FR2369016A1 - Procede d - Google Patents

Procede d

Info

Publication number
FR2369016A1
FR2369016A1 FR7632217A FR7632217A FR2369016A1 FR 2369016 A1 FR2369016 A1 FR 2369016A1 FR 7632217 A FR7632217 A FR 7632217A FR 7632217 A FR7632217 A FR 7632217A FR 2369016 A1 FR2369016 A1 FR 2369016A1
Authority
FR
France
Prior art keywords
schmidt
esp
films
elliptical
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7632217A
Other languages
English (en)
Other versions
FR2369016B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe des Telephones Ericsson SA
Original Assignee
Societe des Telephones Ericsson SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe des Telephones Ericsson SA filed Critical Societe des Telephones Ericsson SA
Priority to FR7632217A priority Critical patent/FR2369016A1/fr
Publication of FR2369016A1 publication Critical patent/FR2369016A1/fr
Application granted granted Critical
Publication of FR2369016B1 publication Critical patent/FR2369016B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

Procédé d'exposition selon lequel on effectue une occultation périodique d'un substrat, de manière à l'isoler périodiquement de l'émission d'une source. On réalise un mouvement relatif de translation alternatif notamment rectiligne, entre le substrat 2 et la source 3, suivant une direction transversale par rapport à celle joignant le centre de la source 3 au centre du substrat 2; l'occultation, réalisée avec un cache rotatif 20, et le mouvement de translation sont combinés de manière telle qu'on obtienne, sur le substrat, des courbes d'égale exposition ayant une forme déterminée, notamment elliptique. Application à la réalisation d'une lame de Schmidt destinée à travailler en réflexion et dont la surface réfléchissante asphérique, sans symétrie de révolution, est formée par un dépôt obtenu par évaporation sous vide.
FR7632217A 1976-10-26 1976-10-26 Procede d Granted FR2369016A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7632217A FR2369016A1 (fr) 1976-10-26 1976-10-26 Procede d

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7632217A FR2369016A1 (fr) 1976-10-26 1976-10-26 Procede d

Publications (2)

Publication Number Publication Date
FR2369016A1 true FR2369016A1 (fr) 1978-05-26
FR2369016B1 FR2369016B1 (fr) 1980-03-28

Family

ID=9179209

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7632217A Granted FR2369016A1 (fr) 1976-10-26 1976-10-26 Procede d

Country Status (1)

Country Link
FR (1) FR2369016A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0023149A1 (fr) * 1979-07-19 1981-01-28 Optical & Electrical Coatings Limited Procédé et appareil pour l'obtention d'un revêtement d'épaisseur ou de densité non uniforme par évaporation sous vide
EP0118576A1 (fr) * 1983-03-11 1984-09-19 Hitachi, Ltd. Procédé pour l'obtention de films minces
FR2581793A1 (fr) * 1985-05-07 1986-11-14 Duruy Nicolas Procede et dispositif de fabrication de composants electroniques ou optoelectroniques avec depot par evaporation sous vide
FR2619226A1 (fr) * 1987-08-07 1989-02-10 Matra Procede de realisation d'une surface aspherique sur un element optique et composant optique composite obtenu par mise en oeuvre du procede.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0023149A1 (fr) * 1979-07-19 1981-01-28 Optical & Electrical Coatings Limited Procédé et appareil pour l'obtention d'un revêtement d'épaisseur ou de densité non uniforme par évaporation sous vide
EP0118576A1 (fr) * 1983-03-11 1984-09-19 Hitachi, Ltd. Procédé pour l'obtention de films minces
FR2581793A1 (fr) * 1985-05-07 1986-11-14 Duruy Nicolas Procede et dispositif de fabrication de composants electroniques ou optoelectroniques avec depot par evaporation sous vide
FR2619226A1 (fr) * 1987-08-07 1989-02-10 Matra Procede de realisation d'une surface aspherique sur un element optique et composant optique composite obtenu par mise en oeuvre du procede.

Also Published As

Publication number Publication date
FR2369016B1 (fr) 1980-03-28

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