ES521774A0 - Compuerta de gas mejorada para reducir sustancialmente la retrocirculacion de los gases. - Google Patents
Compuerta de gas mejorada para reducir sustancialmente la retrocirculacion de los gases.Info
- Publication number
- ES521774A0 ES521774A0 ES521774A ES521774A ES521774A0 ES 521774 A0 ES521774 A0 ES 521774A0 ES 521774 A ES521774 A ES 521774A ES 521774 A ES521774 A ES 521774A ES 521774 A0 ES521774 A0 ES 521774A0
- Authority
- ES
- Spain
- Prior art keywords
- retrocirculation
- gases
- substantially reduce
- improved gas
- gas gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/906—Seal for article of indefinite length, e.g. strip, sheet
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Photovoltaic Devices (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/372,937 US4462332A (en) | 1982-04-29 | 1982-04-29 | Magnetic gas gate |
Publications (2)
Publication Number | Publication Date |
---|---|
ES8407248A1 ES8407248A1 (es) | 1984-04-01 |
ES521774A0 true ES521774A0 (es) | 1984-04-01 |
Family
ID=23470245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES521774A Granted ES521774A0 (es) | 1982-04-29 | 1983-04-22 | Compuerta de gas mejorada para reducir sustancialmente la retrocirculacion de los gases. |
Country Status (20)
Country | Link |
---|---|
US (1) | US4462332A (es) |
JP (1) | JPS58199571A (es) |
KR (1) | KR840004831A (es) |
AU (1) | AU554982B2 (es) |
BR (1) | BR8302060A (es) |
CA (1) | CA1186787A (es) |
DE (1) | DE3314375A1 (es) |
EG (1) | EG15947A (es) |
ES (1) | ES521774A0 (es) |
FR (1) | FR2527384B1 (es) |
GB (1) | GB2119406B (es) |
IE (1) | IE54234B1 (es) |
IL (1) | IL68390A0 (es) |
IN (1) | IN158452B (es) |
IT (1) | IT1173664B (es) |
MX (1) | MX158211A (es) |
NL (1) | NL8301437A (es) |
PH (1) | PH19617A (es) |
SE (1) | SE457357B (es) |
ZA (1) | ZA832572B (es) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4537795A (en) * | 1982-09-16 | 1985-08-27 | Sovonics Solar Systems | Method for introducing sweep gases into a glow discharge deposition apparatus |
JPS60119784A (ja) * | 1983-12-01 | 1985-06-27 | Kanegafuchi Chem Ind Co Ltd | 絶縁金属基板の製法およびそれに用いる装置 |
US6784033B1 (en) | 1984-02-15 | 2004-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for the manufacture of an insulated gate field effect semiconductor device |
US5780313A (en) * | 1985-02-14 | 1998-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating semiconductor device |
US4678679A (en) * | 1984-06-25 | 1987-07-07 | Energy Conversion Devices, Inc. | Continuous deposition of activated process gases |
JPS6179755A (ja) * | 1984-09-28 | 1986-04-23 | Nisshin Steel Co Ltd | 溶融めつき真空蒸着めつき兼用の連続めつき装置 |
US4664951A (en) * | 1985-07-31 | 1987-05-12 | Energy Conversion Devices, Inc. | Method provided for corrective lateral displacement of a longitudinally moving web held in a planar configuration |
US6673722B1 (en) | 1985-10-14 | 2004-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
US6230650B1 (en) | 1985-10-14 | 2001-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
US4829189A (en) * | 1986-07-18 | 1989-05-09 | Sando Iron Works Co., Ltd. | Apparatus for low-temperature plasma treatment of sheet material |
JPH0193129A (ja) * | 1987-10-02 | 1989-04-12 | Mitsubishi Electric Corp | 化学気相成長装置 |
JPH02291072A (ja) * | 1989-04-25 | 1990-11-30 | Koufu Nippon Denki Kk | 手形・小切手類処理装置 |
US5271631A (en) * | 1989-05-31 | 1993-12-21 | Atsushi Yokouchi | Magnetic fluid seal apparatus |
JPH0419081A (ja) * | 1990-05-15 | 1992-01-23 | Seiko Instr Inc | 真空内搬送ロボット |
JP2975151B2 (ja) * | 1991-03-28 | 1999-11-10 | キヤノン株式会社 | 半導体素子の連続的製造装置 |
US5157851A (en) * | 1991-10-02 | 1992-10-27 | United Solar Systems Corporation | Pinching gate valve |
US5374313A (en) * | 1992-06-24 | 1994-12-20 | Energy Conversion Devices, Inc. | Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure |
US5946587A (en) * | 1992-08-06 | 1999-08-31 | Canon Kabushiki Kaisha | Continuous forming method for functional deposited films |
DE9407482U1 (de) * | 1994-05-05 | 1994-10-06 | Balzers und Leybold Deutschland Holding AG, 63450 Hanau | Funktionseinrichtung für eine Vakuumanlage für die Behandlung von scheibenförmigen Werkstücken |
JPH08194847A (ja) * | 1995-01-20 | 1996-07-30 | Chugoku Nippon Denki Software Kk | 手形自動発行装置 |
EP1810344A2 (en) * | 2004-11-10 | 2007-07-25 | Daystar Technologies, Inc. | Pallet based system for forming thin-film solar cells |
WO2006053218A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pressure control system in a photovoltaic substrate deposition |
JP2009046710A (ja) * | 2007-08-16 | 2009-03-05 | Fuji Electric Systems Co Ltd | 半導体素子の連続的製造装置 |
US7972898B2 (en) * | 2007-09-26 | 2011-07-05 | Eastman Kodak Company | Process for making doped zinc oxide |
KR20090088056A (ko) * | 2008-02-14 | 2009-08-19 | 삼성전기주식회사 | 가스공급 유닛 및 화학기상증착 장치 |
DE102008030677B4 (de) * | 2008-04-17 | 2016-01-14 | Von Ardenne Gmbh | Verfahen und Vorrichtung zur Diffusionsbehandlung von Werkstücken |
EP2292339A1 (en) * | 2009-09-07 | 2011-03-09 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Coating method and coating apparatus |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2925062A (en) * | 1953-05-15 | 1960-02-16 | Heraeus Gmbh W C | Coating apparatus |
GB763541A (en) * | 1953-09-29 | 1956-12-12 | Siemens Ag | Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material |
US3227132A (en) * | 1962-12-31 | 1966-01-04 | Nat Res Corp | Apparatus for depositing coatings of tin on a flexible substrate |
DE1282411B (de) * | 1964-12-28 | 1968-11-07 | Hermsdorf Keramik Veb | Vorrichtung zur kontinuierlichen Herstellung und Bearbeitung von Bauelementen der Elektronik unter Vakuum, insbesondere zum Aufdampfen von Schichten |
GB1168641A (en) * | 1966-05-19 | 1969-10-29 | British Iron Steel Research | Formation of Polymer Coatings on Substrates. |
GB1252882A (es) * | 1967-10-17 | 1971-11-10 | ||
US3648383A (en) * | 1969-12-01 | 1972-03-14 | Eastman Kodak Co | Sealing apparatus for transport of material between regions at different pressures |
US3645545A (en) * | 1970-07-30 | 1972-02-29 | Ibm | Entrance-exit atmospheric isolation device |
JPS4834798A (es) * | 1971-09-06 | 1973-05-22 | ||
US3814983A (en) * | 1972-02-07 | 1974-06-04 | C Weissfloch | Apparatus and method for plasma generation and material treatment with electromagnetic radiation |
LU69013A1 (es) * | 1973-03-07 | 1974-02-22 | ||
GB1428993A (en) * | 1973-07-03 | 1976-03-24 | Electricity Council | Continuous heat treatment of wire or rod |
LU69164A1 (es) * | 1974-01-15 | 1974-04-08 | ||
US4048955A (en) * | 1975-09-02 | 1977-09-20 | Texas Instruments Incorporated | Continuous chemical vapor deposition reactor |
US4065137A (en) * | 1976-08-24 | 1977-12-27 | Armstrong Cork Company | Plasma-process vacuum seal |
FR2383702A1 (fr) * | 1977-03-18 | 1978-10-13 | Anvar | Perfectionnements aux procedes et dispositifs de dopage de materiaux semi-conducteurs |
FR2409428A1 (fr) * | 1977-11-19 | 1979-06-15 | Dornier Gmbh Lindauer | Dispositif d'etancheite destine a empecher des gaz oxydants, explosifs ou toxiques de s'echapper d'un tunnel de traitement d'une matiere en bande |
US4346669A (en) * | 1979-10-12 | 1982-08-31 | General Engineering Radcliffe 1979 Limited | Vacuum chamber seals |
US4400409A (en) * | 1980-05-19 | 1983-08-23 | Energy Conversion Devices, Inc. | Method of making p-doped silicon films |
JPS5736437A (en) * | 1980-08-14 | 1982-02-27 | Fuji Photo Film Co Ltd | Producing device of magnetic recording medium |
US4389970A (en) * | 1981-03-16 | 1983-06-28 | Energy Conversion Devices, Inc. | Apparatus for regulating substrate temperature in a continuous plasma deposition process |
-
1982
- 1982-04-29 US US06/372,937 patent/US4462332A/en not_active Expired - Lifetime
-
1983
- 1983-04-06 IE IE782/83A patent/IE54234B1/en not_active IP Right Cessation
- 1983-04-13 ZA ZA832572A patent/ZA832572B/xx unknown
- 1983-04-14 IL IL68390A patent/IL68390A0/xx unknown
- 1983-04-20 BR BR8302060A patent/BR8302060A/pt unknown
- 1983-04-20 EG EG242/83A patent/EG15947A/xx active
- 1983-04-20 AU AU13693/83A patent/AU554982B2/en not_active Ceased
- 1983-04-21 DE DE19833314375 patent/DE3314375A1/de active Granted
- 1983-04-21 FR FR8306541A patent/FR2527384B1/fr not_active Expired
- 1983-04-21 IT IT20732/83A patent/IT1173664B/it active
- 1983-04-22 PH PH28809A patent/PH19617A/en unknown
- 1983-04-22 NL NL8301437A patent/NL8301437A/nl not_active Application Discontinuation
- 1983-04-22 IN IN478/CAL/83A patent/IN158452B/en unknown
- 1983-04-22 ES ES521774A patent/ES521774A0/es active Granted
- 1983-04-22 SE SE8302275A patent/SE457357B/sv not_active IP Right Cessation
- 1983-04-22 MX MX197027A patent/MX158211A/es unknown
- 1983-04-22 JP JP58071319A patent/JPS58199571A/ja active Granted
- 1983-04-25 GB GB08311173A patent/GB2119406B/en not_active Expired
- 1983-04-29 CA CA000426993A patent/CA1186787A/en not_active Expired
- 1983-04-29 KR KR1019830001828A patent/KR840004831A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU554982B2 (en) | 1986-09-11 |
FR2527384A1 (fr) | 1983-11-25 |
GB2119406B (en) | 1986-01-29 |
IT1173664B (it) | 1987-06-24 |
SE457357B (sv) | 1988-12-19 |
IT8320732A0 (it) | 1983-04-21 |
CA1186787A (en) | 1985-05-07 |
IE54234B1 (en) | 1989-07-19 |
ES8407248A1 (es) | 1984-04-01 |
FR2527384B1 (fr) | 1988-07-22 |
JPS58199571A (ja) | 1983-11-19 |
SE8302275D0 (sv) | 1983-04-22 |
SE8302275L (sv) | 1983-10-30 |
IL68390A0 (en) | 1983-07-31 |
MX158211A (es) | 1989-01-16 |
EG15947A (en) | 1986-09-30 |
JPS649746B2 (es) | 1989-02-20 |
GB8311173D0 (en) | 1983-06-02 |
PH19617A (en) | 1986-05-30 |
NL8301437A (nl) | 1983-11-16 |
BR8302060A (pt) | 1983-12-27 |
DE3314375C2 (es) | 1992-04-09 |
IT8320732A1 (it) | 1984-10-21 |
GB2119406A (en) | 1983-11-16 |
US4462332A (en) | 1984-07-31 |
KR840004831A (ko) | 1984-10-24 |
IN158452B (es) | 1986-11-22 |
ZA832572B (en) | 1984-01-25 |
AU1369383A (en) | 1983-11-03 |
DE3314375A1 (de) | 1983-11-03 |
IE830782L (en) | 1983-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD1A | Patent lapsed |
Effective date: 20040601 |