FI872888A - Anordning foer framstaellning av enkristall foer halvledare. - Google Patents

Anordning foer framstaellning av enkristall foer halvledare. Download PDF

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Publication number
FI872888A
FI872888A FI872888A FI872888A FI872888A FI 872888 A FI872888 A FI 872888A FI 872888 A FI872888 A FI 872888A FI 872888 A FI872888 A FI 872888A FI 872888 A FI872888 A FI 872888A
Authority
FI
Finland
Prior art keywords
semiconductor
starting material
screening
crucible
front standing
Prior art date
Application number
FI872888A
Other languages
English (en)
Other versions
FI84498B (fi
FI872888A0 (fi
Inventor
Hiroshi Kamio
Kazuhide Nakaoka
Kenji Araki
Katsuhiko Murakami
Akira Kazama
Shigetake Horie
Original Assignee
Nippon Kokan Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kokan Kk filed Critical Nippon Kokan Kk
Publication of FI872888A publication Critical patent/FI872888A/fi
Publication of FI872888A0 publication Critical patent/FI872888A0/fi
Application granted granted Critical
Publication of FI84498B publication Critical patent/FI84498B/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FI872888A 1985-11-01 1987-06-30 Anordning foer framstaellning av enkristall foer halvledare. FI84498B (fi)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP24411685 1985-11-01
JP24411685 1985-11-01
JP5356086 1986-03-13
JP5356086 1986-03-13
JP12919286 1986-06-05
JP12919286 1986-06-05
JP8600556 1986-10-31
PCT/JP1986/000556 WO1987002718A1 (en) 1985-11-01 1986-10-31 Apparatus for producing semiconductor single crystal

Publications (3)

Publication Number Publication Date
FI872888A true FI872888A (fi) 1987-06-30
FI872888A0 FI872888A0 (fi) 1987-06-30
FI84498B FI84498B (fi) 1991-08-30

Family

ID=27294990

Family Applications (1)

Application Number Title Priority Date Filing Date
FI872888A FI84498B (fi) 1985-11-01 1987-06-30 Anordning foer framstaellning av enkristall foer halvledare.

Country Status (4)

Country Link
EP (1) EP0245510A4 (fi)
KR (1) KR880700872A (fi)
FI (1) FI84498B (fi)
WO (1) WO1987002718A1 (fi)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4106589C2 (de) * 1991-03-01 1997-04-24 Wacker Siltronic Halbleitermat Kontinuierliches Nachchargierverfahren mit flüssigem Silicium beim Tiegelziehen nach Czochralski
KR20020053622A (ko) * 2000-12-27 2002-07-05 이 창 세 실리콘 충전 방법 및 그에 사용되는 단결정 시드
EP1644639B1 (en) 2003-06-30 2009-02-11 Nxp B.V. Device for generating sound by means of a medium stream generated
JP5646589B2 (ja) * 2012-12-27 2014-12-24 グローバルウェーハズ・ジャパン株式会社 シリコン単結晶の引き上げ方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582287A (en) * 1968-01-09 1971-06-01 Emil R Capita Seed pulling apparatus having diagonal feed and gas doping
JPH0555588A (ja) * 1991-08-27 1993-03-05 Sanyo Electric Co Ltd マルチチツプ型ｍｏｓ電界効果トランジスタ

Also Published As

Publication number Publication date
WO1987002718A1 (en) 1987-05-07
FI84498B (fi) 1991-08-30
FI872888A0 (fi) 1987-06-30
KR880700872A (ko) 1988-04-13
EP0245510A4 (en) 1989-06-21
EP0245510A1 (en) 1987-11-19

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Legal Events

Date Code Title Description
FD Application lapsed
FD Application lapsed

Owner name: NIPPON KOKAN KABUSHIKI KAISHA