GB1295409A - - Google Patents

Info

Publication number
GB1295409A
GB1295409A GB1295409DA GB1295409A GB 1295409 A GB1295409 A GB 1295409A GB 1295409D A GB1295409D A GB 1295409DA GB 1295409 A GB1295409 A GB 1295409A
Authority
GB
United Kingdom
Prior art keywords
zone
hydrogen
melting
melting stage
zonemelting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1295409A publication Critical patent/GB1295409A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)

Abstract

1295409 Zone-melting SIEMENS AG 19 April 1971 [13 March 1970] 23684/71 Heading BIS In the production of a silicon mono-crystal rod, which was initially formed by deposition from the gaseous phase, by a floating zonemelting process, the use of high vacuum equipment is avoided, by carrying out the preliminary zone-melting stage in an atmosphere of pure hydrogen at sub-atmospheric pressure. Preferably, the molten zone is passed at least once, with the hydrogen at 100 mm/Hg. In the final zone-melting stage the hydrogen is replaced by another protective gas, such as argon at 1.05 Atms.
GB1295409D 1970-03-13 1971-04-19 Expired GB1295409A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702012086 DE2012086C3 (en) 1970-03-13 1970-03-13 Process for the production of dislocation-free, thick silicon single crystal rods

Publications (1)

Publication Number Publication Date
GB1295409A true GB1295409A (en) 1972-11-08

Family

ID=5765043

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1295409D Expired GB1295409A (en) 1970-03-13 1971-04-19

Country Status (5)

Country Link
DE (1) DE2012086C3 (en)
DK (1) DK124800B (en)
FR (1) FR2084557A5 (en)
GB (1) GB1295409A (en)
NL (1) NL7103203A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11278980A (en) * 1998-03-25 1999-10-12 Murata Mfg Co Ltd Growth of single crystal

Also Published As

Publication number Publication date
NL7103203A (en) 1971-09-15
DE2012086A1 (en) 1971-09-30
DE2012086C3 (en) 1974-05-16
DK124800B (en) 1972-11-27
DE2012086B2 (en) 1973-10-11
FR2084557A5 (en) 1971-12-17

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee