158 A FR7533158 A FR 7533158A FR 7533158 A FR7533158 A FR 7533158A FR 2329763 A1 FR2329763 A1 FR 2329763A1
- Authority
- FR
- France
- Prior art keywords
- substrate
- magnetron cathode
- particles
- sputtering
- magnetron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7533158A FR2329763A1 (fr) | 1975-10-30 | 1975-10-30 | Perfectionnements apportes aux procedes de depot de films minces sur des supports |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7533158A FR2329763A1 (fr) | 1975-10-30 | 1975-10-30 | Perfectionnements apportes aux procedes de depot de films minces sur des supports |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2329763A1 true FR2329763A1 (fr) | 1977-05-27 |
FR2329763B1 FR2329763B1 (fr) | 1978-05-19 |
Family
ID=9161818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7533158A Granted FR2329763A1 (fr) | 1975-10-30 | 1975-10-30 | Perfectionnements apportes aux procedes de depot de films minces sur des supports |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2329763A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2500852A1 (fr) * | 1981-03-02 | 1982-09-03 | Leybold Heraeus Gmbh & Co Kg |
-
1975
- 1975-10-30 FR FR7533158A patent/FR2329763A1/fr active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2500852A1 (fr) * | 1981-03-02 | 1982-09-03 | Leybold Heraeus Gmbh & Co Kg |
Also Published As
Publication number | Publication date |
---|---|
FR2329763B1 (fr) | 1978-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |