FI110727B - Elektriskt modulerbar termisk strålkälla - Google Patents
Elektriskt modulerbar termisk strålkälla Download PDFInfo
- Publication number
- FI110727B FI110727B FI943037A FI943037A FI110727B FI 110727 B FI110727 B FI 110727B FI 943037 A FI943037 A FI 943037A FI 943037 A FI943037 A FI 943037A FI 110727 B FI110727 B FI 110727B
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- 230000005855 radiation Effects 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000010408 film Substances 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000005275 alloying Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XUIMIQQOPSSXEZ-AKLPVKDBSA-N silicon-31 atom Chemical compound [31Si] XUIMIQQOPSSXEZ-AKLPVKDBSA-N 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K7/00—Lamps for purposes other than general lighting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/02—Incandescent bodies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Resistance Heating (AREA)
- Micromachines (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Claims (18)
1. Elektriskt modulerbar strälkälla, som omfattar 5 - ett väsentligen plant underlag (1), - en i underlaget (1) bildad fordjupning (2) eller öppning, - ätminstone en vid underlaget (1) fast glödträd (3), som är anordnad vid 10 fbrdjupningen (2) eller öppningen, och - kontaktytor (5) anordnade i underlaget (1) vid bäda ändama av glödträden (3) för matning av elström tili glödträden (3), 15 kännetecknadavatt - glödträden (3) utgörs av metall och är ätminstone tili den del som ligger avskilt frän underlaget (1) belagd med en enhetlig, oxideringsresistent tunnfilm (39). 20
• · ."’: 2. Strälkällaenligtpatentkrav 1, kännetecknad avatttunnfilmen(32, 36)utgörs • · · : * ί av kiselnitrid. t * I I I t • · « · IM v
· 3. Strälkälla enligt patentkrav 1, kännetecknad avatttvä eller flera glödträdar 25 (3) är elektriskt seriekopplade.
• · •; · ‘ 4. Strälkälla enligt patentkrav 1, kännetecknad avatttvä eller flera glödträdar :: (3) är elektriskt parallellkopplade. • · »· · ·:··· 30
5. Strälkälla enligt patentkrav 1, kännetecknad avatt glödträdar (3) är : ’ ·.: elektriskt bäde parallell- och seriekopplade.
6. Strälkälla enligt patentkrav 1, kännetecknad avatt varje glödträd (3) utgörs h 110727 av volfram.
7. Strälkällaenligtpatentkrav 1, kännetecknad avattvarje glödträd(3)utgörs av titanvolfram. 5
8. Strälkälla enligt patentkrav 1, kännetecknad avatt varje glödträd (3) utgörs av molybden.
9. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt 10 de enskilda glödträdama (3) är mekaniskt kopplade tili varandra.
10. Strälkälla enligt patentkrav 9, kännetecknad avattde enskilda glödträdama (3) är mekaniskt kopplade tili varandra medelst en enhetlig kiselnitridbrygga (6).
11. Strälkälla enligt patentkrav 9, kännetecknad avattde enskilda glödträdama (3) är mekaniskt kopplade tili varandra medelst en enhetlig kiselnitridbrygga (6) med öppningar.
·. 12. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt • · • ·.:. 20 under glödträdama (3) är en spegelkonstruktion (43) anordnad. • · • · «M • I t “.'.
13. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt « * » • · · under glödträdama (3) är en antireflexfilm (37) anordnad. • · · · • « · • · · • · ·
14. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt * · : / ·; den omfattar en Fabry-Perot-interferometer.
15. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt : * ’ ’: den omfattar ett icke-transparent skikt (44), i vilken en apertur (45) är bildad. 30 • · .
·. : 16. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt • · pä glödträdama (3) är ett multikristallint kiselskikt (39) anordnat. is 110727
17. Strälkälla enligt patentkrav 16, kännetecknad avatt den sammanlagda tjockleken av det multikristallina kiselskiktet (39) och skiktet (32) därpä utgör en fjärdedel av en mätningsväglängd . 5
18. Strälkälla enligt nägot av de föregäende patentkraven, kännetecknad avatt glödträdamas (3) ändar (7) är av tunnare utforande än glödträdamas (3) mittpartier (8).
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI943037A FI110727B (sv) | 1994-06-23 | 1994-06-23 | Elektriskt modulerbar termisk strålkälla |
EP95304360A EP0689229B1 (en) | 1994-06-23 | 1995-06-21 | Electrically modulatable thermal radiant source |
DE69512141T DE69512141T2 (de) | 1994-06-23 | 1995-06-21 | Elektrisch modulierbare thermische Strahlungsquelle |
US08/494,636 US5644676A (en) | 1994-06-23 | 1995-06-23 | Thermal radiant source with filament encapsulated in protective film |
CN95108447A CN1066855C (zh) | 1994-06-23 | 1995-06-23 | 电调制热辐射源装置 |
JP15797195A JP3745793B2 (ja) | 1994-06-23 | 1995-06-23 | 電気的に調節可能な熱放射源 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI943037A FI110727B (sv) | 1994-06-23 | 1994-06-23 | Elektriskt modulerbar termisk strålkälla |
FI943037 | 1994-06-23 |
Publications (3)
Publication Number | Publication Date |
---|---|
FI943037A0 FI943037A0 (sv) | 1994-06-23 |
FI943037A FI943037A (sv) | 1995-12-24 |
FI110727B true FI110727B (sv) | 2003-03-14 |
Family
ID=8540991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI943037A FI110727B (sv) | 1994-06-23 | 1994-06-23 | Elektriskt modulerbar termisk strålkälla |
Country Status (6)
Country | Link |
---|---|
US (1) | US5644676A (sv) |
EP (1) | EP0689229B1 (sv) |
JP (1) | JP3745793B2 (sv) |
CN (1) | CN1066855C (sv) |
DE (1) | DE69512141T2 (sv) |
FI (1) | FI110727B (sv) |
Families Citing this family (118)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI102696B (sv) * | 1995-02-22 | 1999-01-29 | Instrumentarium Oy | Sammansättning av dubbelstrålkälla och mätdetektor |
JP3205230B2 (ja) * | 1995-08-31 | 2001-09-04 | 株式会社島津製作所 | 赤外光源 |
FI112005B (sv) * | 1995-11-24 | 2003-10-15 | Valtion Teknillinen | Elektriskt modulerbar termisk strålkälla |
GB9607862D0 (en) * | 1996-04-16 | 1996-06-19 | Smiths Industries Plc | Light-emitting assemblies |
US5956003A (en) * | 1996-07-24 | 1999-09-21 | Hypres, Inc. | Flat panel display with array of micromachined incandescent lamps |
FR2748810A1 (fr) * | 1996-09-30 | 1997-11-21 | Commissariat Energie Atomique | Source de rayonnement infrarouge miniaturisee |
US6036829A (en) * | 1997-02-10 | 2000-03-14 | Denso Corporation | Oxygen sensor |
US5955839A (en) * | 1997-03-26 | 1999-09-21 | Quantum Vision, Inc. | Incandescent microcavity lightsource having filament spaced from reflector at node of wave emitted |
FR2768813B1 (fr) | 1997-09-19 | 1999-10-22 | Commissariat Energie Atomique | Spectrometre photoacoustique miniaturise |
US6124145A (en) | 1998-01-23 | 2000-09-26 | Instrumentarium Corporation | Micromachined gas-filled chambers and method of microfabrication |
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-
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1995
- 1995-06-21 DE DE69512141T patent/DE69512141T2/de not_active Expired - Lifetime
- 1995-06-21 EP EP95304360A patent/EP0689229B1/en not_active Expired - Lifetime
- 1995-06-23 CN CN95108447A patent/CN1066855C/zh not_active Expired - Fee Related
- 1995-06-23 US US08/494,636 patent/US5644676A/en not_active Expired - Lifetime
- 1995-06-23 JP JP15797195A patent/JP3745793B2/ja not_active Expired - Fee Related
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---|---|
DE69512141T2 (de) | 2000-04-20 |
CN1121679A (zh) | 1996-05-01 |
CN1066855C (zh) | 2001-06-06 |
EP0689229A2 (en) | 1995-12-27 |
DE69512141D1 (de) | 1999-10-21 |
EP0689229B1 (en) | 1999-09-15 |
US5644676A (en) | 1997-07-01 |
JPH0864183A (ja) | 1996-03-08 |
FI943037A0 (sv) | 1994-06-23 |
FI943037A (sv) | 1995-12-24 |
EP0689229A3 (en) | 1996-07-10 |
JP3745793B2 (ja) | 2006-02-15 |
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