GB1154512A - Improvements in or relating to high vacuum electron beam apparatus. - Google Patents

Improvements in or relating to high vacuum electron beam apparatus.

Info

Publication number
GB1154512A
GB1154512A GB36181/66A GB3618166A GB1154512A GB 1154512 A GB1154512 A GB 1154512A GB 36181/66 A GB36181/66 A GB 36181/66A GB 3618166 A GB3618166 A GB 3618166A GB 1154512 A GB1154512 A GB 1154512A
Authority
GB
United Kingdom
Prior art keywords
electron beam
coils
aug
directed
sine wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB36181/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Air Reduction Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction Co Inc filed Critical Air Reduction Co Inc
Publication of GB1154512A publication Critical patent/GB1154512A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302Controlling tubes by external information, e.g. programme control
    • H01J37/3023Programme control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/002Devices involving relative movement between electronbeam and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/02Control circuits therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1,154,512. Electron beam furnaces. AIR REDUCTION CO. Inc. 12 Aug., 1966 [17 Aug., 1965], No. 36181/66. Heading H1D. In an electron beam furnace the beam is periodically traversed over the material in a particular pattern, e.g. a circular pattern of suitable diameter, by varying the orientation of the magnetic field 54 between polepieces 38, 40, the magnet energizing coils 48, 50 being supplied with periodically varying D.C. currents which are out of phase with respect to each other. Preferably the beam is directed at the material at an angle of 45 degrees and the coils 48, 50 are connected to separate sine wave generators 58, 60 which are 90 degrees out of phase with each other and coupled in series with a D.C. source 64 of greater voltage than the peak voltage of the sine wave generators. In another embodiment in which the beam is stepped to a succession of discrete positions a, b, c &c., the coils 48, 50 are connected to an electro-mechanical stepping switch including two banks of contacts and a mechanically linked pair of wipers, each contact being connected to a D.C. source through an empirically adjusted resistor. A solid state switching apparatus may be used instead. Reference has been directed by the Comptroller to Specification 1,039,135.
GB36181/66A 1965-08-17 1966-08-12 Improvements in or relating to high vacuum electron beam apparatus. Expired GB1154512A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US480287A US3390222A (en) 1965-08-17 1965-08-17 Electron beam apparatus with variable orientation of transverse deflecting field

Publications (1)

Publication Number Publication Date
GB1154512A true GB1154512A (en) 1969-06-11

Family

ID=23907385

Family Applications (1)

Application Number Title Priority Date Filing Date
GB36181/66A Expired GB1154512A (en) 1965-08-17 1966-08-12 Improvements in or relating to high vacuum electron beam apparatus.

Country Status (10)

Country Link
US (1) US3390222A (en)
AT (1) AT296446B (en)
BE (1) BE685528A (en)
CH (1) CH448288A (en)
DE (1) DE1565883B1 (en)
DK (1) DK114566B (en)
GB (1) GB1154512A (en)
LU (1) LU51771A1 (en)
NL (1) NL6611561A (en)
SE (1) SE335582B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3483417A (en) * 1967-07-26 1969-12-09 Air Reduction Electron beam deflecting means
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3582529A (en) * 1969-09-24 1971-06-01 Air Reduction Electron beam heating apparatus and control system therein
DE1963454C3 (en) * 1969-12-18 1973-12-06 Universitaet Stuttgart, Vertreten Durch Das Institut Fuer Kernenergetik, 7000 Stuttgart Generator for the control of deflection devices in the electron beam
US3710072A (en) * 1971-05-10 1973-01-09 Airco Inc Vapor source assembly
SU370899A1 (en) * 1971-10-26 1979-04-05 Институт Электросварки Им. Е.О. Патона Ан Украинской Сср Device for electron radiation heating of materials
US3975613A (en) * 1972-04-26 1976-08-17 Balzers Patent Und Beteiligungs Ag Electron beam-generating system
IT1037702B (en) * 1975-04-29 1979-11-20 Varian Associates ELECTRONIC BEAM HEATING AND EVAPORATION EQUIPMENT
US4064352A (en) * 1976-02-17 1977-12-20 Varian Associates, Inc. Electron beam evaporator having beam spot control
DE102006035793B8 (en) * 2006-07-28 2011-01-05 Global Beam Technologies Ag Electron beam system for material processing and Stromaddieranordnung for rapid control of an inductance

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT598814A (en) * 1957-11-20
NL263692A (en) * 1960-06-21
DE1181840B (en) * 1960-07-12 1964-11-19 Lokomotivbau Elektrotech Electron beam melting furnace
US3312858A (en) * 1961-08-31 1967-04-04 Heraeus Gmbh W C Deflecting system for charge carrier beams
US3270118A (en) * 1962-07-10 1966-08-30 Bendix Balzers Vacuum Inc Process for the vacuum melting of metals by means of electron beam
US3235647A (en) * 1963-06-06 1966-02-15 Temescal Metallurgical Corp Electron bombardment heating with adjustable impact pattern

Also Published As

Publication number Publication date
AT296446B (en) 1972-02-10
SE335582B (en) 1971-06-01
DK114566B (en) 1969-07-14
CH448288A (en) 1967-12-15
LU51771A1 (en) 1966-10-17
BE685528A (en) 1967-02-01
NL6611561A (en) 1967-02-20
DE1565883B1 (en) 1972-04-27
US3390222A (en) 1968-06-25

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