ES2092277T3 - Sistema de limpieza con disolventes multiples. - Google Patents

Sistema de limpieza con disolventes multiples.

Info

Publication number
ES2092277T3
ES2092277T3 ES93900721T ES93900721T ES2092277T3 ES 2092277 T3 ES2092277 T3 ES 2092277T3 ES 93900721 T ES93900721 T ES 93900721T ES 93900721 T ES93900721 T ES 93900721T ES 2092277 T3 ES2092277 T3 ES 2092277T3
Authority
ES
Spain
Prior art keywords
solvent
cleaning
organic
organic solvent
cleaning system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93900721T
Other languages
English (en)
Other versions
ES2092277T5 (es
Inventor
David Nalewajek
Rajat Subhra Basu
David Paul Wilson
Der Puy Michael Van
Ellen Louise Swan
Peter Brian Logsdon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
AlliedSignal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25180450&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2092277(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by AlliedSignal Inc filed Critical AlliedSignal Inc
Publication of ES2092277T3 publication Critical patent/ES2092277T3/es
Application granted granted Critical
Publication of ES2092277T5 publication Critical patent/ES2092277T5/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K38/00Medicinal preparations containing peptides
    • A61K38/16Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/04Nitro compounds
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/095Sulfur, selenium, or tellurium compounds, e.g. thiols
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/16Amides, e.g. hydroxamic acids
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/185Acids; Anhydrides, halides or salts thereof, e.g. sulfur acids, imidic, hydrazonic or hydroximic acids
    • A61K31/19Carboxylic acids, e.g. valproic acid
    • A61K31/195Carboxylic acids, e.g. valproic acid having an amino group
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/21Esters, e.g. nitroglycerine, selenocyanates
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/28Compounds containing heavy metals
    • A61K31/295Iron group metal compounds
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/33Heterocyclic compounds
    • A61K31/395Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins
    • A61K31/40Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins having five-membered rings with one nitrogen as the only ring hetero atom, e.g. sulpiride, succinimide, tolmetin, buflomedil
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/33Heterocyclic compounds
    • A61K31/395Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins
    • A61K31/41Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins having five-membered rings with two or more ring hetero atoms, at least one of which being nitrogen, e.g. tetrazole
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61KPREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K31/00Medicinal preparations containing organic active ingredients
    • A61K31/33Heterocyclic compounds
    • A61K31/395Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins
    • A61K31/41Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins having five-membered rings with two or more ring hetero atoms, at least one of which being nitrogen, e.g. tetrazole
    • A61K31/42Oxazoles
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61PSPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P25/00Drugs for disorders of the nervous system
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61PSPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P43/00Drugs for specific purposes, not provided for in groups A61P1/00-A61P41/00
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61PSPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P7/00Drugs for disorders of the blood or the extracellular fluid
    • A61P7/02Antithrombotic agents; Anticoagulants; Platelet aggregation inhibitors
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61PSPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P9/00Drugs for disorders of the cardiovascular system
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61PSPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P9/00Drugs for disorders of the cardiovascular system
    • A61P9/10Drugs for disorders of the cardiovascular system for treating ischaemic or atherosclerotic diseases, e.g. antianginal drugs, coronary vasodilators, drugs for myocardial infarction, retinopathy, cerebrovascula insufficiency, renal arteriosclerosis
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61PSPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
    • A61P9/00Drugs for disorders of the cardiovascular system
    • A61P9/12Antihypertensives
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/024Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing hydrocarbons
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/26Cleaning or polishing of the conductive pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0756Uses of liquids, e.g. rinsing, coating, dissolving
    • H05K2203/0766Rinsing, e.g. after cleaning or polishing a conductive pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0783Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15Position of the PCB during processing
    • H05K2203/1518Vertically held PCB

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Pharmacology & Pharmacy (AREA)
  • Animal Behavior & Ethology (AREA)
  • Engineering & Computer Science (AREA)
  • Epidemiology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Cardiology (AREA)
  • Vascular Medicine (AREA)
  • Gastroenterology & Hepatology (AREA)
  • Hematology (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Diabetes (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Urology & Nephrology (AREA)
  • Immunology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Emergency Medicine (AREA)
  • Biomedical Technology (AREA)
  • Neurology (AREA)
  • Neurosurgery (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Detergent Compositions (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

UN PROCESO DE LIMPIEZA NO ACUOSO EMPLEA UN DISOLVENTE ORGANICO PARA ELIMINAR LAS MANCHAS POR LA CONTAMINACION SUPERFICIAL DE ARTICULOS CONTAMINADOS TALES COMO TARJETAS DE CIRCUITOS IMPRESOS QUE SE LIMPIAN POR INMERSION DENTRO DE UN COMPARTIMENTO DE PILETA DE UN TANQUE DE LIMPIEZA QUE CONTIENE EL DISOLVENTE LIMPIADOR ORGANICO. EL DISOLVENTE ORGANICO ES PREFERIBLEMENTE UN DISOLVENTE DE HIDROCARBURO. LOS ARTICULOS LIMPIOS ESTAN REVESTIDOS AHORA CON EL DISOLVENTE DE LIMPIEZA ORGANICO Y SE DISPONEN DESPUES EN UNA PILETA DE ENJUAGUE QUE CONTIENE UN DISOLVENTE DE ACLARADO BASADO EN FLUOROCARBUROS QUE TIENEN UNA AFINIDAD POR EL DISOLVENTE DE LIMPIEZA ORGANICO. EL DISOLVENTE ORGANICO SE ELIMINA ASI DE LOS ARTICULOS QUE DESPUES SE SECAN SIN RESTOS DE AGUA POR MEDIO DE UN PROCESO DISOLVENTE, DESENGRASANTE DE VAPOR DISOLVENTE CONVENCIONAL.
ES93900721T 1991-12-02 1992-11-30 Sistema de limpieza con disolventes multiples. Expired - Lifetime ES2092277T5 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80119991A 1991-12-02 1991-12-02
PCT/US1992/010291 WO1993011280A1 (en) 1991-12-02 1992-11-30 Multiple solvent cleaning system

Publications (2)

Publication Number Publication Date
ES2092277T3 true ES2092277T3 (es) 1996-11-16
ES2092277T5 ES2092277T5 (es) 2000-01-01

Family

ID=25180450

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93900721T Expired - Lifetime ES2092277T5 (es) 1991-12-02 1992-11-30 Sistema de limpieza con disolventes multiples.

Country Status (16)

Country Link
EP (1) EP0643780B2 (es)
JP (1) JP2680930B2 (es)
KR (1) KR100248175B1 (es)
CN (1) CN1037201C (es)
AU (1) AU664586B2 (es)
BR (1) BR9206847A (es)
CA (1) CA2123207A1 (es)
DE (1) DE69213965T3 (es)
ES (1) ES2092277T5 (es)
FI (1) FI100541B (es)
HK (1) HK1007172A1 (es)
MX (1) MX9206771A (es)
NO (1) NO942026D0 (es)
PL (1) PL169599B1 (es)
RU (1) RU94030729A (es)
WO (1) WO1993011280A1 (es)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696307A (en) * 1994-01-21 1997-12-09 Alliedsignal Inc. Hydrofluoroalkanes as cleaning and degreasing solvents
US6506459B2 (en) 1995-01-20 2003-01-14 3M Innovative Properties Company Coating compositions containing alkoxy substituted perfluoro compounds
US5925611A (en) 1995-01-20 1999-07-20 Minnesota Mining And Manufacturing Company Cleaning process and composition
US6548471B2 (en) 1995-01-20 2003-04-15 3M Innovative Properties Company Alkoxy-substituted perfluorocompounds
US5718293A (en) * 1995-01-20 1998-02-17 Minnesota Mining And Manufacturing Company Fire extinguishing process and composition
JP3783047B2 (ja) 1995-12-15 2006-06-07 スリーエム カンパニー クリーニング方法および組成物
US5938856A (en) * 1997-06-13 1999-08-17 International Business Machines Corporation Process of removing flux residue from microelectronic components
US6552090B1 (en) 1997-09-15 2003-04-22 3M Innovative Properties Company Perfluoroalkyl haloalkyl ethers and compositions and applications thereof
US6309561B1 (en) 1997-12-24 2001-10-30 3M Innovative Properties Company Liquid crystal compounds having a chiral fluorinated terminal portion
US6159917A (en) * 1998-12-16 2000-12-12 3M Innovative Properties Company Dry cleaning compositions containing hydrofluoroether
US6127430A (en) * 1998-12-16 2000-10-03 3M Innovative Properties Company Microemulsions containing water and hydrofluroethers
FR2819201B1 (fr) * 2001-01-09 2003-02-21 Atofina Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion
US6423673B1 (en) 2001-09-07 2002-07-23 3M Innovation Properties Company Azeotrope-like compositions and their use
JP4407636B2 (ja) * 2003-09-09 2010-02-03 日本ゼオン株式会社 洗浄剤組成物および洗浄方法
US10767143B2 (en) * 2014-03-06 2020-09-08 Sage Electrochromics, Inc. Particle removal from electrochromic films using non-aqueous fluids
JP5798211B1 (ja) * 2014-05-14 2015-10-21 株式会社カネコ化学 共沸しない洗浄剤組成物を用いた洗浄システム及び洗浄方法
RU2655525C2 (ru) * 2016-10-05 2018-05-28 Федеральное государственное бюджетное образовательное учреждение высшего образования "Волгоградский государственный медицинский университет" Министерства здравоохранения Российской Федерации ГБОУ ВПО ВолгГМУ МЗ РФ Неводный способ очистки для удаления поверхностных загрязнений с ортопедических конструкций
CN107946178A (zh) * 2017-11-22 2018-04-20 奕铭(大连)科技发展有限公司 一种半导体芯片的清洗方法
KR102211622B1 (ko) * 2018-07-11 2021-02-03 (주)아이솔루션 반도체 설비 세정용 와이퍼 및 이를 가진 세정 팩
CN109763133B (zh) * 2018-12-17 2022-01-04 上海利正卫星应用技术有限公司 一种镁合金防锈油用的除油剂及其制备方法
CN111330906B (zh) * 2020-04-13 2021-06-29 中国原子能科学研究院 清洗工艺
CN114449779B (zh) * 2020-10-30 2024-05-31 北京铁路信号有限公司 一种清洗装置
CN115537832A (zh) * 2022-08-31 2022-12-30 深圳市鑫承诺环保产业股份有限公司 一种用于清洗金属件表面的碳氢清洗剂及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1440438A (en) * 1972-09-07 1976-06-23 Ici Ltd Cleaning process
EP0350316B1 (en) * 1988-07-08 1997-05-02 Rhone-Poulenc Chimie Cleaning and drying of electronic assemblies
AU635362B2 (en) * 1989-12-07 1993-03-18 Daikin Industries, Ltd. Cleaning composition
US5104564A (en) * 1989-12-19 1992-04-14 E. I. Du Pont De Nemours And Company High-boiling hydrochlorofluorocarbon solvent blends
WO1991011269A1 (en) * 1990-01-24 1991-08-08 Motorola, Inc. A method for electrical assembly cleaning

Also Published As

Publication number Publication date
NO942026L (no) 1994-06-01
WO1993011280A1 (en) 1993-06-10
MX9206771A (es) 1993-06-01
AU3229293A (en) 1993-06-28
KR100248175B1 (ko) 2000-04-01
BR9206847A (pt) 1995-11-21
EP0643780B1 (en) 1996-09-18
DE69213965T3 (de) 2000-07-27
EP0643780A1 (en) 1995-03-22
DE69213965D1 (de) 1996-10-24
HK1007172A1 (en) 1999-04-01
FI942594A (fi) 1994-06-02
PL169599B1 (pl) 1996-08-30
CN1075988A (zh) 1993-09-08
JP2680930B2 (ja) 1997-11-19
JPH06510821A (ja) 1994-12-01
CA2123207A1 (en) 1993-06-10
ES2092277T5 (es) 2000-01-01
EP0643780B2 (en) 1999-09-01
FI942594A0 (fi) 1994-06-02
FI100541B (fi) 1997-12-31
AU664586B2 (en) 1995-11-23
NO942026D0 (no) 1994-06-01
DE69213965T2 (de) 1997-01-30
RU94030729A (ru) 1996-04-10
CN1037201C (zh) 1998-01-28

Similar Documents

Publication Publication Date Title
ES2092277T3 (es) Sistema de limpieza con disolventes multiples.
CN109092801B (zh) 一种蓝宝石晶片的清洗方法及其采用的设备
JP2723359B2 (ja) 洗浄方法および洗浄装置
US5073291A (en) Novel azeotrope-type solvent mixture of methanol and 1,4-dihydroperfluorobutane and process for cleaning electronic components with the aid of the same
WO1995005448A1 (fr) Composition de solvant de nettoyage et procede pour nettoyer ou secher un article
TW200633813A (en) CMP method, CMP apparatus, and manufacturing method of semiconductor device
ES2335362T3 (es) Metodo de limpieza y enjuagado.
GB9505055D0 (en) Cleaning process and apparatus
JP6246973B1 (ja) 被洗浄物の脱脂及び溶剤除去洗浄方法
KR100502532B1 (ko) 마이크로에멀젼을 사용한 유기 및/또는 무기 오염물의제거에 의한 고형 표면의 세정 방법
KR20060100365A (ko) 전자 기판의 플럭스 제거를 위한 불소화 탄화수소 및 2차부탄올 기재 조성물
JP5013562B2 (ja) 洗浄方法及び装置
JP2610552B2 (ja) 洗浄方法
EP0688860B1 (en) Process for producing clean article
JPH0342002A (ja) 物品の洗浄・水切り方法
JP2004525753A5 (es)
JP3246694B2 (ja) 物品の洗浄方法
JP2816928B2 (ja) 洗浄方法
Sanger et al. Study of Solvent and Aqueous Cleaning of Fluxes
TH13135A (th) ระบบทำความสะอาดด้วยตัวทำละลายพหุคูณ
TH13135EX (th) ระบบทำความสะอาดด้วยตัวทำละลายพหุคูณ
JP7126830B2 (ja) フッ素化液体の再生方法、及び該方法を用いる再生装置
RU93058652A (ru) Жидкие очищающие композиции, устройство очистки, способы удаления загрязнений с подложек
WO2002032592A1 (fr) Procede et appareil de nettoyage d'un article
KR0174532B1 (ko) 세정제용 푸르푸릴 알콜 혼합물

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 643780

Country of ref document: ES