FR2188255A1 - Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit - Google Patents

Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit

Info

Publication number
FR2188255A1
FR2188255A1 FR7220174A FR7220174A FR2188255A1 FR 2188255 A1 FR2188255 A1 FR 2188255A1 FR 7220174 A FR7220174 A FR 7220174A FR 7220174 A FR7220174 A FR 7220174A FR 2188255 A1 FR2188255 A1 FR 2188255A1
Authority
FR
France
Prior art keywords
air gap
circuit
electron beam
magnetic elements
electro magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7220174A
Other languages
French (fr)
Other versions
FR2188255B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7220174A priority Critical patent/FR2188255A1/en
Publication of FR2188255A1 publication Critical patent/FR2188255A1/en
Application granted granted Critical
Publication of FR2188255B1 publication Critical patent/FR2188255B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means

Abstract

An outer casing, esp. cylindrical, of non magnetic material can be clamped to the electron gun and has a coaxial central channel for the beam with at the far end a pair of plane, parallel, identical liquid cooled pole pieces defining an air gap in a soft iron magnetic circuit. These pole pieces are interchangeable and their edges are at angles. to the normal of the beam which define the deviation angle of the prism. Each pole piece is on the end of one limb of the soft iron circuit, carrying on each limb one of two series connected coils. The yoke of the circuit is mounted on centring adjusters in the gum clamp. Large deviations are obtd. without defocussing.
FR7220174A 1972-06-05 1972-06-05 Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit Granted FR2188255A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7220174A FR2188255A1 (en) 1972-06-05 1972-06-05 Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7220174A FR2188255A1 (en) 1972-06-05 1972-06-05 Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit

Publications (2)

Publication Number Publication Date
FR2188255A1 true FR2188255A1 (en) 1974-01-18
FR2188255B1 FR2188255B1 (en) 1974-12-27

Family

ID=9099701

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7220174A Granted FR2188255A1 (en) 1972-06-05 1972-06-05 Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit

Country Status (1)

Country Link
FR (1) FR2188255A1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652821A (en) * 1969-11-06 1972-03-28 Leybold Heraeus Verwaltung Electron gun for heating materials in an evacuated container

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652821A (en) * 1969-11-06 1972-03-28 Leybold Heraeus Verwaltung Electron gun for heating materials in an evacuated container

Also Published As

Publication number Publication date
FR2188255B1 (en) 1974-12-27

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Legal Events

Date Code Title Description
ST Notification of lapse