ES364223A1 - A Method of Melting a Rod of Crystalline Material Zone-by-Zone - Google Patents
A Method of Melting a Rod of Crystalline Material Zone-by-ZoneInfo
- Publication number
- ES364223A1 ES364223A1 ES364223A ES364223A ES364223A1 ES 364223 A1 ES364223 A1 ES 364223A1 ES 364223 A ES364223 A ES 364223A ES 364223 A ES364223 A ES 364223A ES 364223 A1 ES364223 A1 ES 364223A1
- Authority
- ES
- Spain
- Prior art keywords
- zone
- hydrogen
- rod
- melting
- partial pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The zone-melting of a rod 6 of silicon in a chamber 1 using an induction coil 10 is carried out in an atmosphere comprising highly purified hydrogen fed at subatmospheric pressure from a cylinder 13. The hydrogen may be at least 99.9% pure. It may be admixed with hydrogen phosphide or boron hydride (as dopant) or argon, helium or nitrogen (as protective gas). The partial pressure of the protective gas is preferably more than twice the partial pressure of the hydrogen, except that the partial pressure of nitrogen is preferably not more than 100 mm of Hg. The total gas pressure may be 30-600 mm of Hg. The rod may be first zone-melted in a high vacuum and then in pure hydrogen.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH298568A CH466237A (en) | 1968-02-29 | 1968-02-29 | Method and device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod |
| CH804368 | 1968-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES364223A1 true ES364223A1 (en) | 1971-02-16 |
Family
ID=25691891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES364223A Expired ES364223A1 (en) | 1968-02-29 | 1969-02-28 | A Method of Melting a Rod of Crystalline Material Zone-by-Zone |
Country Status (8)
| Country | Link |
|---|---|
| AT (1) | AT300040B (en) |
| BE (1) | BE728975A (en) |
| DE (1) | DE1808618C3 (en) |
| DK (1) | DK125743B (en) |
| ES (1) | ES364223A1 (en) |
| FR (1) | FR2002885A1 (en) |
| GB (1) | GB1167490A (en) |
| NL (1) | NL6902524A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2579953A (en) * | 1951-02-13 | 1951-12-25 | Naomi M Morris | Adjustable shoe gripper |
-
1968
- 1968-11-13 DE DE19681808618 patent/DE1808618C3/en not_active Expired
-
1969
- 1969-01-28 AT AT83269A patent/AT300040B/en not_active IP Right Cessation
- 1969-02-07 DK DK65569A patent/DK125743B/en unknown
- 1969-02-18 NL NL6902524A patent/NL6902524A/xx unknown
- 1969-02-26 FR FR6905044A patent/FR2002885A1/fr not_active Withdrawn
- 1969-02-26 BE BE728975D patent/BE728975A/xx unknown
- 1969-02-28 ES ES364223A patent/ES364223A1/en not_active Expired
- 1969-02-28 GB GB1098369A patent/GB1167490A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DK125743B (en) | 1973-04-30 |
| DE1808618B2 (en) | 1974-03-21 |
| AT300040B (en) | 1972-07-10 |
| GB1167490A (en) | 1969-10-15 |
| DE1808618A1 (en) | 1969-09-04 |
| DE1808618C3 (en) | 1974-10-17 |
| NL6902524A (en) | 1969-09-02 |
| FR2002885A1 (en) | 1969-10-31 |
| BE728975A (en) | 1969-08-26 |
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