BR8502717A - Detector de pressao capacitivo e processo para fabricacao - Google Patents
Detector de pressao capacitivo e processo para fabricacaoInfo
- Publication number
- BR8502717A BR8502717A BR8502717A BR8502717A BR8502717A BR 8502717 A BR8502717 A BR 8502717A BR 8502717 A BR8502717 A BR 8502717A BR 8502717 A BR8502717 A BR 8502717A BR 8502717 A BR8502717 A BR 8502717A
- Authority
- BR
- Brazil
- Prior art keywords
- manufacturing process
- pressure detector
- capacitive pressure
- capacitive
- detector
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07K—PEPTIDES
- C07K14/00—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof
- C07K14/435—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof from animals; from humans
- C07K14/745—Blood coagulation or fibrinolysis factors
- C07K14/755—Factors VIII, e.g. factor VIII C (AHF), factor VIII Ag (VWF)
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI842307A FI842307A (fi) | 1984-06-07 | 1984-06-07 | Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion. |
Publications (1)
Publication Number | Publication Date |
---|---|
BR8502717A true BR8502717A (pt) | 1986-02-12 |
Family
ID=8519220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR8502717A BR8502717A (pt) | 1984-06-07 | 1985-06-05 | Detector de pressao capacitivo e processo para fabricacao |
Country Status (11)
Country | Link |
---|---|
US (1) | US4597027A (pt) |
JP (1) | JPS6135323A (pt) |
BR (1) | BR8502717A (pt) |
DE (1) | DE3520064C2 (pt) |
FI (2) | FI842307A (pt) |
FR (1) | FR2565687B1 (pt) |
GB (1) | GB2159957B (pt) |
IT (1) | IT1186893B (pt) |
NL (1) | NL8501639A (pt) |
NO (1) | NO852284L (pt) |
SE (1) | SE8502709L (pt) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI872049A (fi) * | 1987-05-08 | 1988-11-09 | Vaisala Oy | Kondensatorkonstruktion foer anvaendning vid tryckgivare. |
FI84401C (fi) * | 1987-05-08 | 1991-11-25 | Vaisala Oy | Kapacitiv tryckgivarkonstruktion. |
GB8718639D0 (en) * | 1987-08-06 | 1987-09-09 | Spectrol Reliance Ltd | Capacitive pressure sensors |
FI78784C (fi) * | 1988-01-18 | 1989-09-11 | Vaisala Oy | Tryckgivarkonstruktion och foerfarande foer framstaellning daerav. |
FI893874A (fi) * | 1989-08-17 | 1991-02-18 | Vaisala Oy | Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen. |
US5479827A (en) * | 1994-10-07 | 1996-01-02 | Yamatake-Honeywell Co., Ltd. | Capacitive pressure sensor isolating electrodes from external environment |
JP3319912B2 (ja) * | 1995-06-29 | 2002-09-03 | 株式会社デンソー | 半導体センサ用台座およびその加工方法 |
EP1371092B2 (de) † | 2001-03-14 | 2010-11-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur strukturierung eines aus glasartigen material bestehenden flächensubstrats |
JP2006170893A (ja) * | 2004-12-17 | 2006-06-29 | Alps Electric Co Ltd | 静電容量型圧力センサ |
JP4585426B2 (ja) * | 2005-10-31 | 2010-11-24 | アルプス電気株式会社 | 静電容量型圧力センサ |
JP4773821B2 (ja) * | 2005-12-26 | 2011-09-14 | アルプス電気株式会社 | 静電容量型圧力センサ及びその製造方法 |
EP2377809A1 (en) * | 2010-04-16 | 2011-10-19 | SensoNor Technologies AS | Method for Manufacturing a Hermetically Sealed Structure |
US9309105B2 (en) * | 2014-03-06 | 2016-04-12 | Infineon Technologies Ag | Sensor structure for sensing pressure waves and ambient pressure |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2438592A (en) * | 1942-12-08 | 1948-03-30 | Victor S Johnson | Electrical condenser |
US2868894A (en) * | 1955-09-14 | 1959-01-13 | Theodore J Schultz | Miniature condenser microphone |
US3634727A (en) * | 1968-12-03 | 1972-01-11 | Bendix Corp | Capacitance-type pressure transducer |
JPS581551B2 (ja) * | 1977-12-20 | 1983-01-11 | 株式会社日立製作所 | 半導体圧力変換器 |
JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
US4360955A (en) * | 1978-05-08 | 1982-11-30 | Barry Block | Method of making a capacitive force transducer |
JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
DE2938205A1 (de) * | 1979-09-21 | 1981-04-09 | Robert Bosch Gmbh, 7000 Stuttgart | Kapazitiver druckgeber und auswerteeinrichtung hierfuer |
US4332000A (en) * | 1980-10-03 | 1982-05-25 | International Business Machines Corporation | Capacitive pressure transducer |
JPS57190242A (en) * | 1981-05-20 | 1982-11-22 | Hitachi Ltd | Pressure sensor |
US4405970A (en) * | 1981-10-13 | 1983-09-20 | United Technologies Corporation | Silicon-glass-silicon capacitive pressure transducer |
US4415948A (en) * | 1981-10-13 | 1983-11-15 | United Technologies Corporation | Electrostatic bonded, silicon capacitive pressure transducer |
US4424713A (en) * | 1982-06-11 | 1984-01-10 | General Signal Corporation | Silicon diaphragm capacitive pressure transducer |
GB2130435B (en) * | 1982-10-27 | 1986-10-15 | Tokyo Shibaura Electric Co | Semiconductor strain sensor and method for manufacturing the same |
-
1984
- 1984-06-07 FI FI842307A patent/FI842307A/fi not_active Application Discontinuation
-
1985
- 1985-05-31 SE SE8502709A patent/SE8502709L/xx not_active Application Discontinuation
- 1985-05-31 GB GB08513788A patent/GB2159957B/en not_active Expired
- 1985-06-04 DE DE3520064A patent/DE3520064C2/de not_active Expired - Lifetime
- 1985-06-05 US US06/741,473 patent/US4597027A/en not_active Expired - Lifetime
- 1985-06-05 IT IT12516/85A patent/IT1186893B/it active
- 1985-06-05 BR BR8502717A patent/BR8502717A/pt unknown
- 1985-06-06 NL NL8501639A patent/NL8501639A/nl not_active Application Discontinuation
- 1985-06-06 NO NO852284A patent/NO852284L/no unknown
- 1985-06-07 JP JP12284785A patent/JPS6135323A/ja active Granted
- 1985-06-07 FR FR8508612A patent/FR2565687B1/fr not_active Expired
-
1987
- 1987-04-13 FI FI871604A patent/FI77328C/fi not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE3520064C2 (de) | 1996-04-18 |
FR2565687A1 (fr) | 1985-12-13 |
GB8513788D0 (en) | 1985-07-03 |
FI871604A0 (fi) | 1987-04-13 |
NO852284L (no) | 1985-12-09 |
SE8502709L (sv) | 1985-12-08 |
FR2565687B1 (fr) | 1987-03-27 |
NL8501639A (nl) | 1986-01-02 |
DE3520064A1 (de) | 1985-12-12 |
US4597027A (en) | 1986-06-24 |
IT8512516A0 (it) | 1985-06-05 |
GB2159957A (en) | 1985-12-11 |
JPS6135323A (ja) | 1986-02-19 |
SE8502709D0 (sv) | 1985-05-31 |
FI842307A0 (fi) | 1984-06-07 |
FI842307A (fi) | 1985-12-08 |
FI77328C (fi) | 1989-02-10 |
FI77328B (fi) | 1988-10-31 |
GB2159957B (en) | 1988-01-20 |
IT1186893B (it) | 1987-12-16 |
FI871604A (fi) | 1987-04-13 |
JPH0585857B2 (pt) | 1993-12-09 |
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