IT1253065B - Vaporizzatore ad arco voltaico - Google Patents

Vaporizzatore ad arco voltaico

Info

Publication number
IT1253065B
IT1253065B ITBS910137A ITBS910137A IT1253065B IT 1253065 B IT1253065 B IT 1253065B IT BS910137 A ITBS910137 A IT BS910137A IT BS910137 A ITBS910137 A IT BS910137A IT 1253065 B IT1253065 B IT 1253065B
Authority
IT
Italy
Prior art keywords
cathode
voltaic arc
arc vaporizer
shaped
current
Prior art date
Application number
ITBS910137A
Other languages
English (en)
Inventor
Manuela Belletti
Original Assignee
Unicoat Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unicoat Srl filed Critical Unicoat Srl
Priority to ITBS910137A priority Critical patent/IT1253065B/it
Publication of ITBS910137A0 publication Critical patent/ITBS910137A0/it
Priority to EP19920830665 priority patent/EP0548032A3/en
Priority to JP4332906A priority patent/JPH0649628A/ja
Publication of ITBS910137A1 publication Critical patent/ITBS910137A1/it
Application granted granted Critical
Publication of IT1253065B publication Critical patent/IT1253065B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invenzione riguarda un vaporizzatore ad arco voltaico comprendente un anodo (1), un supporto (2) per il pezzo da rivestire, un gruppo catodico con un catodo da evaporare a forma di disco (3), un portacorrente (4) e uno schermo principale (5), che circonda la superficie laterale del catodo (3). L 'altezza del catodo (3) è inferiore al suo diametro per lo meno di quattro volte, il portacorrente (4) è a forma di tazza e si trova a contatto elettrico con la superficie del catodo (3) non soggetta ad evaporazione, e il catodo e il portacorrente sono circondati da uno schermo aggiuntivo magnetico.Fig. 1.
ITBS910137A 1991-12-13 1991-12-13 Vaporizzatore ad arco voltaico IT1253065B (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
ITBS910137A IT1253065B (it) 1991-12-13 1991-12-13 Vaporizzatore ad arco voltaico
EP19920830665 EP0548032A3 (en) 1991-12-13 1992-12-10 Electric arc evaporator
JP4332906A JPH0649628A (ja) 1991-12-13 1992-12-14 ボルタイック アーク ベーパライザー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITBS910137A IT1253065B (it) 1991-12-13 1991-12-13 Vaporizzatore ad arco voltaico

Publications (3)

Publication Number Publication Date
ITBS910137A0 ITBS910137A0 (it) 1991-12-13
ITBS910137A1 ITBS910137A1 (it) 1993-06-13
IT1253065B true IT1253065B (it) 1995-07-10

Family

ID=11344730

Family Applications (1)

Application Number Title Priority Date Filing Date
ITBS910137A IT1253065B (it) 1991-12-13 1991-12-13 Vaporizzatore ad arco voltaico

Country Status (3)

Country Link
EP (1) EP0548032A3 (it)
JP (1) JPH0649628A (it)
IT (1) IT1253065B (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH689558A5 (de) 1995-07-11 1999-06-15 Erich Bergmann Bedampfungsanlage und Verdampfereinheit.
DE10126985A1 (de) * 2001-06-05 2002-12-12 Gabriel Herbert M Anordnung zur Stromzuführung für eine Kathode einer Lichtbogen-Verdampfungsvorrichtung
US6770178B2 (en) * 2002-08-09 2004-08-03 United Technologies Corporation Cathodic arc disposable sting shielding

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
DE8703520U1 (de) * 1987-02-03 1987-10-01 Balzers Hochvakuum GmbH, 65205 Wiesbaden Von einem Begrenzungsring mit elektrisch leitender Oberfläche umgebene Kathode für eine Lichtbogenentladung
CS275226B2 (en) * 1989-09-13 1992-02-19 Fyzikalni Ustav Csav Method of arc discharge's cathode vaporization with cathode spots and macroparticles' reduced emission and device for realization of this method

Also Published As

Publication number Publication date
JPH0649628A (ja) 1994-02-22
EP0548032A3 (en) 1993-07-28
ITBS910137A0 (it) 1991-12-13
ITBS910137A1 (it) 1993-06-13
EP0548032A2 (en) 1993-06-23

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Legal Events

Date Code Title Description
0001 Granted