Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/26—Bombardment with radiation
  • H01L21/261—Bombardment with radiation to produce a nuclear reaction transmuting chemical elements
• • C—CHEMISTRY; METALLURGY
  • C30—CRYSTAL GROWTH
  • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
  • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
  • C30B31/20—Doping by irradiation with electromagnetic waves or by particle radiation
• • G—PHYSICS
  • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
  • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
  • G21K5/00—Irradiation devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
  • H10D62/40—Crystalline structures
  • H10D62/405—Orientations of crystalline planes

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• Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• High Energy & Nuclear Physics (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Toxicology (AREA)
• Crystallography & Structural Chemistry (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• General Engineering & Computer Science (AREA)
• General Chemical & Material Sciences (AREA)
• Health & Medical Sciences (AREA)
• Electromagnetism (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Crystals, And After-Treatments Of Crystals (AREA)
• Light Receiving Elements (AREA)

Applications Claiming Priority (1)

Publications (2)

Family

ID=5907718

Family Applications (1)

Country Status (12)

Families Citing this family (1)

• 1974
  • 1974-02-18 DE DE2407697A patent/DE2407697C3/de not_active Expired
  • 1974-06-21 BE BE145761A patent/BE816719A/xx unknown
  • 1974-08-09 NL NL7410745A patent/NL7410745A/xx not_active Application Discontinuation
  • 1974-08-14 AT AT667874A patent/AT339379B/de active
  • 1974-09-11 GB GB3955974A patent/GB1442930A/en not_active Expired
  • 1974-09-25 PL PL1974174329A patent/PL91842B1/pl unknown
  • 1974-10-02 ZA ZA00746269A patent/ZA746269B/xx unknown
  • 1974-12-17 DK DK658274A patent/DK658274A/da unknown
• 1975
  • 1975-02-11 IT IT20138/75A patent/IT1031627B/it active
  • 1975-02-12 JP JP1777675A patent/JPS5329572B2/ja not_active Expired
  • 1975-02-17 SU SU752106377A patent/SU717999A3/ru active
  • 1975-02-17 FR FR7504804A patent/FR2261055B1/fr not_active Expired

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