ES485671A1 - Procedimiento de metalizacion a partir de puentes de vapor por bombardeo de los depositos con particulas energeticas. - Google Patents
Procedimiento de metalizacion a partir de puentes de vapor por bombardeo de los depositos con particulas energeticas.Info
- Publication number
- ES485671A1 ES485671A1 ES485671A ES485671A ES485671A1 ES 485671 A1 ES485671 A1 ES 485671A1 ES 485671 A ES485671 A ES 485671A ES 485671 A ES485671 A ES 485671A ES 485671 A1 ES485671 A1 ES 485671A1
- Authority
- ES
- Spain
- Prior art keywords
- deposition process
- deposit
- bombarding
- producing
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/584—Non-reactive treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Procedimiento de metalización a partir de fuentes de vapor por bombardeo de los depósitos con partículas energéticas que incluye: (a) mantener un vacío en una cámara, (B) situar un substrato en la cámara, © formar un vapor depositable constituido por un metal de transición en el vacío a partir de un fuente de vapor, depositándose normalmente el vapor bajo tensión, (D) permitir que el vapor entre en contacto con el substrato para formar un depósito en el él, y (E) bombardear el depósito con particular aceleradas que comprenden partículas atómicas, energéticas procedentes de otra fuente cuyo número y energía son suficientes como para que la tensión interna del depósito sea aproximadamente cero a su compresión.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95737478A | 1978-11-02 | 1978-11-02 | |
US95737378A | 1978-11-02 | 1978-11-02 | |
US06/055,939 US4256780A (en) | 1978-11-02 | 1979-07-09 | Metallization process |
Publications (1)
Publication Number | Publication Date |
---|---|
ES485671A1 true ES485671A1 (es) | 1980-10-01 |
Family
ID=27368938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES485671A Expired ES485671A1 (es) | 1978-11-02 | 1979-11-02 | Procedimiento de metalizacion a partir de puentes de vapor por bombardeo de los depositos con particulas energeticas. |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0010971B1 (es) |
AU (1) | AU532935B2 (es) |
CA (1) | CA1124957A (es) |
DE (1) | DE2966835D1 (es) |
ES (1) | ES485671A1 (es) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3003285A1 (de) * | 1980-01-30 | 1981-08-06 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen niederohmiger, einkristalliner metall- oder legierungsschichten auf substraten |
JPS60176981A (ja) * | 1984-02-22 | 1985-09-11 | 株式会社豊田中央研究所 | セラミツクスの強化方法 |
GB8423255D0 (en) * | 1984-09-14 | 1984-10-17 | Atomic Energy Authority Uk | Surface treatment of metals |
EP0751235B1 (en) * | 1995-06-30 | 1999-05-06 | Toyoda Gosei Co., Ltd. | Flexible metallized products and process for producing the same |
DE19640832C2 (de) * | 1996-10-02 | 2000-08-10 | Fraunhofer Ges Forschung | Verfahren zur Herstellung wärmereflektierender Schichtsysteme |
GB9821903D0 (en) * | 1998-10-09 | 1998-12-02 | Rolls Royce Plc | A method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article |
US7208396B2 (en) | 2002-01-16 | 2007-04-24 | Tegal Corporation | Permanent adherence of the back end of a wafer to an electrical component or sub-assembly |
US7229533B2 (en) | 2004-06-25 | 2007-06-12 | Guardian Industries Corp. | Method of making coated article having low-E coating with ion beam treated and/or formed IR reflecting layer |
US7311975B2 (en) * | 2004-06-25 | 2007-12-25 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method |
US8691057B2 (en) | 2008-03-25 | 2014-04-08 | Oem Group | Stress adjustment in reactive sputtering |
US8482375B2 (en) | 2009-05-24 | 2013-07-09 | Oem Group, Inc. | Sputter deposition of cermet resistor films with low temperature coefficient of resistance |
US10472274B2 (en) | 2017-07-17 | 2019-11-12 | Guardian Europe S.A.R.L. | Coated article having ceramic paint modified surface(s), and/or associated methods |
CN110903153B (zh) * | 2019-12-17 | 2024-02-06 | 胡滨 | 高可塑性含能构造 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1107514A (fr) * | 1953-06-05 | 1956-01-03 | Procédé de traitement des surfaces métalliques et ses applications | |
DE1225939B (de) * | 1963-11-16 | 1966-09-29 | Leybold Hochvakuum Anlagen | Verfahren zur Herstellung einer aus mehreren Lagen zusammengesetzten duennen Schicht durch Hochvakuumbedampfung |
FR1424767A (fr) * | 1964-03-17 | 1966-01-14 | Gen Precision Inc | Appareil de bombardement ionique et de dépôt sous vide |
US3615881A (en) * | 1968-10-15 | 1971-10-26 | Air Reduction | Method of forming flux pinning sites in a superconducting material by bombardment with an ion beam and the products thereof |
US3856647A (en) * | 1973-05-15 | 1974-12-24 | Ibm | Multi-layer control or stress in thin films |
GB1486265A (en) * | 1973-10-17 | 1977-09-21 | Hitachi Ltd | Method for producing an amorphous state of a solid material |
-
1979
- 1979-10-16 AU AU51820/79A patent/AU532935B2/en not_active Ceased
- 1979-11-02 DE DE7979302415T patent/DE2966835D1/de not_active Expired
- 1979-11-02 EP EP79302415A patent/EP0010971B1/en not_active Expired
- 1979-11-02 ES ES485671A patent/ES485671A1/es not_active Expired
- 1979-11-02 CA CA339,025A patent/CA1124957A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AU532935B2 (en) | 1983-10-20 |
DE2966835D1 (en) | 1984-04-26 |
AU5182079A (en) | 1980-05-08 |
EP0010971A3 (en) | 1980-05-28 |
CA1124957A (en) | 1982-06-08 |
EP0010971B1 (en) | 1984-03-21 |
EP0010971A2 (en) | 1980-05-14 |
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