FR2147880B1 - - Google Patents

Info

Publication number
FR2147880B1
FR2147880B1 FR7128763A FR7128763A FR2147880B1 FR 2147880 B1 FR2147880 B1 FR 2147880B1 FR 7128763 A FR7128763 A FR 7128763A FR 7128763 A FR7128763 A FR 7128763A FR 2147880 B1 FR2147880 B1 FR 2147880B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7128763A
Other versions
FR2147880A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2147880A1 publication Critical patent/FR2147880A1/fr
Application granted granted Critical
Publication of FR2147880B1 publication Critical patent/FR2147880B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
FR7128763A 1971-07-19 1971-08-05 Expired FR2147880B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16375771A 1971-07-19 1971-07-19

Publications (2)

Publication Number Publication Date
FR2147880A1 FR2147880A1 (fr) 1973-03-11
FR2147880B1 true FR2147880B1 (fr) 1976-03-26

Family

ID=22591432

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7128763A Expired FR2147880B1 (fr) 1971-07-19 1971-08-05

Country Status (4)

Country Link
US (1) US3793179A (fr)
DE (1) DE2136532C3 (fr)
FR (1) FR2147880B1 (fr)
GB (1) GB1322670A (fr)

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US5037522B1 (en) * 1990-07-24 1996-07-02 Vergason Technology Inc Electric arc vapor deposition device
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CA2065581C (fr) 1991-04-22 2002-03-12 Andal Corp. Methode de deposition physique en phase vapeur activee par plasma, et appareil connexe
WO1992019789A1 (fr) * 1991-04-29 1992-11-12 Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' Evaporateur a arc electrique de metaux
DE4125365C1 (fr) * 1991-07-31 1992-05-21 Multi-Arc Oberflaechentechnik Gmbh, 5060 Bergisch Gladbach, De
IT1253065B (it) * 1991-12-13 1995-07-10 Unicoat Srl Vaporizzatore ad arco voltaico
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US5282944A (en) * 1992-07-30 1994-02-01 The United States Of America As Represented By The United States Department Of Energy Ion source based on the cathodic arc
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JP3287163B2 (ja) * 1995-01-23 2002-05-27 日新電機株式会社 アーク式蒸発源
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US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method
US5895559A (en) * 1996-04-08 1999-04-20 Christy; Ronald Cathodic arc cathode
DE19652633A1 (de) * 1996-09-13 1998-03-19 Euromat Gmbh Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile
DE19654336C2 (de) * 1996-12-24 2002-12-12 Bekaert Cmtm Gmbh Oberflächenbehandlung von metallischen Bändern mittels magnetisch bewegten Lichtbogen
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
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US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US5976636A (en) * 1998-03-19 1999-11-02 Industrial Technology Research Institute Magnetic apparatus for arc ion plating
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US6770178B2 (en) * 2002-08-09 2004-08-03 United Technologies Corporation Cathodic arc disposable sting shielding
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US10304665B2 (en) 2011-09-07 2019-05-28 Nano-Product Engineering, LLC Reactors for plasma-assisted processes and associated methods
KR200487382Y1 (ko) * 2014-08-04 2018-09-07 수라사크 수린퐁 음극 아크 플라즈마 증착 시스템에 사용되는 아크 이온 증발기용 필터 장치
RU2710809C1 (ru) * 2019-08-05 2020-01-14 Общество с ограниченной ответственностью "НПП "Уралавиаспецтехнология" Установка для нанесения ионно-плазменных покрытий
CN113957389B (zh) * 2020-07-21 2023-08-11 宝山钢铁股份有限公司 一种具有多孔降噪及均匀化分配金属蒸汽的真空镀膜装置

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US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
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US3661758A (en) * 1970-06-26 1972-05-09 Hewlett Packard Co Rf sputtering system with the anode enclosing the target

Also Published As

Publication number Publication date
US3793179A (en) 1974-02-19
DE2136532B2 (de) 1978-07-20
DE2136532A1 (de) 1973-02-08
FR2147880A1 (fr) 1973-03-11
GB1322670A (en) 1973-07-11
DE2136532C3 (de) 1979-03-22

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