DE2409857B2 - Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor - Google Patents

Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor

Info

Publication number
DE2409857B2
DE2409857B2 DE19742409857 DE2409857A DE2409857B2 DE 2409857 B2 DE2409857 B2 DE 2409857B2 DE 19742409857 DE19742409857 DE 19742409857 DE 2409857 A DE2409857 A DE 2409857A DE 2409857 B2 DE2409857 B2 DE 2409857B2
Authority
DE
Germany
Prior art keywords
rotor
vacuum pump
bell
turbomolecular vacuum
insert
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19742409857
Other languages
German (de)
English (en)
Other versions
DE2409857A1 (de
Inventor
Karl Heinz Dipl.-Phys. Dr. 5070 Bergisch-Gladbach Mirgel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19742409857 priority Critical patent/DE2409857B2/de
Priority to FR7506454A priority patent/FR2262742A1/fr
Publication of DE2409857A1 publication Critical patent/DE2409857A1/de
Publication of DE2409857B2 publication Critical patent/DE2409857B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE19742409857 1974-03-01 1974-03-01 Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor Withdrawn DE2409857B2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19742409857 DE2409857B2 (de) 1974-03-01 1974-03-01 Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
FR7506454A FR2262742A1 (en) 1974-03-01 1975-02-28 Bell-shaped rotor in turbo vacuum pump - has stationary cylindrical insert incorporating winding groove

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742409857 DE2409857B2 (de) 1974-03-01 1974-03-01 Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor

Publications (2)

Publication Number Publication Date
DE2409857A1 DE2409857A1 (de) 1975-09-11
DE2409857B2 true DE2409857B2 (de) 1977-03-24

Family

ID=5908844

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19742409857 Withdrawn DE2409857B2 (de) 1974-03-01 1974-03-01 Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor

Country Status (2)

Country Link
DE (1) DE2409857B2 (enrdf_load_stackoverflow)
FR (1) FR2262742A1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
WO1999032792A3 (fr) * 1997-12-19 1999-09-10 Nauchno-Tekhnichesky Promyshlenno-Proizvodstvenny Kooperativ 'plazvak' Pompe a vide moleculaire
RU2168070C2 (ru) * 1998-12-17 2001-05-27 Научно-технический промышленно-производственный кооператив "Плазвак" Молекулярный вакуумный насос

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
JPS6034594U (ja) * 1983-08-16 1985-03-09 セイコー精機株式会社 縦型タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
WO1999032792A3 (fr) * 1997-12-19 1999-09-10 Nauchno-Tekhnichesky Promyshlenno-Proizvodstvenny Kooperativ 'plazvak' Pompe a vide moleculaire
RU2168070C2 (ru) * 1998-12-17 2001-05-27 Научно-технический промышленно-производственный кооператив "Плазвак" Молекулярный вакуумный насос

Also Published As

Publication number Publication date
DE2409857A1 (de) 1975-09-11
FR2262742A1 (en) 1975-09-26
FR2262742B1 (enrdf_load_stackoverflow) 1980-02-22

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