ES2171652T3 - Sensor de aceleracion. - Google Patents

Sensor de aceleracion.

Info

Publication number
ES2171652T3
ES2171652T3 ES96903875T ES96903875T ES2171652T3 ES 2171652 T3 ES2171652 T3 ES 2171652T3 ES 96903875 T ES96903875 T ES 96903875T ES 96903875 T ES96903875 T ES 96903875T ES 2171652 T3 ES2171652 T3 ES 2171652T3
Authority
ES
Spain
Prior art keywords
oscillating structure
acceleration sensor
suspended
coriolis
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96903875T
Other languages
English (en)
Inventor
Gero Guenther
Karsten Funk
Franz Laermer
Andrea Schilp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of ES2171652T3 publication Critical patent/ES2171652T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)

Abstract

EL SENSOR DE ACELERACION QUE PROPONE LA INVENCION, EN ESPECIAL UN SENSOR DE LA VELOCIDAD DE ROTACION DE CORIOLIS, POSEE UNA ESTRUCTURA OSCILANTE QUE SE HALLA SUSPENDIDA DE UN SUSTRATO (BASE) Y SE DESVIA POR EFECTO DE LA ACELERACION. ASIMISMO, EL SENSOR INCORPORA UNOS ELEMENTOS QUE GENERAN UN MOVIMIENTO PLANAR DE OSCILACION DE DICHA ESTRUCTURA, EN ESPECIAL UN MOVIMIENTO DE OSCILACION TORSIONAL, Y UNOS MEDIOS DE EVALUACION QUE DETECTAN CUALQUIER DESVIACION DE LA ESTRUCTURA OSCILANTE A CAUSA DE LA ACELERACION, EN ESPECIAL LA ACELERACION DE CORIOLIS. LA ESTRUCTURA OSCILANTE (12) ESTA SUSPENDIDA Y PUEDE GIRAR, LO QUE LE PERMITE REALIZAR UN MOVIMIENTO PLANAR DE OSCILACION, CON O SIN TORSION.
ES96903875T 1995-06-30 1996-02-17 Sensor de aceleracion. Expired - Lifetime ES2171652T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19523895A DE19523895A1 (de) 1995-06-30 1995-06-30 Beschleunigungssensor

Publications (1)

Publication Number Publication Date
ES2171652T3 true ES2171652T3 (es) 2002-09-16

Family

ID=7765702

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96903875T Expired - Lifetime ES2171652T3 (es) 1995-06-30 1996-02-17 Sensor de aceleracion.

Country Status (6)

Country Link
US (1) US6062082A (es)
EP (1) EP0835425B1 (es)
JP (1) JP4372839B2 (es)
DE (2) DE19523895A1 (es)
ES (1) ES2171652T3 (es)
WO (1) WO1997002467A1 (es)

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DE19648425C1 (de) * 1996-11-22 1998-01-02 Siemens Ag Drehratensensor
DE19719780B4 (de) * 1997-05-10 2006-09-07 Robert Bosch Gmbh Beschleunigungserfassungseinrichtung
DE19723333B4 (de) * 1997-06-04 2009-05-20 Robert Bosch Gmbh Drucksensor
JP3882973B2 (ja) * 1998-06-22 2007-02-21 アイシン精機株式会社 角速度センサ
DE19844686A1 (de) 1998-09-29 2000-04-06 Fraunhofer Ges Forschung Mikromechanischer Drehratensensor und Verfahren zur Herstellung
DE19850066B4 (de) * 1998-10-30 2008-05-21 Robert Bosch Gmbh Mikromechanischer Neigungssensor
JP3796991B2 (ja) 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
JP4126833B2 (ja) 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
DE19915257A1 (de) * 1999-04-03 2000-06-15 Bosch Gmbh Robert Drehratensensor
DE19937747C2 (de) * 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
DE69932516T2 (de) * 1999-09-10 2007-02-15 Stmicroelectronics S.R.L., Agrate Brianza Integrierter Halbleiter-Inertialsensor mit Mikroantrieb zur Kalibration
DE69938658D1 (de) * 1999-09-10 2008-06-19 St Microelectronics Srl Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
DE19945859A1 (de) * 1999-09-24 2001-03-29 Bosch Gmbh Robert Mikromechanischer Drehratensensor
WO2001025798A2 (en) * 1999-10-05 2001-04-12 L-3 Communications Corporation A method for improving the performance of micromachined devices
US6443008B1 (en) * 2000-02-19 2002-09-03 Robert Bosch Gmbh Decoupled multi-disk gyroscope
DE10040537B4 (de) * 2000-08-18 2004-05-13 Eads Deutschland Gmbh Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung
DE10107547A1 (de) * 2001-02-17 2002-08-29 Bosch Gmbh Robert Verfahren und Vorrichtung zur Synchronmodulation mehrfach modulierter Signale
JP2002296038A (ja) * 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
US6790699B2 (en) 2002-07-10 2004-09-14 Robert Bosch Gmbh Method for manufacturing a semiconductor device
US20050062362A1 (en) * 2003-08-28 2005-03-24 Hongyuan Yang Oscillatory gyroscope
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
DE102004015122A1 (de) * 2004-03-27 2005-10-13 Robert Bosch Gmbh Sensor mit integriertem Antriebs- und Detektionsmittel
US7640803B1 (en) * 2004-05-26 2010-01-05 Siimpel Corporation Micro-electromechanical system inertial sensor
FI116544B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102005008352B4 (de) * 2005-02-23 2007-10-11 Universität des Saarlandes Drehratensensor
US7442570B2 (en) 2005-03-18 2008-10-28 Invensence Inc. Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
EP1832841B1 (en) * 2006-03-10 2015-12-30 STMicroelectronics Srl Microelectromechanical integrated sensor structure with rotary driving motion
US20080021590A1 (en) * 2006-07-21 2008-01-24 Vanko John C Adaptive control scheme for detecting and preventing torque conditions in a power tool
DE102007017209B4 (de) 2007-04-05 2014-02-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanischer Inertialsensor zur Messung von Drehraten
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
US8042394B2 (en) 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with rotary driving motion
DE102007047592B4 (de) 2007-10-05 2022-01-05 Robert Bosch Gmbh Beschleunigungssensor
JP5147491B2 (ja) * 2008-03-28 2013-02-20 ラピスセミコンダクタ株式会社 加速度センサ装置
DE102008001863A1 (de) 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse
JP2010054263A (ja) * 2008-08-27 2010-03-11 Pioneer Electronic Corp 回転振動型ジャイロ
DE102008041757B4 (de) 2008-09-02 2019-01-03 Robert Bosch Gmbh Herstellungsverfahren für eine Rotationssensorvorrichtung und Rotationssensorvorrichtung
US8443665B2 (en) * 2008-10-21 2013-05-21 Ying W. Hsu Frequency modulated micro gyro
DE102009001856A1 (de) 2009-03-25 2010-09-30 Robert Bosch Gmbh Vorrichtung zum resonanten Antreiben eines mikromechanischen Systems
DE102010002657A1 (de) 2010-03-08 2011-09-08 Robert Bosch Gmbh Elektrodenanordnung für einen Drehratensensor, Drehratensensor und Verfahren zur Ermittlung einer Drehrate
JP2012008036A (ja) * 2010-06-25 2012-01-12 Panasonic Electric Works Co Ltd 静電容量式センサ
WO2012004825A1 (ja) * 2010-07-05 2012-01-12 パイオニア株式会社 回転振動型ジャイロ
US8513746B2 (en) 2010-10-15 2013-08-20 Rohm Co., Ltd. MEMS sensor and method for producing MEMS sensor, and MEMS package
GB201020722D0 (en) * 2010-12-07 2011-01-19 Atlantic Inertial Systems Ltd Accelerometer
EP2573516B1 (en) 2011-09-21 2013-11-20 Tronics Microsystems S.A. A micro-electromechanical gyro device
GB201205014D0 (en) * 2012-03-22 2012-05-09 Atlantic Inertial Systems Ltd Vibratory ring structure
TWI461693B (zh) * 2012-07-20 2014-11-21 Upi Semiconductor Corp 微機電感測裝置與其製造方法
CN105043370B (zh) 2014-04-29 2019-01-22 财团法人工业技术研究院 具有支点元件的微型电机装置
DE102016213870A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Verfahren zu dessen Herstellung
JP7024566B2 (ja) * 2018-04-06 2022-02-24 株式会社デンソー 振動型ジャイロスコープ
JP7474931B2 (ja) * 2019-01-08 2024-04-26 パナソニックＩｐマネジメント株式会社 検出装置
US11125560B2 (en) * 2019-07-30 2021-09-21 Invensense, Inc. Robust method for tuning of gyroscope demodulation phase
DE102019217505A1 (de) * 2019-11-05 2021-05-06 Robert Bosch Gmbh Inertialsensor mit einem eine Haupterstreckungsebene aufweisendem Substrat und einer über eine Federanordnung mit dem Substrat verbundenen seismischen Masse
CN114353776A (zh) * 2021-12-31 2022-04-15 瑞声开泰科技(武汉)有限公司 一种基于旋转模态的mems陀螺

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US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5329815A (en) * 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
US5377544A (en) * 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5450751A (en) * 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5806365A (en) * 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
DE19617666B4 (de) * 1996-05-03 2006-04-20 Robert Bosch Gmbh Mikromechanischer Drehratensensor

Also Published As

Publication number Publication date
EP0835425B1 (de) 2002-01-16
US6062082A (en) 2000-05-16
JP4372839B2 (ja) 2009-11-25
JPH11513111A (ja) 1999-11-09
DE59608599D1 (de) 2002-02-21
DE19523895A1 (de) 1997-01-02
WO1997002467A1 (de) 1997-01-23
EP0835425A1 (de) 1998-04-15

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