ES2610804T3 - Dispositivo de medición de la posición - Google Patents

Dispositivo de medición de la posición Download PDF

Info

Publication number
ES2610804T3
ES2610804T3 ES06012138.1T ES06012138T ES2610804T3 ES 2610804 T3 ES2610804 T3 ES 2610804T3 ES 06012138 T ES06012138 T ES 06012138T ES 2610804 T3 ES2610804 T3 ES 2610804T3
Authority
ES
Spain
Prior art keywords
action
pass
scanning unit
measurement
grating structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES06012138.1T
Other languages
English (en)
Spanish (es)
Inventor
Wolfgang Holzapfel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of ES2610804T3 publication Critical patent/ES2610804T3/es
Anticipated expiration legal-status Critical
Active legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
ES06012138.1T 2005-06-28 2006-06-13 Dispositivo de medición de la posición Active ES2610804T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005029917A DE102005029917A1 (de) 2005-06-28 2005-06-28 Positionsmesseinrichtung
DE102005029917 2005-06-28

Publications (1)

Publication Number Publication Date
ES2610804T3 true ES2610804T3 (es) 2017-05-03

Family

ID=37110275

Family Applications (1)

Application Number Title Priority Date Filing Date
ES06012138.1T Active ES2610804T3 (es) 2005-06-28 2006-06-13 Dispositivo de medición de la posición

Country Status (6)

Country Link
US (1) US7471397B2 (enExample)
EP (1) EP1739395B1 (enExample)
JP (1) JP5005969B2 (enExample)
CN (1) CN100554868C (enExample)
DE (1) DE102005029917A1 (enExample)
ES (1) ES2610804T3 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102006042743A1 (de) 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
DE102008008873A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102008007319A1 (de) 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US7864336B2 (en) * 2008-04-28 2011-01-04 Agilent Technologies, Inc. Compact Littrow encoder
JP5500075B2 (ja) * 2008-10-23 2014-05-21 株式会社ニコン エンコーダ
EP3006902B1 (en) 2010-03-30 2018-04-11 Zygo Corporation Lithography method and lithography system
DE102010029211A1 (de) 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
NL2006743A (en) * 2010-06-09 2011-12-12 Asml Netherlands Bv Position sensor and lithographic apparatus.
DE102011081879A1 (de) * 2010-11-03 2012-05-03 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung
DE102010043469A1 (de) * 2010-11-05 2012-05-10 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011082156A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
WO2012106246A2 (en) 2011-02-01 2012-08-09 Zygo Corporation Interferometric heterodyne optical encoder system
DE102011005937B4 (de) * 2011-03-23 2020-10-22 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
DE102011076178B4 (de) 2011-05-20 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
KR102020076B1 (ko) * 2011-09-06 2019-09-09 가부시키가이샤 니콘 고 콘트라스트 인코더 헤드
WO2013070957A1 (en) 2011-11-09 2013-05-16 Zygo Corporation Compact encoder head for interferometric encoder system
TWI476376B (zh) 2011-11-09 2015-03-11 Zygo Corp 雙程干涉式編碼器系統
DE102012204572A1 (de) * 2012-03-22 2013-09-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
TWI516746B (zh) 2012-04-20 2016-01-11 賽格股份有限公司 在干涉編碼系統中執行非諧循環錯誤補償的方法、裝置及計算機程式產品，以及微影系統
DE102012210309A1 (de) * 2012-06-19 2013-12-19 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102013222383A1 (de) * 2013-02-06 2014-08-07 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102013211758A1 (de) * 2013-06-21 2014-12-24 Dr. Johannes Heidenhain Gmbh Interferometer
DE102013220190B4 (de) * 2013-10-07 2021-08-12 Dr. Johannes Heidenhain Gmbh Messteilung und lichtelektrische Positionsmesseinrichtung mit dieser Messteilung
TWI627379B (zh) 2013-10-07 2018-06-21 德商強那斯海登翰博士有限公司 光學位置測量裝置
JP6593868B2 (ja) * 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
CN106813578B (zh) * 2015-11-30 2019-02-22 上海微电子装备（集团）股份有限公司 一种二维光栅测量系统
DE102016200847A1 (de) * 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
JP2018066629A (ja) * 2016-10-19 2018-04-26 太陽誘電株式会社 ロードセル
JP6957088B2 (ja) * 2017-04-19 2021-11-02 株式会社ミツトヨ 光学式エンコーダ
US10648838B2 (en) 2017-06-29 2020-05-12 Mitutoyo Corporation Contamination and defect resistant rotary optical encoder configuration including a rotary scale with yawed scale grating bars and structured illumination generating arrangement with a beam deflector configuration
CN114322817A (zh) * 2022-01-21 2022-04-12 东莞创视自动化科技有限公司 可变光栅组合模组及检测方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02504553A (ja) * 1987-12-15 1990-12-20 レニショウ パブリック リミテッド カンパニー 光電スケール読取装置
DE3905730C2 (de) 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
US5079418A (en) * 1990-02-20 1992-01-07 Dr. Johannes Heidenhain Gmbh Position measuring apparatus with reflection
JP3478567B2 (ja) * 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
DE19748802B4 (de) * 1996-11-20 2010-09-09 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
CN1248058C (zh) * 2000-09-14 2006-03-29 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN1253699C (zh) 2002-03-18 2006-04-26 株式会社三丰 对偏移具有低灵敏度的光学位移传感装置
US20030174343A1 (en) * 2002-03-18 2003-09-18 Mitutoyo Corporation Optical displacement sensing device with reduced sensitivity to misalignment
JP4722474B2 (ja) * 2004-12-24 2011-07-13 株式会社ミツトヨ 変位検出装置
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device

Also Published As

Publication number Publication date
DE102005029917A1 (de) 2007-01-04
US7471397B2 (en) 2008-12-30
JP5005969B2 (ja) 2012-08-22
EP1739395A3 (de) 2015-03-25
US20070013920A1 (en) 2007-01-18
CN100554868C (zh) 2009-10-28
EP1739395A2 (de) 2007-01-03
EP1739395B1 (de) 2016-12-14
JP2007010659A (ja) 2007-01-18
CN1892173A (zh) 2007-01-10

Similar Documents

Publication Publication Date Title
JP5127249B2 (ja) Ｘ線装置の焦点‐検出器装置のｘ線光学透過格子
CN104244828B (zh) X射线设备
ATE487109T1 (de) Positionsmesseinrichtung
JP2007010659A5 (enExample)
JP2020516900A5 (enExample)
Xie et al. Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves
JP2019523871A (ja) Ｘ線顕微鏡検査のための方法および装置
JP2011122946A5 (enExample)
RU2014134452A (ru) Мультинаправленная фазоконтрастная рентгеновская визуализация
JP2017053803A (ja) Ｘ線小角光学系装置
ES2959394T3 (es) Formación de imágenes de rayos X de apertura codificada
KR20080041671A (ko) 위상 마스크의 간섭 측정장치 및 방법
ES2693902T3 (es) Dispositivo óptico de medición de posición
JP6054578B2 (ja) 差動位相コントラストイメージング装置のｘ線管のためのアノード
ES2685679T3 (es) Dispositivo óptico de medición de la posición
Spiga et al. An expanded x-ray beam facility (BEaTriX) to test the modular elements of the ATHENA optics
KR102214370B1 (ko) 조리개 및 타겟의 회전된 경계선
Sowa et al. Grid-enhanced X-ray coded aperture microscopy with polycapillary optics
WO2019034321A1 (en) Optical detector
CN103454068B (zh) 基于ccd探测的x射线组合折射透镜聚焦性能测试装置
ES2755835T3 (es) Dispositivo de medición de posición
Valdivia et al. Talbot-Lau x-ray deflectometer electron density diagnostic for laser and pulsed power high energy density plasma experiments
JP6705642B2 (ja) 光学式エンコーダのための照明部
JP2020512527A (ja) 格子ベースの位相コントラスト画像化
RU2005115322A (ru) Дифракционный лазерный центратор для рентгеновского излучателя