ES2142523T3 - Manipulador de pruebas de ic. - Google Patents
Manipulador de pruebas de ic.Info
- Publication number
- ES2142523T3 ES2142523T3 ES96110820T ES96110820T ES2142523T3 ES 2142523 T3 ES2142523 T3 ES 2142523T3 ES 96110820 T ES96110820 T ES 96110820T ES 96110820 T ES96110820 T ES 96110820T ES 2142523 T3 ES2142523 T3 ES 2142523T3
- Authority
- ES
- Spain
- Prior art keywords
- planetary
- rotation
- axis
- sun
- rotate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Manipulator (AREA)
- Other Air-Conditioning Systems (AREA)
Abstract
ESTA INVENCION SE RELACIONA CON UN MANIPULADOR DE PRUEBA DE IC CON UNA CAMARA DE TEMPERATURA CONSTANTE QUE COMPRENDE SEIS PORTADORES DE IC PLANETARIOS (71), UN MECANISMO DE MONTAJE DE LOS PORTADORES PLANETARIOS (72) Y UN MECANISMO DE ARRASTRE DE ROTACION PERMANENTE PARA ROTAR INTERMITENTEMENTE EL MECANISMO (72). CADA PORTADOR DE IC PLANETARIO TIENE CUATRO SUPERFICIES (S) DE ROTACION SIMETRICA CON RESPECTO A UN EJE (71A) DEL PLANETA, ACTUANDO LAS CUATRO SUPERFICIES (S) CONO UNAS PARTES DE SOPORTE DE IC. LOS PORTADORES DE IC PLANETARIOS ESTAN COLOCADOS EN UN SISTEMA ANULAR SOBRE EL MECANISMO DE MONTAJE DEL PORTADOR PLANETARIO (72) QUE PUEDE ROTAR ALREDEDOR DE UN EJE (72A) DE UN SOL. LOS SEIS PORTADORES DE IC DE LOS PLANETAS (71) PUEDEN DAR VUELTAS ALREDEDOR DEL EJE (72A) PARA EL SOL MIENTRAS QUE EL MECANISMO (72) DA SOLO UNA VUELTA. EL MECANISMO DE ARRASTRE DE ROTACION INTERMITENTE ROTA INTERMITENTEMENTE EL MECANISMO DE MONTAJE DE LOS PORTADORES DE PLANETAS (72) EN UN ANGULO DE 60 (GRADOS) DEFORMA QUE, CUANDO CADA PORTADOR DE IC PLANETARIO (71) DA UNA VUELTA EN DIRECCION DE LAS AGUJAS DEL RELOJ, ROTA 90 (GRADOS) SOBRE SU PROPIO EJE. CUANDO LA TRANSMISION DE ARRASTRE (73E) Y LA TRANSMISION SOLAR (73B) ROTAN, LAS TRANSMISIONES DE LOS SEIS PLANETAS (73D) DAN VUELTAS LENTAMENTE ALREDEDOR DEL EJE DEL SOL ACOMPAÑADAS POR LA ROTACION DE UNA PLACA DE ROTACION (73C) AL TIEMPO QUE ROTAN SOBRE SU PROPIO EJE EN DIRECCION DE LAS AGUJAS DEL RELOJ. DESPUES (24) DE LAS OPERACIONES INTERMITENTES, EL IC (4C) UNIDO A UNA PARTE PORTADORA DE IC (H) ES DEVUELTA A SU POSICION INICIAL. DURANTE ESTE PERIODO, LA TEMPERATURA DEL IC (4C) EN LA PARTE DEL SOPORTE DEL IC ES MANTENIDA CONSTANTE. POR ELLO, SE PUEDE AUMENTAR EL NUMERO DE IC PRECALENTADOS EN LA CAMARA DE TEMPERATURA CONSTANTE DE IC, SE PUEDE ALARGAR EL TIEMPO DE PERMANENCIA DEL PRECALENTAMIENTO, Y SE PUEDE MEJORAR EL ESPACIO EFICIENTE EN LA CAMARA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07335365A JP3138201B2 (ja) | 1995-12-22 | 1995-12-22 | Icテストハンドラ |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2142523T3 true ES2142523T3 (es) | 2000-04-16 |
Family
ID=18287723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES96110820T Expired - Lifetime ES2142523T3 (es) | 1995-12-22 | 1996-07-04 | Manipulador de pruebas de ic. |
Country Status (10)
Country | Link |
---|---|
US (1) | US5742158A (es) |
EP (1) | EP0780696B1 (es) |
JP (1) | JP3138201B2 (es) |
KR (1) | KR100287467B1 (es) |
CN (1) | CN1118707C (es) |
DE (1) | DE69605757T2 (es) |
ES (1) | ES2142523T3 (es) |
MY (1) | MY115397A (es) |
SG (1) | SG64938A1 (es) |
TW (1) | TW366425B (es) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6593761B1 (en) * | 1997-11-28 | 2003-07-15 | Kabushiki Kaisha Toshiba | Test handler for semiconductor device |
JP4090117B2 (ja) * | 1998-06-15 | 2008-05-28 | 株式会社アドバンテスト | Ic吸着装置およびこれを用いたic搬送装置並びにic試験装置 |
US6607071B1 (en) * | 1998-10-19 | 2003-08-19 | Mirae Corporation | Sealed test chamber for module IC handler |
KR100349217B1 (ko) | 1999-11-19 | 2002-08-14 | 미래산업 주식회사 | 모듈 아이씨 핸들러의 냉각 시스템 |
US6420864B1 (en) * | 2000-04-13 | 2002-07-16 | Nanophotonics Ag | Modular substrate measurement system |
WO2004106953A1 (ja) * | 2003-05-30 | 2004-12-09 | Advantest Corporation | 電子部品試験装置 |
JP5521232B2 (ja) * | 2011-12-19 | 2014-06-11 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 電子部品検査装置 |
CN103063961B (zh) * | 2012-12-28 | 2016-04-06 | 中国科学院微电子研究所 | 一种单粒子效应测试装置及系统 |
CN104624526B (zh) * | 2015-02-12 | 2017-05-03 | 邵阳学院 | 一种手机电池电压分级检测装置 |
CN106697916A (zh) * | 2016-12-05 | 2017-05-24 | 东莞市普华精密机械有限公司 | 一种ict自动供料设备 |
CN107511752B (zh) * | 2017-10-25 | 2024-03-15 | 安徽宝维智能科技有限公司 | 一种用于正多边形晶片研磨的游星轮 |
CN109654711B (zh) * | 2018-11-12 | 2020-09-15 | 武城县冠智信息产业技术有限公司 | 一种行星轮式出风口调风装置及调风方法 |
JP6719784B2 (ja) * | 2018-12-21 | 2020-07-08 | 株式会社 Synax | ハンドラ |
CN111878075B (zh) * | 2020-09-14 | 2022-02-11 | 西南石油大学 | 一种倾斜油藏气水协同注入分区采出程度的测试方法 |
WO2024069209A1 (en) * | 2022-09-28 | 2024-04-04 | Nomadd Desert Solar Solutions Limited Company | System and method of cycling testing of samples |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4546404A (en) * | 1983-05-23 | 1985-10-08 | Daymarc Corporation | Storage unit for an integrated circuit tester |
US4790921A (en) * | 1984-10-12 | 1988-12-13 | Hewlett-Packard Company | Planetary substrate carrier method and apparatus |
US5310039A (en) * | 1992-08-19 | 1994-05-10 | Intel Corporation | Apparatus for efficient transfer of electronic devices |
JP2641020B2 (ja) * | 1993-07-13 | 1997-08-13 | 株式会社しなのエレクトロニクス | 吸着挟持機構及びそれを用いた温度試験装置 |
US5445064A (en) * | 1994-12-01 | 1995-08-29 | Lopata; Ira L. | Skewer for rotiesserie |
US5598769A (en) * | 1995-04-26 | 1997-02-04 | Foodservice Equipment, Engineering & Consulting, Inc. | Cooking oven |
-
1995
- 1995-12-22 JP JP07335365A patent/JP3138201B2/ja not_active Expired - Fee Related
-
1996
- 1996-05-01 TW TW085105210A patent/TW366425B/zh not_active IP Right Cessation
- 1996-07-01 US US08/675,299 patent/US5742158A/en not_active Expired - Fee Related
- 1996-07-04 EP EP96110820A patent/EP0780696B1/en not_active Expired - Lifetime
- 1996-07-04 DE DE69605757T patent/DE69605757T2/de not_active Expired - Fee Related
- 1996-07-04 ES ES96110820T patent/ES2142523T3/es not_active Expired - Lifetime
- 1996-07-10 MY MYPI96002850A patent/MY115397A/en unknown
- 1996-07-15 SG SG1996010297A patent/SG64938A1/en unknown
- 1996-08-30 CN CN96111968A patent/CN1118707C/zh not_active Expired - Fee Related
- 1996-10-02 KR KR1019960043688A patent/KR100287467B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100287467B1 (ko) | 2001-04-16 |
DE69605757T2 (de) | 2000-05-31 |
JP3138201B2 (ja) | 2001-02-26 |
MY115397A (en) | 2003-05-31 |
KR970053280A (ko) | 1997-07-31 |
US5742158A (en) | 1998-04-21 |
EP0780696B1 (en) | 1999-12-22 |
CN1118707C (zh) | 2003-08-20 |
DE69605757D1 (de) | 2000-01-27 |
EP0780696A1 (en) | 1997-06-25 |
JPH09174478A (ja) | 1997-07-08 |
CN1153308A (zh) | 1997-07-02 |
TW366425B (en) | 1999-08-11 |
SG64938A1 (en) | 1999-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2142523T3 (es) | Manipulador de pruebas de ic. | |
ES2122858A1 (es) | Engranaje planetario asociable a un motor electrico formando una unidad constructiva. | |
ES2324493T3 (es) | Dispositivo portador de piezas de trabajo. | |
SE7713480L (sv) | Anordning vid planetvexlar | |
DE60208779D1 (de) | Antriebsanordnung für ein schlupfgelenktes fahrzeug | |
ES2113270A1 (es) | Amortiguador de vibraciones de torsion con un engranaje planetario. | |
ES2498970T3 (es) | Unidad de transmisión por engranajes para turbina eólica con cojinete de rotor integrado | |
DE69903385T2 (de) | Synchronisierte Schaltvorrichtung für ein Verteilergetriebe | |
DK1674762T3 (da) | Geartransmissionsenhed med planetbase | |
DE60224020D1 (de) | Elektromotorantriebsachse mit integriertem untersetzungs- und differentialgetriebe | |
BR0108520B1 (pt) | dispositivo de transferência de recipientes que possui uma roda de guia com geometria variável. | |
AU6004498A (en) | A device for regulating the temperature of a container | |
ES2035971T3 (es) | Estacion completa de etiquetado de objetos. | |
ATE352734T1 (de) | Umlaufrädervorrichtung zur geschwindigkeitsreduzierung der motorausgangswelle | |
ATE47117T1 (de) | Vorrichtung zum aufnehmen, ueberfuehren und abgeben von flachen verpackungsgegenstaenden bei verpackungsmaschinen. | |
ES2114640T3 (es) | Mecanismo de bloqueo para un sistema de cojinetes, en especial para una camara de separacion de una centrifugadora. | |
SU1019148A1 (ru) | Шарова планетарна передача | |
KR100195403B1 (ko) | 4륜 구동 차량의 구동 장치 | |
SU1290024A1 (ru) | Многопоточна планетарна передача | |
US5806219A (en) | Display device | |
ES2239722T3 (es) | Modulo satelico de inercia con transmision progresiva automatica. | |
SU1289704A1 (ru) | Мотор-колесо транспортного средства | |
KR20050011147A (ko) | 태양계 완구 | |
ES2285810T3 (es) | Dispositivo motorizado mejorado para elegir automaticamente la parte visible del cielo. | |
SU665159A1 (ru) | Планетарна двухр дна коробка передач |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 780696 Country of ref document: ES |