FI110727B - Sähköisesti moduloitava terminen säteilylähde - Google Patents
Sähköisesti moduloitava terminen säteilylähde Download PDFInfo
- Publication number
- FI110727B FI110727B FI943037A FI943037A FI110727B FI 110727 B FI110727 B FI 110727B FI 943037 A FI943037 A FI 943037A FI 943037 A FI943037 A FI 943037A FI 110727 B FI110727 B FI 110727B
- Authority
- FI
- Finland
- Prior art keywords
- filament
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- radiation
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- Prior art date
Links
- 230000005855 radiation Effects 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000010408 film Substances 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000005275 alloying Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XUIMIQQOPSSXEZ-AKLPVKDBSA-N silicon-31 atom Chemical compound [31Si] XUIMIQQOPSSXEZ-AKLPVKDBSA-N 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K7/00—Lamps for purposes other than general lighting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
- G01J5/53—Reference sources, e.g. standard lamps; Black bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/02—Incandescent bodies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Resistance Heating (AREA)
- Micromachines (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI943037A FI110727B (fi) | 1994-06-23 | 1994-06-23 | Sähköisesti moduloitava terminen säteilylähde |
| DE69512141T DE69512141T2 (de) | 1994-06-23 | 1995-06-21 | Elektrisch modulierbare thermische Strahlungsquelle |
| EP95304360A EP0689229B1 (en) | 1994-06-23 | 1995-06-21 | Electrically modulatable thermal radiant source |
| JP15797195A JP3745793B2 (ja) | 1994-06-23 | 1995-06-23 | 電気的に調節可能な熱放射源 |
| US08/494,636 US5644676A (en) | 1994-06-23 | 1995-06-23 | Thermal radiant source with filament encapsulated in protective film |
| CN95108447A CN1066855C (zh) | 1994-06-23 | 1995-06-23 | 电调制热辐射源装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI943037 | 1994-06-23 | ||
| FI943037A FI110727B (fi) | 1994-06-23 | 1994-06-23 | Sähköisesti moduloitava terminen säteilylähde |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| FI943037A0 FI943037A0 (fi) | 1994-06-23 |
| FI943037A FI943037A (fi) | 1995-12-24 |
| FI110727B true FI110727B (fi) | 2003-03-14 |
Family
ID=8540991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI943037A FI110727B (fi) | 1994-06-23 | 1994-06-23 | Sähköisesti moduloitava terminen säteilylähde |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5644676A (ja) |
| EP (1) | EP0689229B1 (ja) |
| JP (1) | JP3745793B2 (ja) |
| CN (1) | CN1066855C (ja) |
| DE (1) | DE69512141T2 (ja) |
| FI (1) | FI110727B (ja) |
Families Citing this family (118)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI102696B (fi) * | 1995-02-22 | 1999-01-29 | Instrumentarium Oy | Kaksoissäteilylähdekokoonpano ja mittausanturi |
| JP3205230B2 (ja) * | 1995-08-31 | 2001-09-04 | 株式会社島津製作所 | 赤外光源 |
| FI112005B (fi) * | 1995-11-24 | 2003-10-15 | Valtion Teknillinen | Sähköisesti moduloitavissa oleva terminen säteilylähde |
| GB9607862D0 (en) * | 1996-04-16 | 1996-06-19 | Smiths Industries Plc | Light-emitting assemblies |
| US5956003A (en) * | 1996-07-24 | 1999-09-21 | Hypres, Inc. | Flat panel display with array of micromachined incandescent lamps |
| FR2748810A1 (fr) * | 1996-09-30 | 1997-11-21 | Commissariat Energie Atomique | Source de rayonnement infrarouge miniaturisee |
| US6036829A (en) * | 1997-02-10 | 2000-03-14 | Denso Corporation | Oxygen sensor |
| US5955839A (en) * | 1997-03-26 | 1999-09-21 | Quantum Vision, Inc. | Incandescent microcavity lightsource having filament spaced from reflector at node of wave emitted |
| FR2768813B1 (fr) | 1997-09-19 | 1999-10-22 | Commissariat Energie Atomique | Spectrometre photoacoustique miniaturise |
| US6124145A (en) | 1998-01-23 | 2000-09-26 | Instrumentarium Corporation | Micromachined gas-filled chambers and method of microfabrication |
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| US5464966A (en) * | 1992-10-26 | 1995-11-07 | The United States Of America As Represented By The Secretary Of Commerce | Micro-hotplate devices and methods for their fabrication |
| FI101911B (fi) * | 1993-04-07 | 1998-09-15 | Valtion Teknillinen | Sähköisesti moduloitava terminen säteilylähde ja menetelmä sen valmist amiseksi |
-
1994
- 1994-06-23 FI FI943037A patent/FI110727B/fi active
-
1995
- 1995-06-21 DE DE69512141T patent/DE69512141T2/de not_active Expired - Lifetime
- 1995-06-21 EP EP95304360A patent/EP0689229B1/en not_active Expired - Lifetime
- 1995-06-23 CN CN95108447A patent/CN1066855C/zh not_active Expired - Fee Related
- 1995-06-23 US US08/494,636 patent/US5644676A/en not_active Expired - Lifetime
- 1995-06-23 JP JP15797195A patent/JP3745793B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3745793B2 (ja) | 2006-02-15 |
| DE69512141T2 (de) | 2000-04-20 |
| EP0689229A3 (en) | 1996-07-10 |
| DE69512141D1 (de) | 1999-10-21 |
| FI943037A (fi) | 1995-12-24 |
| US5644676A (en) | 1997-07-01 |
| EP0689229B1 (en) | 1999-09-15 |
| JPH0864183A (ja) | 1996-03-08 |
| EP0689229A2 (en) | 1995-12-27 |
| FI943037A0 (fi) | 1994-06-23 |
| CN1121679A (zh) | 1996-05-01 |
| CN1066855C (zh) | 2001-06-06 |
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