ES2098240T3 - Metodo para la formacion de una sonda y aparato para el mismo. - Google Patents

Metodo para la formacion de una sonda y aparato para el mismo.

Info

Publication number
ES2098240T3
ES2098240T3 ES90123458T ES90123458T ES2098240T3 ES 2098240 T3 ES2098240 T3 ES 2098240T3 ES 90123458 T ES90123458 T ES 90123458T ES 90123458 T ES90123458 T ES 90123458T ES 2098240 T3 ES2098240 T3 ES 2098240T3
Authority
ES
Spain
Prior art keywords
probe
information
electrode
relative position
formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90123458T
Other languages
English (en)
Inventor
Toshimitsu Kawase
Akihiko Yamano
Hiroyasu Nose
Toshihiko Miyazaki
Takahiro Oguchi
Ryo Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP31746889A external-priority patent/JP2789244B2/ja
Priority claimed from JP17955790A external-priority patent/JP2802675B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of ES2098240T3 publication Critical patent/ES2098240T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1409—Heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

UNA SONDA PARA UTILIZARSE EN UN APARATO PARA LLEVAR A CABO LA LECTURA DE LA INFORMACION Y/O LA ENTRADA DE LA INFORMACION EN UN ELEMENTO TRANSPORTADOR DE INFORMACION COLOCANDO PROXIMAMENTE LA SONDA ADEMAS SE FORMA DE LA SIGUIENTE MANERA. SE COLOCA UN ELECTRODO EN UNA PARTE DE LA SONDA DONDE SE VA A FORMAR EL EXTREMO, SE DETECTA LA INFORMACION DE DISTANCIA ENTRE EL EXTREMO QUE FORMA PARTE DE LA SONDA Y EL ELECTRODO. LA POSICION RELATIVA DEL EXTREMO QUE FORMA PARTE DE LA SONDA CON RESPECTO AL ELECTRODO SE CONTROLA BASANDOSE EN EL RESULTADO DE DETECCION. SE APLICA UN VOLTAJE AL EXTREMO QUE FORMA PARTE DE LA SONDA A TRAVES DEL ELECTRODO BAJO EL CONTROL DE POSICION RELATIVA, POR LO QUE SE FORMA EL EXTREMO DE LA SONDA. ESTE METODO DE FORMACION DE SONDA PUEDE APLICARSE A UN APARATO DE LECTURA Y/O ENTRADA DE INFORMACION. REFORMANDO EL EXTREMO DE LA SONDA, PUEDE EVITARSE EL DETERIORO DE LA REALIZACION EN EL APARATO DEBIDO AL DAÑO DE LA SONDA PARA OBTENER ASI UNA REALIZACION MUY FIABLE.
ES90123458T 1989-12-08 1990-12-06 Metodo para la formacion de una sonda y aparato para el mismo. Expired - Lifetime ES2098240T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31746889A JP2789244B2 (ja) 1989-12-08 1989-12-08 微小プローブの形成方法
JP17955790A JP2802675B2 (ja) 1990-07-09 1990-07-09 プローブ形成方法及び装置

Publications (1)

Publication Number Publication Date
ES2098240T3 true ES2098240T3 (es) 1997-05-01

Family

ID=26499363

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90123458T Expired - Lifetime ES2098240T3 (es) 1989-12-08 1990-12-06 Metodo para la formacion de una sonda y aparato para el mismo.

Country Status (4)

Country Link
US (1) US5132533A (es)
EP (1) EP0431623B1 (es)
DE (1) DE69030239T2 (es)
ES (1) ES2098240T3 (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3053456B2 (ja) * 1990-08-31 2000-06-19 オリンパス光学工業株式会社 走査型プローブ顕微鏡用カンチレバー及びその作製方法
JP2761801B2 (ja) * 1990-10-04 1998-06-04 キヤノン株式会社 角度的位置関係検出方法及びこれを用いたエンコーダ
JP3109861B2 (ja) * 1991-06-12 2000-11-20 キヤノン株式会社 情報の記録及び／又は再生装置
ES2137167T3 (es) * 1991-07-17 1999-12-16 Canon Kk Aparato para la grabacion/reproduccion de informaciones, para la grabacion y/o reproduccion de informaciones sobre un soporte para grabacion de informaciones por medio de un electrodo sonda.
ATE175515T1 (de) * 1991-10-15 1999-01-15 Canon Kk Informationsverarbeitungsgerät mit spurausrichtungsmechanismus
JP3610108B2 (ja) * 1995-01-13 2005-01-12 キヤノン株式会社 情報処理装置
JP3417721B2 (ja) * 1995-04-04 2003-06-16 三菱電機株式会社 走査プローブ顕微鏡の使用方法
JPH0981977A (ja) * 1995-07-10 1997-03-28 Canon Inc 記録再生装置
JP3618896B2 (ja) * 1996-03-29 2005-02-09 キヤノン株式会社 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置
JP2000035396A (ja) 1998-07-16 2000-02-02 Canon Inc 微小突起を有するプローブ、及びその製造方法
WO2000070325A1 (en) * 1999-05-13 2000-11-23 Japan Science And Technology Corporation Scanning tunneling microscope, its probe, processing method for the probe and production method for fine structure
JP4346083B2 (ja) * 2004-07-02 2009-10-14 本田技研工業株式会社 走査型プローブ顕微鏡システム
FR2892560B1 (fr) * 2005-10-21 2008-06-27 Centre Nat Rech Scient Pointe, tete et dispositif de lecture/ecriture, et son utilisation, et procede de fabrication d'un tel dispositif
CN101049906B (zh) * 2007-05-09 2010-08-04 中山大学 一种制作纳米尖锥的方法
CN101769711B (zh) * 2010-01-26 2012-09-05 重庆理工大学 一种基于隧道效应的接触式纳米位移传感器
DE102015117354B4 (de) * 2015-10-12 2020-02-20 Multitest Elektronische Systeme Gmbh Kragarmkontaktfeder und Verfahren zur Herstellung einer Kragarmkontaktfeder

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
US4539089A (en) * 1984-06-29 1985-09-03 International Business Machines Corporation Method for depositing material with nanometer dimensions
JPS62209302A (ja) * 1986-03-10 1987-09-14 Shimadzu Corp 平行移動量検出装置
WO1988004470A1 (en) * 1986-12-07 1988-06-16 Lasarray Holding Ag Process and device for generating material structures of atomic dimensions
JPH0640001B2 (ja) * 1987-04-23 1994-05-25 日本電子株式会社 走査トンネル顕微鏡
JPS63265101A (ja) * 1987-04-23 1988-11-01 Jeol Ltd 走査トンネル顕微鏡
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
JPH02171601A (ja) * 1988-12-23 1990-07-03 Mitsubishi Electric Corp 走査型トンネル顕微鏡

Also Published As

Publication number Publication date
EP0431623B1 (en) 1997-03-19
US5132533A (en) 1992-07-21
EP0431623A3 (en) 1993-03-24
DE69030239D1 (de) 1997-04-24
DE69030239T2 (de) 1997-09-18
EP0431623A2 (en) 1991-06-12

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