FI842307A7 - Menetelmä läpiviennin aikaansaamiseksi mikromekaaniseen rakenteeseen. - Google Patents

Menetelmä läpiviennin aikaansaamiseksi mikromekaaniseen rakenteeseen. Download PDF

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Publication number
FI842307A7
FI842307A7 FI842307A FI842307A FI842307A7 FI 842307 A7 FI842307 A7 FI 842307A7 FI 842307 A FI842307 A FI 842307A FI 842307 A FI842307 A FI 842307A FI 842307 A7 FI842307 A7 FI 842307A7
Authority
FI
Finland
Prior art keywords
feedthrough
providing
micromechanical structure
micromechanical
Prior art date
Application number
FI842307A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI842307A0 (fi
FI842307L (fi
Inventor
Ari Lehto
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Publication of FI842307A0 publication Critical patent/FI842307A0/fi
Priority to FI842307A priority Critical patent/FI842307A7/fi
Application filed by Vaisala Oy filed Critical Vaisala Oy
Priority to SE8502709A priority patent/SE8502709L/xx
Priority to GB08513788A priority patent/GB2159957B/en
Priority to DE3520064A priority patent/DE3520064C2/de
Priority to BR8502717A priority patent/BR8502717A/pt
Priority to US06/741,473 priority patent/US4597027A/en
Priority to IT12516/85A priority patent/IT1186893B/it
Priority to NL8501639A priority patent/NL8501639A/nl
Priority to NO852284A priority patent/NO852284L/no
Priority to FR8508612A priority patent/FR2565687B1/fr
Priority to JP12284785A priority patent/JPS6135323A/ja
Publication of FI842307L publication Critical patent/FI842307L/fi
Publication of FI842307A7 publication Critical patent/FI842307A7/fi
Priority to FI871604A priority patent/FI77328C/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07K—PEPTIDES
    • C07K14/00—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof
    • C07K14/435—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof from animals; from humans
    • C07K14/745—Blood coagulation or fibrinolysis factors
    • C07K14/755—Factors VIII, e.g. factor VIII C (AHF), factor VIII Ag (VWF)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Biophysics (AREA)
  • Medicinal Chemistry (AREA)
  • Zoology (AREA)
  • Gastroenterology & Hepatology (AREA)
  • Hematology (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Toxicology (AREA)
  • Molecular Biology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Pens And Brushes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
FI842307A 1984-06-07 1984-06-07 Menetelmä läpiviennin aikaansaamiseksi mikromekaaniseen rakenteeseen. FI842307A7 (fi)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FI842307A FI842307A7 (fi) 1984-06-07 1984-06-07 Menetelmä läpiviennin aikaansaamiseksi mikromekaaniseen rakenteeseen.
SE8502709A SE8502709L (sv) 1984-06-07 1985-05-31 Kapacitiv tryckdetektorkonstruktion och sett att tillverka densamma
GB08513788A GB2159957B (en) 1984-06-07 1985-05-31 Capacitive pressure transducers
DE3520064A DE3520064C2 (de) 1984-06-07 1985-06-04 Verfahren zur Herstellung eines kapazitiven Drucksensors
BR8502717A BR8502717A (pt) 1984-06-07 1985-06-05 Detector de pressao capacitivo e processo para fabricacao
US06/741,473 US4597027A (en) 1984-06-07 1985-06-05 Capacitive pressure detector structure and method for manufacturing same
IT12516/85A IT1186893B (it) 1984-06-07 1985-06-05 Struttura di rivelatore capacitivo di pressione e metodo per la sua fabbricazione
NL8501639A NL8501639A (nl) 1984-06-07 1985-06-06 Capacitieve drukdetector en werkwijze voor het vervaardigen hiervan.
NO852284A NO852284L (no) 1984-06-07 1985-06-06 Kapasitiv trykkfoeler.
FR8508612A FR2565687B1 (fr) 1984-06-07 1985-06-07 Detecteur de pression capacitif et procede pour sa fabrication
JP12284785A JPS6135323A (ja) 1984-06-07 1985-06-07 容量性圧力検出器製造方法
FI871604A FI77328C (fi) 1984-06-07 1987-04-13 Kapacitiv tryckgivare.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI842307A FI842307A7 (fi) 1984-06-07 1984-06-07 Menetelmä läpiviennin aikaansaamiseksi mikromekaaniseen rakenteeseen.

Publications (3)

Publication Number Publication Date
FI842307A0 FI842307A0 (fi) 1984-06-07
FI842307L FI842307L (fi) 1985-12-08
FI842307A7 true FI842307A7 (fi) 1985-12-08

Family

ID=8519220

Family Applications (2)

Application Number Title Priority Date Filing Date
FI842307A FI842307A7 (fi) 1984-06-07 1984-06-07 Menetelmä läpiviennin aikaansaamiseksi mikromekaaniseen rakenteeseen.
FI871604A FI77328C (fi) 1984-06-07 1987-04-13 Kapacitiv tryckgivare.

Family Applications After (1)

Application Number Title Priority Date Filing Date
FI871604A FI77328C (fi) 1984-06-07 1987-04-13 Kapacitiv tryckgivare.

Country Status (11)

Country Link
US (1) US4597027A (enExample)
JP (1) JPS6135323A (enExample)
BR (1) BR8502717A (enExample)
DE (1) DE3520064C2 (enExample)
FI (2) FI842307A7 (enExample)
FR (1) FR2565687B1 (enExample)
GB (1) GB2159957B (enExample)
IT (1) IT1186893B (enExample)
NL (1) NL8501639A (enExample)
NO (1) NO852284L (enExample)
SE (1) SE8502709L (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI84401C (fi) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion.
FI872049L (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
GB8718639D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Capacitive pressure sensors
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
FI893874A7 (fi) * 1989-08-17 1991-02-18 Vaisala Oy Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen.
US5479827A (en) * 1994-10-07 1996-01-02 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor isolating electrodes from external environment
JP3319912B2 (ja) * 1995-06-29 2002-09-03 株式会社デンソー 半導体センサ用台座およびその加工方法
WO2002073684A1 (de) † 2001-03-14 2002-09-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur strukturierung eines aus glasartigen material bestehenden flächensubstrats
JP2006170893A (ja) * 2004-12-17 2006-06-29 Alps Electric Co Ltd 静電容量型圧力センサ
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
JP4773821B2 (ja) * 2005-12-26 2011-09-14 アルプス電気株式会社 静電容量型圧力センサ及びその製造方法
EP2377809A1 (en) * 2010-04-16 2011-10-19 SensoNor Technologies AS Method for Manufacturing a Hermetically Sealed Structure
US9309105B2 (en) 2014-03-06 2016-04-12 Infineon Technologies Ag Sensor structure for sensing pressure waves and ambient pressure

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438592A (en) * 1942-12-08 1948-03-30 Victor S Johnson Electrical condenser
US2868894A (en) * 1955-09-14 1959-01-13 Theodore J Schultz Miniature condenser microphone
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
JPS581551B2 (ja) * 1977-12-20 1983-01-11 株式会社日立製作所 半導体圧力変換器
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
US4360955A (en) * 1978-05-08 1982-11-30 Barry Block Method of making a capacitive force transducer
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
DE2938205A1 (de) * 1979-09-21 1981-04-09 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver druckgeber und auswerteeinrichtung hierfuer
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
JPS57190242A (en) * 1981-05-20 1982-11-22 Hitachi Ltd Pressure sensor
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4424713A (en) * 1982-06-11 1984-01-10 General Signal Corporation Silicon diaphragm capacitive pressure transducer
GB2130435B (en) * 1982-10-27 1986-10-15 Tokyo Shibaura Electric Co Semiconductor strain sensor and method for manufacturing the same

Also Published As

Publication number Publication date
DE3520064A1 (de) 1985-12-12
GB8513788D0 (en) 1985-07-03
SE8502709D0 (sv) 1985-05-31
FI842307A0 (fi) 1984-06-07
FI842307L (fi) 1985-12-08
JPH0585857B2 (enExample) 1993-12-09
BR8502717A (pt) 1986-02-12
SE8502709L (sv) 1985-12-08
DE3520064C2 (de) 1996-04-18
JPS6135323A (ja) 1986-02-19
FI77328B (fi) 1988-10-31
IT8512516A0 (it) 1985-06-05
FI871604L (fi) 1987-04-13
NO852284L (no) 1985-12-09
FR2565687B1 (fr) 1987-03-27
GB2159957A (en) 1985-12-11
FI871604A0 (fi) 1987-04-13
US4597027A (en) 1986-06-24
IT1186893B (it) 1987-12-16
NL8501639A (nl) 1986-01-02
GB2159957B (en) 1988-01-20
FR2565687A1 (fr) 1985-12-13
FI77328C (fi) 1989-02-10

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Legal Events

Date Code Title Description
FD Application lapsed

Owner name: VAISALA OY