FI119259B - Pinnan ja paksuuden määrittäminen - Google Patents

Pinnan ja paksuuden määrittäminen Download PDF

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Publication number
FI119259B
FI119259B FI20065669A FI20065669A FI119259B FI 119259 B FI119259 B FI 119259B FI 20065669 A FI20065669 A FI 20065669A FI 20065669 A FI20065669 A FI 20065669A FI 119259 B FI119259 B FI 119259B
Authority
FI
Finland
Prior art keywords
optical radiation
measured
optical
detector
normal
Prior art date
Application number
FI20065669A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20065669A (fi
FI20065669A0 (fi
Inventor
Heimo Keraenen
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=37232275&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FI119259(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Publication of FI20065669A0 publication Critical patent/FI20065669A0/fi
Priority to FI20065669A priority Critical patent/FI119259B/fi
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to ES07823198T priority patent/ES2400380T3/es
Priority to PCT/FI2007/050561 priority patent/WO2008046966A1/fr
Priority to US12/446,298 priority patent/US7936464B2/en
Priority to EP07823198A priority patent/EP2076733B1/fr
Priority to CN2007800386293A priority patent/CN101529200B/zh
Priority to JP2009532834A priority patent/JP5155325B2/ja
Publication of FI20065669A publication Critical patent/FI20065669A/fi
Publication of FI119259B publication Critical patent/FI119259B/fi
Application granted granted Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • D—TEXTILES; PAPER
    • D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
    • D21F—PAPER-MAKING MACHINES; METHODS OF PRODUCING PAPER THEREON
    • D21F7/00—Other details of machines for making continuous webs of paper
    • D21F7/06—Indicating or regulating the thickness of the layer; Signal devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/499—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00 using polarisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/40—Caliper-like sensors
    • G01B2210/44—Caliper-like sensors with detectors on both sides of the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FI20065669A 2006-10-18 2006-10-18 Pinnan ja paksuuden määrittäminen FI119259B (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI20065669A FI119259B (fi) 2006-10-18 2006-10-18 Pinnan ja paksuuden määrittäminen
ES07823198T ES2400380T3 (es) 2006-10-18 2007-10-17 Determinación de superficie y de grosor
JP2009532834A JP5155325B2 (ja) 2006-10-18 2007-10-17 表面および厚みの決定
PCT/FI2007/050561 WO2008046966A1 (fr) 2006-10-18 2007-10-17 Détermination de surface et d'épaisseur
US12/446,298 US7936464B2 (en) 2006-10-18 2007-10-17 Determining surface and thickness
EP07823198A EP2076733B1 (fr) 2006-10-18 2007-10-17 Détermination de surface et d'épaisseur
CN2007800386293A CN101529200B (zh) 2006-10-18 2007-10-17 确定表面和厚度

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20065669 2006-10-18
FI20065669A FI119259B (fi) 2006-10-18 2006-10-18 Pinnan ja paksuuden määrittäminen

Publications (3)

Publication Number Publication Date
FI20065669A0 FI20065669A0 (fi) 2006-10-18
FI20065669A FI20065669A (fi) 2008-04-19
FI119259B true FI119259B (fi) 2008-09-15

Family

ID=37232275

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20065669A FI119259B (fi) 2006-10-18 2006-10-18 Pinnan ja paksuuden määrittäminen

Country Status (7)

Country Link
US (1) US7936464B2 (fr)
EP (1) EP2076733B1 (fr)
JP (1) JP5155325B2 (fr)
CN (1) CN101529200B (fr)
ES (1) ES2400380T3 (fr)
FI (1) FI119259B (fr)
WO (1) WO2008046966A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011042606A1 (fr) 2009-10-08 2011-04-14 Valtion Teknillinen Tutkimuskeskus Instrument de mesure et procédé de détermination des propriétés d'un élément et de sa surface

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20075975L (fi) * 2007-12-31 2009-07-01 Metso Automation Oy Rainan mittaus
US8085397B2 (en) * 2009-07-10 2011-12-27 Honeywell Asca Inc. Fiber optic sensor utilizing broadband sources
JP2011229603A (ja) * 2010-04-26 2011-11-17 Fujifilm Corp 内視鏡装置
JP2011229625A (ja) * 2010-04-26 2011-11-17 Fujifilm Corp 内視鏡装置
FI124452B (fi) * 2010-07-09 2014-09-15 Teknologian Tutkimuskeskus Vtt Menetelmä ja laite pinnan värin ja muiden ominaisuuksien mittaamiseksi
US10684362B2 (en) 2011-06-30 2020-06-16 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
US11933899B2 (en) 2011-06-30 2024-03-19 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
US11313678B2 (en) 2011-06-30 2022-04-26 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
US11231502B2 (en) * 2011-06-30 2022-01-25 The Regents Of The University Of Colorado Remote measurement of shallow depths in semi-transparent media
JP2013096853A (ja) * 2011-11-01 2013-05-20 Omron Corp 変位センサ
DE102011117523B3 (de) * 2011-11-03 2013-04-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur optischen Bestimmung der Oberflächengeometrie einer dreidimensionalen Probe
DK2798207T3 (en) * 2011-12-29 2016-04-04 Vestas Wind Sys As A wind turbine and a method for determining the presence and / or the thickness of a layer of ice on a wing body of a wind turbine
CN102778202B (zh) * 2012-03-23 2016-01-27 北京京东方光电科技有限公司 一种膜厚测量装置及方法
FI125408B (fi) 2012-09-17 2015-09-30 Focalspec Oy Menetelmä ja mittalaite pinnan etäisyyden, kohteen paksuuden ja optisten ominaisuuksien mittaamiseksi
JP5701837B2 (ja) * 2012-10-12 2015-04-15 横河電機株式会社 変位センサ、変位測定方法
FI20126126L (fi) 2012-10-30 2014-05-01 Metso Automation Oy Menetelmä ja laite kiillon mittaamiseksi
GB2507813B (en) * 2012-11-13 2017-06-21 Focalspec Oy Apparatus and method for inspecting seals of items
WO2016000764A1 (fr) * 2014-07-01 2016-01-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Système de détection confocal chromatique
CN105303675B (zh) * 2015-10-15 2018-01-19 东方通信股份有限公司 一种利用光敏传感器检测纸张厚度的装置和方法
WO2018175995A1 (fr) * 2017-03-23 2018-09-27 Dolphin Measurement Systems, Llc Appareil et procédés de mesure d'épaisseur et de vitesse de matériaux mobiles plats à l'aide de technologies radar à haute fréquence
CN107326717B (zh) * 2017-07-12 2019-05-28 东莞福迈包装印刷有限公司 一种可以检测纸张厚度的造纸机
DE102017126310A1 (de) 2017-11-09 2019-05-09 Precitec Optronik Gmbh Abstandsmessvorrichtung
CN108955549A (zh) * 2018-09-11 2018-12-07 深圳立仪科技有限公司 一种透光材料双面测厚装置
DE102018130901A1 (de) * 2018-12-04 2020-06-04 Precitec Optronik Gmbh Optische Messeinrichtung
JP7160779B2 (ja) * 2019-10-03 2022-10-25 信越半導体株式会社 薄膜付ウェーハの膜厚分布の測定方法
CN110836642A (zh) * 2019-12-23 2020-02-25 海伯森技术（深圳）有限公司 一种基于三角测量法的彩色三角位移传感器及其测量方法
WO2021195190A1 (fr) * 2020-03-27 2021-09-30 Lam Research Corporation Surveillance in situ de l'épaisseur et de l'espacement d'une tranche à l'aide d'un capteur laser à faisceaux
CN112162296B (zh) * 2020-09-29 2024-05-31 香港中文大学（深圳） 一种激光测距系统
IL301550A (en) 2020-10-01 2023-05-01 Asml Netherlands Bv Test mechanism and method
FI20215460A1 (en) 2021-04-19 2022-10-20 Lmi Tech Oy LIGHTING ASSEMBLY AND METHOD FOR PRODUCING MEASUREMENT LIGHT AND OPTICAL MEASUREMENT DEVICE
DE102022134243A1 (de) * 2022-12-20 2024-06-20 Precitec Optronik Gmbh Chromatisch konfokale Messeinrichtung
DE102022134249A1 (de) * 2022-12-20 2024-06-20 Precitec Optronik Gmbh Chromatisch konfokale Messeinrichtung
CN116067435B (zh) * 2023-03-20 2023-06-27 北京市农林科学院智能装备技术研究中心 土壤环境多参数监测传感器

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2906641A1 (de) 1979-02-21 1980-08-28 Freudenberg Carl Fa Verfahren zur optisch-elektrischen messung des abstandes zwischen einer messeinrichtung und einem pruefling
US4458152A (en) 1982-05-10 1984-07-03 Siltec Corporation Precision specular proximity detector and article handing apparatus employing same
CH663466A5 (fr) 1983-09-12 1987-12-15 Battelle Memorial Institute Procede et dispositif pour determiner la position d'un objet par rapport a une reference.
US4936676A (en) 1984-11-28 1990-06-26 Honeywell Inc. Surface position sensor
US4656358A (en) * 1985-03-12 1987-04-07 Optoscan Corporation Laser-based wafer measuring system
DE3643842C2 (de) 1986-12-20 1995-07-20 Leuze Electronic Gmbh & Co Anordnung zur berührungslosen Bestimmung der räumlichen Lage eines auf der Oberfläche eines Körpers befindlichen Objektpunkts
JP2595821B2 (ja) * 1991-03-12 1997-04-02 日本電気株式会社 三次元形状測定装置
JPH04370708A (ja) * 1991-06-20 1992-12-24 Meidensha Corp 小型偏光解析装置
US5162660A (en) 1991-06-27 1992-11-10 Macmillan Bloedel Limited Paper roughness or glass sensor using polarized light reflection
JPH109827A (ja) * 1996-06-24 1998-01-16 Omron Corp 高さ判別装置および方法
US6064517A (en) * 1996-07-22 2000-05-16 Kla-Tencor Corporation High NA system for multiple mode imaging
IL121267A0 (en) 1997-07-09 1998-01-04 Yeda Res & Dev Method and device for determining the profile of an object
DE19733297C2 (de) 1997-08-01 1999-12-09 Marcus Gut Berührungslose optische Dickenmessung
JPH11201729A (ja) * 1998-01-12 1999-07-30 Mitsutoyo Corp 光学式測定装置
FR2779517B1 (fr) 1998-06-05 2000-08-18 Architecture Traitement D Imag Procede et dispositif d'acquisition opto-electrique de formes par illumination axiale
US6208411B1 (en) * 1998-09-28 2001-03-27 Kla-Tencor Corporation Massively parallel inspection and imaging system
JP2001070228A (ja) * 1999-07-02 2001-03-21 Asahi Optical Co Ltd 内視鏡装置
US6268923B1 (en) * 1999-10-07 2001-07-31 Integral Vision, Inc. Optical method and system for measuring three-dimensional surface topography of an object having a surface contour
DE10195052B3 (de) 2000-01-25 2015-06-18 Zygo Corp. Verfahren und Einrichtungen zur Bestimmung einer geometrischen Eigenschaft eines Versuchsgegenstands sowie optisches Profilmesssystem
US6917421B1 (en) 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
DE10242374A1 (de) 2002-09-12 2004-04-01 Siemens Ag Konfokaler Abstandssensor
DE10325942B4 (de) * 2003-06-07 2010-09-16 Jurca Optoelektronik Gmbh & Co. Kg Vorrichtung und Verfahren zur berührungslosen Dickenmessung transparanter Körper
DE102004034693B4 (de) 2004-07-17 2006-05-18 Schott Ag Verfahren und Vorrichtung zur berührungslosen optischen Messung der Dicke von heißen Glaskörpern mittels der chromatischen Aberration
US7345772B2 (en) 2004-08-06 2008-03-18 Voith Paper Patent Gmbh Optical triangulation device and method of measuring a variable of a web using the device
DE102005006724A1 (de) * 2004-10-20 2006-08-10 Universität Stuttgart Verfahren und Anordung zur konfokalen Spektral-Interferometrie, insbesondere auch zur optischen Kohärenz-Tomografie (OCT)und/oder optischen Kohärenz-Mikroskopie (OCM)von biologischen und technischen Objekten
DE102004052205A1 (de) 2004-10-20 2006-05-04 Universität Stuttgart Interferometrischer Multispektral-Sensor und interferometrisches Multispektral-Verfahren zur hochdynamischen Objekt-Tiefenabtastung oder Objekt-Profilerfassung
US7522292B2 (en) 2005-03-11 2009-04-21 Carl Zeiss Smt Ag System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape
US20060232790A1 (en) 2005-04-18 2006-10-19 Lee Chase Confocal measurement method and apparatus in a paper machine
JP2007147299A (ja) * 2005-11-24 2007-06-14 Kobe Steel Ltd 変位測定装置及び変位測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011042606A1 (fr) 2009-10-08 2011-04-14 Valtion Teknillinen Tutkimuskeskus Instrument de mesure et procédé de détermination des propriétés d'un élément et de sa surface

Also Published As

Publication number Publication date
JP5155325B2 (ja) 2013-03-06
FI20065669A (fi) 2008-04-19
US20100296107A1 (en) 2010-11-25
WO2008046966A1 (fr) 2008-04-24
CN101529200A (zh) 2009-09-09
CN101529200B (zh) 2012-07-04
US7936464B2 (en) 2011-05-03
EP2076733A4 (fr) 2010-01-06
ES2400380T3 (es) 2013-04-09
EP2076733A1 (fr) 2009-07-08
JP2010507089A (ja) 2010-03-04
EP2076733B1 (fr) 2012-12-05
FI20065669A0 (fi) 2006-10-18

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