FR2262742A1 - Bell-shaped rotor in turbo vacuum pump - has stationary cylindrical insert incorporating winding groove - Google Patents

Bell-shaped rotor in turbo vacuum pump - has stationary cylindrical insert incorporating winding groove

Info

Publication number
FR2262742A1
FR2262742A1 FR7506454A FR7506454A FR2262742A1 FR 2262742 A1 FR2262742 A1 FR 2262742A1 FR 7506454 A FR7506454 A FR 7506454A FR 7506454 A FR7506454 A FR 7506454A FR 2262742 A1 FR2262742 A1 FR 2262742A1
Authority
FR
France
Prior art keywords
rotor
bell
winding groove
vacuum pump
insert
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7506454A
Other languages
English (en)
French (fr)
Other versions
FR2262742B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2262742A1 publication Critical patent/FR2262742A1/fr
Application granted granted Critical
Publication of FR2262742B1 publication Critical patent/FR2262742B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR7506454A 1974-03-01 1975-02-28 Bell-shaped rotor in turbo vacuum pump - has stationary cylindrical insert incorporating winding groove Granted FR2262742A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742409857 DE2409857B2 (de) 1974-03-01 1974-03-01 Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor

Publications (2)

Publication Number Publication Date
FR2262742A1 true FR2262742A1 (en) 1975-09-26
FR2262742B1 FR2262742B1 (enrdf_load_stackoverflow) 1980-02-22

Family

ID=5908844

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7506454A Granted FR2262742A1 (en) 1974-03-01 1975-02-28 Bell-shaped rotor in turbo vacuum pump - has stationary cylindrical insert incorporating winding groove

Country Status (2)

Country Link
DE (1) DE2409857B2 (enrdf_load_stackoverflow)
FR (1) FR2262742A1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
FR2550829A1 (fr) * 1983-08-16 1985-02-22 Seiko Seiki Kk Pompe turbo-moleculaire verticale
US7866940B2 (en) 2003-09-30 2011-01-11 Edwards Limited Vacuum pump

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
RU2168070C2 (ru) * 1998-12-17 2001-05-27 Научно-технический промышленно-производственный кооператив "Плазвак" Молекулярный вакуумный насос

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
FR2550829A1 (fr) * 1983-08-16 1985-02-22 Seiko Seiki Kk Pompe turbo-moleculaire verticale
US7866940B2 (en) 2003-09-30 2011-01-11 Edwards Limited Vacuum pump
US8672607B2 (en) 2003-09-30 2014-03-18 Edwards Limited Vacuum pump
US8851865B2 (en) 2003-09-30 2014-10-07 Edwards Limited Vacuum pump
US9249805B2 (en) 2003-09-30 2016-02-02 Edwards Limited Vacuum pump

Also Published As

Publication number Publication date
DE2409857A1 (de) 1975-09-11
FR2262742B1 (enrdf_load_stackoverflow) 1980-02-22
DE2409857B2 (de) 1977-03-24

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Legal Events

Date Code Title Description
ST Notification of lapse