FI71015C - Temperaturoberoende kapacitiv tryckgivare - Google Patents

Temperaturoberoende kapacitiv tryckgivare Download PDF

Info

Publication number
FI71015C
FI71015C FI840701A FI840701A FI71015C FI 71015 C FI71015 C FI 71015C FI 840701 A FI840701 A FI 840701A FI 840701 A FI840701 A FI 840701A FI 71015 C FI71015 C FI 71015C
Authority
FI
Finland
Prior art keywords
silicon
plate
glass
thermal expansion
layer
Prior art date
Application number
FI840701A
Other languages
English (en)
Finnish (fi)
Other versions
FI71015B (fi
FI840701A (fi
FI840701A0 (fi
Inventor
Heikki Kuisma
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of FI840701A0 publication Critical patent/FI840701A0/fi
Priority to FI840701A priority Critical patent/FI71015C/fi
Priority to US06/701,864 priority patent/US4589054A/en
Priority to BR8500735A priority patent/BR8500735A/pt
Priority to GB08504079A priority patent/GB2156078B/en
Priority to NL8500466A priority patent/NL8500466A/nl
Priority to IT12438/85A priority patent/IT1186833B/it
Priority to FR8502409A priority patent/FR2559900B1/fr
Priority to JP60033645A priority patent/JPS60202323A/ja
Priority to DE3505925A priority patent/DE3505925C2/de
Publication of FI840701A publication Critical patent/FI840701A/fi
Publication of FI71015B publication Critical patent/FI71015B/fi
Application granted granted Critical
Publication of FI71015C publication Critical patent/FI71015C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FI840701A 1984-02-21 1984-02-21 Temperaturoberoende kapacitiv tryckgivare FI71015C (fi)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FI840701A FI71015C (fi) 1984-02-21 1984-02-21 Temperaturoberoende kapacitiv tryckgivare
US06/701,864 US4589054A (en) 1984-02-21 1985-02-15 Capacitive pressure detector independent of temperature
BR8500735A BR8500735A (pt) 1984-02-21 1985-02-15 Detector de pressao capacitivo
GB08504079A GB2156078B (en) 1984-02-21 1985-02-18 Electrical pressure sensor
NL8500466A NL8500466A (nl) 1984-02-21 1985-02-19 Capacitieve drukdetector.
IT12438/85A IT1186833B (it) 1984-02-21 1985-02-20 Rivelatore capacitivo di pressione indipendente dalla temperatura
FR8502409A FR2559900B1 (fr) 1984-02-21 1985-02-20 Detecteur de pression capacitif insensible aux variations de temperature
JP60033645A JPS60202323A (ja) 1984-02-21 1985-02-21 圧力用デイテクタ
DE3505925A DE3505925C2 (de) 1984-02-21 1985-02-21 Kapazitiver Druckmesser

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI840701A FI71015C (fi) 1984-02-21 1984-02-21 Temperaturoberoende kapacitiv tryckgivare
FI840701 1984-02-21

Publications (4)

Publication Number Publication Date
FI840701A0 FI840701A0 (fi) 1984-02-21
FI840701A FI840701A (fi) 1985-08-22
FI71015B FI71015B (fi) 1986-07-18
FI71015C true FI71015C (fi) 1986-10-27

Family

ID=8518585

Family Applications (1)

Application Number Title Priority Date Filing Date
FI840701A FI71015C (fi) 1984-02-21 1984-02-21 Temperaturoberoende kapacitiv tryckgivare

Country Status (9)

Country Link
US (1) US4589054A (it)
JP (1) JPS60202323A (it)
BR (1) BR8500735A (it)
DE (1) DE3505925C2 (it)
FI (1) FI71015C (it)
FR (1) FR2559900B1 (it)
GB (1) GB2156078B (it)
IT (1) IT1186833B (it)
NL (1) NL8500466A (it)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ
FI84401C (fi) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion.
FI872049A (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
US4960177A (en) * 1988-06-03 1990-10-02 University Of Hawaii Silicon membrane micro-scale
JPH04268725A (ja) * 1991-02-25 1992-09-24 Canon Inc 力学量検出センサおよびその製造方法
GB2258050B (en) * 1991-07-26 1994-11-30 Fuji Electric Co Ltd Electrostatic capacity type differential pressure detector
DE4234237C2 (de) * 1992-10-10 2000-11-30 Bosch Gmbh Robert Temperaturkompensierter Mikroaktor
WO1994017383A1 (de) * 1993-01-19 1994-08-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Drucksensor
US5369544A (en) * 1993-04-05 1994-11-29 Ford Motor Company Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
NO179651C (no) * 1994-03-07 1996-11-20 Sinvent As Trykkmåler
US5479827A (en) * 1994-10-07 1996-01-02 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor isolating electrodes from external environment
US6662663B2 (en) 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
JP4683618B2 (ja) * 2005-02-10 2011-05-18 キヤノンアネルバ株式会社 隔膜型圧力センサ及びその製造方法
JP2009250874A (ja) * 2008-04-09 2009-10-29 Nagano Keiki Co Ltd 物理量センサおよびその製造方法
TWI550261B (zh) * 2014-03-17 2016-09-21 立錡科技股份有限公司 微機電壓力計以及其製作方法
CN104931188A (zh) * 2014-03-20 2015-09-23 立锜科技股份有限公司 微机电压力计以及其制作方法
US20170328800A1 (en) * 2014-07-11 2017-11-16 Richtek Technology Corporation Combo micro-electro-mechanical system device and manufacturing method thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
US4158217A (en) * 1976-12-02 1979-06-12 Kaylico Corporation Capacitive pressure transducer with improved electrode
JPS55732A (en) * 1978-06-20 1980-01-07 Tokyo Tokushu Densen Toryo Kk Preparation of polyimide/polyhydantoin resin coating composition
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
JPS5698630A (en) * 1980-01-11 1981-08-08 Hitachi Ltd Capacitive sensor
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
JPS5854676A (ja) * 1981-09-28 1983-03-31 Hitachi Ltd 半導体圧力変換器
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4467394A (en) * 1983-08-29 1984-08-21 United Technologies Corporation Three plate silicon-glass-silicon capacitive pressure transducer

Also Published As

Publication number Publication date
FI71015B (fi) 1986-07-18
FI840701A (fi) 1985-08-22
NL8500466A (nl) 1985-09-16
GB2156078A (en) 1985-10-02
IT8512438A0 (it) 1985-02-20
US4589054A (en) 1986-05-13
IT1186833B (it) 1987-12-16
FR2559900A1 (fr) 1985-08-23
GB2156078B (en) 1987-05-13
FI840701A0 (fi) 1984-02-21
JPS60202323A (ja) 1985-10-12
DE3505925C2 (de) 1996-01-11
FR2559900B1 (fr) 1987-02-27
BR8500735A (pt) 1985-10-08
JPH0583854B2 (it) 1993-11-29
DE3505925A1 (de) 1985-08-22
GB8504079D0 (en) 1985-03-20

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MA Patent expired

Owner name: VAISALA OY