FR2274022A1 - Determination de l'epaisseur de films transparents - Google Patents

Determination de l'epaisseur de films transparents

Info

Publication number
FR2274022A1
FR2274022A1 FR7517560A FR7517560A FR2274022A1 FR 2274022 A1 FR2274022 A1 FR 2274022A1 FR 7517560 A FR7517560 A FR 7517560A FR 7517560 A FR7517560 A FR 7517560A FR 2274022 A1 FR2274022 A1 FR 2274022A1
Authority
FR
France
Prior art keywords
film
thicknesses
constructive interference
determination
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7517560A
Other languages
English (en)
French (fr)
Other versions
FR2274022B3 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Decca Ltd
Original Assignee
Decca Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Decca Ltd filed Critical Decca Ltd
Publication of FR2274022A1 publication Critical patent/FR2274022A1/fr
Application granted granted Critical
Publication of FR2274022B3 publication Critical patent/FR2274022B3/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR7517560A 1974-06-07 1975-06-05 Determination de l'epaisseur de films transparents Granted FR2274022A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2542074 1974-06-07

Publications (2)

Publication Number Publication Date
FR2274022A1 true FR2274022A1 (fr) 1976-01-02
FR2274022B3 FR2274022B3 (enrdf_load_stackoverflow) 1978-12-29

Family

ID=10227383

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7517560A Granted FR2274022A1 (fr) 1974-06-07 1975-06-05 Determination de l'epaisseur de films transparents

Country Status (9)

Country Link
JP (1) JPS5111464A (enrdf_load_stackoverflow)
AU (1) AU8181375A (enrdf_load_stackoverflow)
BE (1) BE829978A (enrdf_load_stackoverflow)
DE (1) DE2524982A1 (enrdf_load_stackoverflow)
DK (1) DK255675A (enrdf_load_stackoverflow)
FR (1) FR2274022A1 (enrdf_load_stackoverflow)
NL (1) NL7506740A (enrdf_load_stackoverflow)
NO (1) NO751987L (enrdf_load_stackoverflow)
SE (1) SE7506493L (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022740A1 (fr) * 1994-02-18 1995-08-24 Saint Gobain Cinematique Et Controle Procede de mesure d'epaisseur d'un materiau transparent

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643685A (en) * 1979-09-19 1981-04-22 Hitachi Ltd Optical character reader
US4785336A (en) * 1986-12-04 1988-11-15 Libbey-Owens-Ford Co. Device for monitoring characteristics of a film on a substrate
RU2168151C2 (ru) * 1999-08-04 2001-05-27 Научно-исследовательский институт радиоэлектроники и лазерной техники Московского государственного технического университета им. Н.Э. Баумана Дистанционный способ измерения толщины пленок
JP2011191252A (ja) * 2010-03-16 2011-09-29 Nippon Steel Engineering Co Ltd 金属の表面品質評価方法および金属の表面品質評価装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022740A1 (fr) * 1994-02-18 1995-08-24 Saint Gobain Cinematique Et Controle Procede de mesure d'epaisseur d'un materiau transparent
FR2716531A1 (fr) * 1994-02-18 1995-08-25 Saint Gobain Cinematique Contr Procédé de mesure d'épaisseur d'un matériau transparent.

Also Published As

Publication number Publication date
FR2274022B3 (enrdf_load_stackoverflow) 1978-12-29
JPS5111464A (enrdf_load_stackoverflow) 1976-01-29
DK255675A (da) 1975-12-08
SE7506493L (sv) 1975-12-08
BE829978A (fr) 1975-10-01
NO751987L (enrdf_load_stackoverflow) 1975-12-09
AU8181375A (en) 1976-12-09
NL7506740A (nl) 1975-12-09
DE2524982A1 (de) 1976-01-02

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Legal Events

Date Code Title Description
ST Notification of lapse