FI98325B - Selektiivinen infrapunadetektori - Google Patents

Selektiivinen infrapunadetektori

Info

Publication number
FI98325B
FI98325B FI943251A FI943251A FI98325B FI 98325 B FI98325 B FI 98325B FI 943251 A FI943251 A FI 943251A FI 943251 A FI943251 A FI 943251A FI 98325 B FI98325 B FI 98325B
Authority
FI
Finland
Prior art keywords
infrared detector
selective infrared
selective
detector
infrared
Prior art date
Application number
FI943251A
Other languages
English (en)
Swedish (sv)
Other versions
FI98325C (fi
FI943251A0 (fi
FI943251A (fi
Inventor
Yrjoe Koskinen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Priority to FI943251A priority Critical patent/FI98325C/fi
Publication of FI943251A0 publication Critical patent/FI943251A0/fi
Priority to EP95304740A priority patent/EP0693683B1/en
Priority to DE69511488T priority patent/DE69511488T2/de
Priority to US08/499,188 priority patent/US5589689A/en
Priority to JP7172188A priority patent/JPH0943051A/ja
Publication of FI943251A publication Critical patent/FI943251A/fi
Publication of FI98325B publication Critical patent/FI98325B/fi
Application granted granted Critical
Publication of FI98325C publication Critical patent/FI98325C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
FI943251A 1994-07-07 1994-07-07 Selektiivinen infrapunadetektori FI98325C (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI943251A FI98325C (fi) 1994-07-07 1994-07-07 Selektiivinen infrapunadetektori
EP95304740A EP0693683B1 (en) 1994-07-07 1995-07-06 Selective infrared detector
DE69511488T DE69511488T2 (de) 1994-07-07 1995-07-06 Selektiver Infrarotdetektor
US08/499,188 US5589689A (en) 1994-07-07 1995-07-07 Infrared detector with Fabry-Perot interferometer
JP7172188A JPH0943051A (ja) 1994-07-07 1995-07-07 赤外線検出器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI943251A FI98325C (fi) 1994-07-07 1994-07-07 Selektiivinen infrapunadetektori
FI943251 1994-07-07

Publications (4)

Publication Number Publication Date
FI943251A0 FI943251A0 (fi) 1994-07-07
FI943251A FI943251A (fi) 1996-01-08
FI98325B true FI98325B (fi) 1997-02-14
FI98325C FI98325C (fi) 1997-05-26

Family

ID=8541073

Family Applications (1)

Application Number Title Priority Date Filing Date
FI943251A FI98325C (fi) 1994-07-07 1994-07-07 Selektiivinen infrapunadetektori

Country Status (5)

Country Link
US (1) US5589689A (fi)
EP (1) EP0693683B1 (fi)
JP (1) JPH0943051A (fi)
DE (1) DE69511488T2 (fi)
FI (1) FI98325C (fi)

Families Citing this family (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5584117A (en) * 1995-12-11 1996-12-17 Industrial Technology Research Institute Method of making an interferometer-based bolometer
ES2119712B1 (es) * 1996-12-17 1999-05-16 Consejo Superior Investigacion Procedimiento y dispositivo optico microfabricado para la deteccion de bandas de absorcion/emision en el infrarrojo.
US5892140A (en) * 1997-04-30 1999-04-06 Honeywell Inc. Micromachined inferential opto-thermal gas sensor
FR2768812B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Interferometre fabry-perot accordable integre
SG68002A1 (en) * 1997-11-25 1999-10-19 Inst Of Microelectronics Natio Cmos compatible integrated pressure sensor
FI981456A0 (fi) 1998-06-24 1998-06-24 Valtion Teknillinen Menetelmä mikromekaanisten elektrodien välisen etäisyyden sähköiseksi säätämiseksi
JP2000140135A (ja) 1998-09-11 2000-05-23 Tokkyo Kaihatsu Kk 遠赤外線健康器、遠赤外線健康法及びダイオキシン類排泄方法
US6628396B1 (en) * 1999-06-11 2003-09-30 Mamac Systems, Inc. Photo expansion gas detector
JP2001264441A (ja) * 2000-01-14 2001-09-26 Seiko Instruments Inc カロリーメーターとその製造方法
FR2805052A1 (fr) * 2000-02-14 2001-08-17 Schlumberger Ind Sa Filtre fabry-perot court a couches metalliques
US6608711B2 (en) * 2000-03-03 2003-08-19 Axsun Technologies, Inc. Silicon on insulator optical membrane structure for fabry-perot MOEMS filter
US6836366B1 (en) * 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same
JP3537778B2 (ja) * 2000-05-25 2004-06-14 照榮 片岡 光波長同調方法およびファブリーペロー型光共振器
US6602427B1 (en) * 2000-08-28 2003-08-05 Xiang Zheng Tu Micromachined optical mechanical modulator based transmitter/receiver module
JP3409848B2 (ja) * 2000-08-29 2003-05-26 日本電気株式会社 熱型赤外線検出器
JP3812881B2 (ja) * 2000-11-22 2006-08-23 株式会社アイ・エイチ・アイ・エアロスペース 赤外線検出素子
US6489615B2 (en) * 2000-12-15 2002-12-03 Northrop Grumman Corporation Ultra sensitive silicon sensor
US6721098B2 (en) * 2000-12-22 2004-04-13 Axsun Technologies, Inc. Triple electrode MOEMS tunable filter and fabrication process therefor
NO315177B1 (no) * 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
US6770882B2 (en) * 2002-01-14 2004-08-03 Multispectral Imaging, Inc. Micromachined pyro-optical structure
US7129519B2 (en) * 2002-05-08 2006-10-31 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
US6617175B1 (en) * 2002-05-08 2003-09-09 Advanced Technology Materials, Inc. Infrared thermopile detector system for semiconductor process monitoring and control
US6787387B2 (en) * 2002-06-24 2004-09-07 Matsushita Electric Industrial Co., Ltd. Electronic device and method for fabricating the electronic device
US6741377B2 (en) * 2002-07-02 2004-05-25 Iridigm Display Corporation Device having a light-absorbing mask and a method for fabricating same
JP4241245B2 (ja) * 2002-10-25 2009-03-18 株式会社デンソー センサ装置
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
US7269325B2 (en) * 2003-11-03 2007-09-11 Jidong Hou Tunable optical device
CN100345015C (zh) * 2003-12-30 2007-10-24 侯继东 一类基于微机电系统技术的可调光学器件
JP4166712B2 (ja) * 2004-01-29 2008-10-15 株式会社デンソー ファブリペローフィルタ
ES2244319B2 (es) * 2004-03-11 2006-06-16 Eads Construcciones Aeronauticas, S.A. Procedimiento para la certificacion de mantas termicas mediante termografia infrarroja.
DE102004013851B4 (de) * 2004-03-20 2021-06-17 Robert Bosch Gmbh Verfahren zur Herstellung eines Interferenzfilter aus alternierenden Luft-Halbleiter-Schichtsystemen sowie ein mit dem Verfahren hergestellter Infrarotfilter
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7460246B2 (en) * 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
NO20051850A (no) 2005-04-15 2006-09-25 Sinvent As Infrarød deteksjon av gass - diffraktiv.
US7277605B2 (en) * 2005-05-18 2007-10-02 The Regents Of The University Of California Silicon fiber optic sensors
US7355723B2 (en) * 2006-03-02 2008-04-08 Symphony Acoustics, Inc. Apparatus comprising a high-signal-to-noise displacement sensor and method therefore
US7583390B2 (en) * 2006-03-02 2009-09-01 Symphony Acoustics, Inc. Accelerometer comprising an optically resonant cavity
US7359067B2 (en) * 2006-04-07 2008-04-15 Symphony Acoustics, Inc. Optical displacement sensor comprising a wavelength-tunable optical source
CN100423310C (zh) * 2006-04-29 2008-10-01 中国科学院上海微系统与信息技术研究所 与互补金属氧化物半导体工艺兼容的微机械热电堆红外探测器及制作方法
US7968846B2 (en) * 2006-05-23 2011-06-28 Regents Of The University Of Minnesota Tunable finesse infrared cavity thermal detectors
US7551295B2 (en) * 2006-06-01 2009-06-23 Symphony Acoustics, Inc. Displacement sensor
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
US7894618B2 (en) * 2006-07-28 2011-02-22 Symphony Acoustics, Inc. Apparatus comprising a directionality-enhanced acoustic sensor
US7485870B2 (en) * 2006-09-12 2009-02-03 Alcatel-Lucent Usa Inc. Pneumatic infrared detector
US7785002B2 (en) * 2006-12-05 2010-08-31 Delphi Technologies, Inc. P-N junction based thermal detector
JP2010512507A (ja) * 2006-12-08 2010-04-22 リージェンツ オブ ザ ユニバーシティ オブ ミネソタ 放射率の低減と光空洞カップリングを使用した、標準的な放射雑音限界を超える検出
CN1994861B (zh) * 2006-12-20 2011-01-19 中国科学院上海微系统与信息技术研究所 一种全光学微机械非致冷红外热成像芯片结构及制作方法
JP4893431B2 (ja) * 2007-04-05 2012-03-07 三菱電機株式会社 分極反転素子の製造方法
US7626707B2 (en) * 2007-10-29 2009-12-01 Symphony Acoustics, Inc. Dual cavity displacement sensor
US8007609B2 (en) * 2007-10-31 2011-08-30 Symphony Acoustics, Inc. Parallel plate arrangement and method of formation
US7759644B2 (en) * 2008-03-18 2010-07-20 Drs Rsta, Inc. Spectrally tunable infrared image sensor having multi-band stacked detectors
US8629398B2 (en) 2008-05-30 2014-01-14 The Regents Of The University Of Minnesota Detection beyond the standard radiation noise limit using spectrally selective absorption
US8334984B2 (en) * 2008-08-22 2012-12-18 The Regents Of The University Of California Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers
US8129682B2 (en) 2009-02-26 2012-03-06 Texas Instruments Incorporated On-chip calibration system and method for infrared sensor
US8604435B2 (en) * 2009-02-26 2013-12-10 Texas Instruments Incorporated Infrared sensor structure and method
JP2010256193A (ja) * 2009-04-27 2010-11-11 Transvirtual Inc 多変量検出装置および多変量検出方法
KR101815717B1 (ko) 2009-05-29 2018-01-05 엔테그리스, 아이엔씨. 가스상 핵형성을 검출하기 위한 텅스텐 헥사플루오라이드 공정을 모니터링하기 위한 ｔｐｉｒ 장치, 및 이를 사용하는 방법 및 시스템
US9157807B2 (en) * 2009-06-24 2015-10-13 Texas Instruments Incorporated Etching cavity structures in silicon under dielectric membrane
US20110068423A1 (en) * 2009-09-18 2011-03-24 International Business Machines Corporation Photodetector with wavelength discrimination, and method for forming the same and design structure
FI20095976A0 (fi) 2009-09-24 2009-09-24 Valtion Teknillinen Mikromekaanisesti säädettävä Fabry-Perot -interferometri ja menetelmä sen tuottamiseksi
US8304850B2 (en) * 2009-12-22 2012-11-06 Texas Instruments Incorporated Integrated infrared sensors with optical elements, and methods
US8695402B2 (en) * 2010-06-03 2014-04-15 Honeywell International Inc. Integrated IR source and acoustic detector for photoacoustic gas sensor
JP5625614B2 (ja) 2010-08-20 2014-11-19 セイコーエプソン株式会社 光フィルター、光フィルターモジュール、分光測定器および光機器
US20120081348A1 (en) * 2010-10-05 2012-04-05 Qualcomm Mems Technologies, Inc. Method for eliminating row or column routing on array periphery
US20120200486A1 (en) * 2011-02-09 2012-08-09 Texas Instruments Incorporated Infrared gesture recognition device and method
US9029783B2 (en) * 2011-06-10 2015-05-12 Flir Systems, Inc. Multilayered microbolometer film deposition
JP6107254B2 (ja) * 2013-03-14 2017-04-05 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
WO2014207742A2 (en) 2013-06-24 2014-12-31 Technology Innovation Momentum Fund (Israel) Limited Partnership A system and method for color image acquisition
US9018723B2 (en) * 2013-06-27 2015-04-28 Stmicroelectronics Pte Ltd Infrared camera sensor
US10094215B2 (en) 2014-11-11 2018-10-09 Iball Instruments, Llc Mudlogging device with dual interferometers
US20160139038A1 (en) * 2014-11-19 2016-05-19 Nxp B.V. Gas sensor
US10827152B2 (en) 2015-07-15 2020-11-03 Technology Innovation Momentum Fund (Israel) Limited Partnership Tunable MEMS etalon
US10129676B2 (en) * 2016-02-16 2018-11-13 Infineon Technologies Ag MEMS microphone, apparatus comprising a MEMS microphone and method for fabricating a MEMS microphone
WO2017180128A1 (en) * 2016-04-14 2017-10-19 Halliburton Energy Services, Inc. Fabry-perot based optical computing
FI128447B (fi) 2016-04-26 2020-05-15 Teknologian Tutkimuskeskus Vtt Oy Ohutkalvokerroksen analysointiin liittyvä laite ja sen valmistusmenetelmä
US10775149B1 (en) 2018-03-14 2020-09-15 Onto Innovation Inc. Light source failure identification in an optical metrology device
DE102018211325A1 (de) * 2018-07-10 2020-01-16 Robert Bosch Gmbh Fabry-Perot-Interferometer-Einheit und Verfahren zur Herstellung einer Fabry-Perot-Interferometer-Einheit
RU2702691C1 (ru) * 2018-12-05 2019-10-09 Общество с ограниченной ответственностью "РнД-ИСАН" Спектрально-селективный поглотитель инфракрасного излучения и микроболометрический детектор на его основе
RU2746095C1 (ru) * 2020-06-26 2021-04-06 Федеральное государственное бюджетное учреждение науки Институт автоматики и электрометрии Сибирского отделения Российской академии наук (ИАиЭ СО РАН) Оптико-акустический приемник инфракрасного и ТГц излучения
EP4375628A1 (en) * 2022-11-25 2024-05-29 Murata Manufacturing Co., Ltd. Piezoelectric interferometer
CN118424465B (zh) * 2024-07-05 2024-09-24 电子科技大学 一种兼容光谱分光芯片和探测器芯片的微系统

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2637616A1 (de) * 1976-08-20 1978-02-23 Siemens Ag Filter fuer fotodetektoren
EP0253002A1 (de) * 1986-07-12 1988-01-20 Günter Dr.-Ing. Pusch Vorrichtung zur Erkennung thermischer Kontraste
DE3743131A1 (de) * 1987-10-26 1989-05-03 Siemens Ag Anordnung zur hochaufloesenden spektroskopie
US5293781A (en) * 1987-11-09 1994-03-15 California Institute Of Technology Tunnel effect measuring systems and particle detectors
WO1990009038A1 (en) * 1989-02-03 1990-08-09 British Telecommunications Public Limited Company Optical detector
US4953387A (en) * 1989-07-31 1990-09-04 The Regents Of The University Of Michigan Ultrathin-film gas detector
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5321539A (en) * 1991-02-04 1994-06-14 Nippon Telegraph And Telephone Corporation Liquid crystal Fabry-Perot etalon with glass spacer
CH681047A5 (en) * 1991-11-25 1992-12-31 Landis & Gyr Betriebs Ag Measuring parameter, esp. pressure difference, using Fabry-Perot detector - controlling optical length of detector according to output parameter to determine working point on graph
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
FI96450C (fi) * 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
US5365770A (en) * 1993-04-05 1994-11-22 Ford Motor Company Ultrasonic wave interferometers
US5315128A (en) * 1993-04-30 1994-05-24 At&T Bell Laboratories Photodetector with a resonant cavity
DE4334578C2 (de) * 1993-10-11 1999-10-07 Dirk Winfried Rossberg Spektral abstimmbarer Infrarot-Sensor
FI94804C (fi) * 1994-02-17 1995-10-25 Vaisala Oy Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä

Also Published As

Publication number Publication date
EP0693683A1 (en) 1996-01-24
DE69511488T2 (de) 2000-04-27
EP0693683B1 (en) 1999-08-18
US5589689A (en) 1996-12-31
DE69511488D1 (de) 1999-09-23
JPH0943051A (ja) 1997-02-14
FI98325C (fi) 1997-05-26
FI943251A0 (fi) 1994-07-07
FI943251A (fi) 1996-01-08

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