FR2274072A1 - Procede de formation d'images en materiau photoresistant, applicable notamment dans l'industrie des semi-conducteurs - Google Patents

Procede de formation d'images en materiau photoresistant, applicable notamment dans l'industrie des semi-conducteurs

Info

Publication number
FR2274072A1
FR2274072A1 FR7514030A FR7514030A FR2274072A1 FR 2274072 A1 FR2274072 A1 FR 2274072A1 FR 7514030 A FR7514030 A FR 7514030A FR 7514030 A FR7514030 A FR 7514030A FR 2274072 A1 FR2274072 A1 FR 2274072A1
Authority
FR
France
Prior art keywords
semiconductor industry
forming images
applicable especially
photoresistant material
photoresistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7514030A
Other languages
English (en)
Other versions
FR2274072B1 (fr
Inventor
Leon H Kaplan
Steven M Zimmerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2274072A1 publication Critical patent/FR2274072A1/fr
Application granted granted Critical
Publication of FR2274072B1 publication Critical patent/FR2274072B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
FR7514030A 1974-06-06 1975-04-29 Procede de formation d'images en materiau photoresistant, applicable notamment dans l'industrie des semi-conducteurs Granted FR2274072A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47683174A 1974-06-06 1974-06-06

Publications (2)

Publication Number Publication Date
FR2274072A1 true FR2274072A1 (fr) 1976-01-02
FR2274072B1 FR2274072B1 (fr) 1982-02-05

Family

ID=23893432

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7514030A Granted FR2274072A1 (fr) 1974-06-06 1975-04-29 Procede de formation d'images en materiau photoresistant, applicable notamment dans l'industrie des semi-conducteurs

Country Status (4)

Country Link
JP (1) JPS5857097B2 (fr)
DE (1) DE2521727A1 (fr)
FR (1) FR2274072A1 (fr)
GB (1) GB1501194A (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4377633A (en) * 1981-08-24 1983-03-22 International Business Machines Corporation Methods of simultaneous contact and metal lithography patterning
GB2171530B (en) * 1985-02-27 1989-06-28 Imtec Products Inc Method of producing reversed photoresist images by vapour diffusion
JPS6291938A (ja) * 1985-10-18 1987-04-27 Fuji Photo Film Co Ltd 製版方法
JPS62114478A (ja) * 1985-11-11 1987-05-26 Taga Denki Kk 超音波振動子とその駆動制御方法
JPS62152377A (ja) * 1985-12-24 1987-07-07 Taga Denki Kk 超音波振動子の駆動制御方法
JPS62171473A (ja) * 1986-01-23 1987-07-28 Taga Denki Kk 超音波振動子
JPS62126874A (ja) * 1985-11-27 1987-06-09 Taga Denki Kk 超音波振動子
JPS62152378A (ja) * 1985-12-24 1987-07-07 Taga Denki Kk 超音波振動子
JPS62141980A (ja) * 1985-12-16 1987-06-25 Taga Denki Kk 超音波振動子とその駆動制御方法
JPS63110980A (ja) * 1986-10-28 1988-05-16 Taga Electric Co Ltd 超音波モ−タの駆動方法
JPH0727220B2 (ja) * 1988-03-08 1995-03-29 三洋電機株式会社 パターン形成方法
CA2001852A1 (fr) * 1988-11-01 1990-05-01 Iwao Numakura Methode et appareil de fabrication de masques de resine photosensible negative
US5286609A (en) * 1988-11-01 1994-02-15 Yamatoya & Co., Ltd. Process for the formation of a negative resist pattern from a composition comprising a diazoquinone compound and an imidazole and having as a heat step the use of a hot water containing spray

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1058845B (de) * 1958-02-11 1959-06-04 Kalle & Co Ag Verfahren zur Herstellung von Kopien, besonders Druckformen, mit Hilfe von wasserunloeslichen Diazoverbindungen
DE1224147B (de) * 1963-08-23 1966-09-01 Kalle Ag Verfahren zur Umkehrentwicklung von Diazo-verbindungen enthaltenden Kopierschichten
US3666473A (en) * 1970-10-06 1972-05-30 Ibm Positive photoresists for projection exposure

Also Published As

Publication number Publication date
GB1501194A (en) 1978-02-15
JPS513633A (ja) 1976-01-13
DE2521727A1 (de) 1975-12-18
JPS5857097B2 (ja) 1983-12-19
FR2274072B1 (fr) 1982-02-05

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Legal Events

Date Code Title Description
ST Notification of lapse