FR2068670A1 - Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabrication - Google Patents

Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabrication

Info

Publication number
FR2068670A1
FR2068670A1 FR7042563A FR7042563A FR2068670A1 FR 2068670 A1 FR2068670 A1 FR 2068670A1 FR 7042563 A FR7042563 A FR 7042563A FR 7042563 A FR7042563 A FR 7042563A FR 2068670 A1 FR2068670 A1 FR 2068670A1
Authority
FR
France
Prior art keywords
oxide layer
substrate
cavity
layer
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
FR7042563A
Other languages
English (en)
French (fr)
Inventor
Stein Leonard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of FR2068670A1 publication Critical patent/FR2068670A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/019—Manufacture or treatment of isolation regions comprising dielectric materials using epitaxial passivated integrated circuit [EPIC] processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W15/00—Highly-doped buried regions of integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W15/00—Highly-doped buried regions of integrated devices
    • H10W15/01—Manufacture or treatment

Landscapes

  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
FR7042563A 1969-11-26 1970-11-26 Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabrication Pending FR2068670A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88020369A 1969-11-26 1969-11-26

Publications (1)

Publication Number Publication Date
FR2068670A1 true FR2068670A1 (fr) 1971-08-27

Family

ID=25375718

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7042563A Pending FR2068670A1 (fr) 1969-11-26 1970-11-26 Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabrication

Country Status (3)

Country Link
DE (1) DE2057895A1 (enExample)
FR (1) FR2068670A1 (enExample)
NL (1) NL7017085A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2194048A1 (enExample) * 1972-07-26 1974-02-22 Texas Instruments Inc
FR2465316A1 (fr) * 1979-09-17 1981-03-20 Nippon Telegraph & Telephone Dispositifs semi-conducteurs pourvus d'elements semi-conducteurs complementaires et procede de fabrication d'un dispositif semi-conducteur compose

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2194048A1 (enExample) * 1972-07-26 1974-02-22 Texas Instruments Inc
FR2465316A1 (fr) * 1979-09-17 1981-03-20 Nippon Telegraph & Telephone Dispositifs semi-conducteurs pourvus d'elements semi-conducteurs complementaires et procede de fabrication d'un dispositif semi-conducteur compose

Also Published As

Publication number Publication date
NL7017085A (enExample) 1971-05-28
DE2057895A1 (de) 1971-06-24

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