ES2092277T3 - Sistema de limpieza con disolventes multiples. - Google Patents
Sistema de limpieza con disolventes multiples.Info
- Publication number
- ES2092277T3 ES2092277T3 ES93900721T ES93900721T ES2092277T3 ES 2092277 T3 ES2092277 T3 ES 2092277T3 ES 93900721 T ES93900721 T ES 93900721T ES 93900721 T ES93900721 T ES 93900721T ES 2092277 T3 ES2092277 T3 ES 2092277T3
- Authority
- ES
- Spain
- Prior art keywords
- solvent
- cleaning
- organic
- organic solvent
- cleaning system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K38/00—Medicinal preparations containing peptides
- A61K38/16—Peptides having more than 20 amino acids; Gastrins; Somatostatins; Melanotropins; Derivatives thereof
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/04—Nitro compounds
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/095—Sulfur, selenium, or tellurium compounds, e.g. thiols
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/16—Amides, e.g. hydroxamic acids
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/185—Acids; Anhydrides, halides or salts thereof, e.g. sulfur acids, imidic, hydrazonic or hydroximic acids
- A61K31/19—Carboxylic acids, e.g. valproic acid
- A61K31/195—Carboxylic acids, e.g. valproic acid having an amino group
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/21—Esters, e.g. nitroglycerine, selenocyanates
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/28—Compounds containing heavy metals
- A61K31/295—Iron group metal compounds
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/33—Heterocyclic compounds
- A61K31/395—Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins
- A61K31/40—Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins having five-membered rings with one nitrogen as the only ring hetero atom, e.g. sulpiride, succinimide, tolmetin, buflomedil
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/33—Heterocyclic compounds
- A61K31/395—Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins
- A61K31/41—Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins having five-membered rings with two or more ring hetero atoms, at least one of which being nitrogen, e.g. tetrazole
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
- A61K31/00—Medicinal preparations containing organic active ingredients
- A61K31/33—Heterocyclic compounds
- A61K31/395—Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins
- A61K31/41—Heterocyclic compounds having nitrogen as a ring hetero atom, e.g. guanethidine or rifamycins having five-membered rings with two or more ring hetero atoms, at least one of which being nitrogen, e.g. tetrazole
- A61K31/42—Oxazoles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- A61P25/00—Drugs for disorders of the nervous system
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- A61P43/00—Drugs for specific purposes, not provided for in groups A61P1/00-A61P41/00
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- A61P7/00—Drugs for disorders of the blood or the extracellular fluid
- A61P7/02—Antithrombotic agents; Anticoagulants; Platelet aggregation inhibitors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- A61P9/00—Drugs for disorders of the cardiovascular system
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- A61P9/00—Drugs for disorders of the cardiovascular system
- A61P9/10—Drugs for disorders of the cardiovascular system for treating ischaemic or atherosclerotic diseases, e.g. antianginal drugs, coronary vasodilators, drugs for myocardial infarction, retinopathy, cerebrovascula insufficiency, renal arteriosclerosis
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61P—SPECIFIC THERAPEUTIC ACTIVITY OF CHEMICAL COMPOUNDS OR MEDICINAL PREPARATIONS
- A61P9/00—Drugs for disorders of the cardiovascular system
- A61P9/12—Antihypertensives
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
- C23G5/024—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing hydrocarbons
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0756—Uses of liquids, e.g. rinsing, coating, dissolving
- H05K2203/0766—Rinsing, e.g. after cleaning or polishing a conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
- H05K2203/0783—Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/15—Position of the PCB during processing
- H05K2203/1518—Vertically held PCB
Landscapes
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Pharmacology & Pharmacy (AREA)
- Animal Behavior & Ethology (AREA)
- Engineering & Computer Science (AREA)
- Epidemiology (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Heart & Thoracic Surgery (AREA)
- Cardiology (AREA)
- Vascular Medicine (AREA)
- Gastroenterology & Hepatology (AREA)
- Hematology (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Diabetes (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Urology & Nephrology (AREA)
- Immunology (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Emergency Medicine (AREA)
- Biomedical Technology (AREA)
- Neurology (AREA)
- Neurosurgery (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
UN PROCESO DE LIMPIEZA NO ACUOSO EMPLEA UN DISOLVENTE ORGANICO PARA ELIMINAR LAS MANCHAS POR LA CONTAMINACION SUPERFICIAL DE ARTICULOS CONTAMINADOS TALES COMO TARJETAS DE CIRCUITOS IMPRESOS QUE SE LIMPIAN POR INMERSION DENTRO DE UN COMPARTIMENTO DE PILETA DE UN TANQUE DE LIMPIEZA QUE CONTIENE EL DISOLVENTE LIMPIADOR ORGANICO. EL DISOLVENTE ORGANICO ES PREFERIBLEMENTE UN DISOLVENTE DE HIDROCARBURO. LOS ARTICULOS LIMPIOS ESTAN REVESTIDOS AHORA CON EL DISOLVENTE DE LIMPIEZA ORGANICO Y SE DISPONEN DESPUES EN UNA PILETA DE ENJUAGUE QUE CONTIENE UN DISOLVENTE DE ACLARADO BASADO EN FLUOROCARBUROS QUE TIENEN UNA AFINIDAD POR EL DISOLVENTE DE LIMPIEZA ORGANICO. EL DISOLVENTE ORGANICO SE ELIMINA ASI DE LOS ARTICULOS QUE DESPUES SE SECAN SIN RESTOS DE AGUA POR MEDIO DE UN PROCESO DISOLVENTE, DESENGRASANTE DE VAPOR DISOLVENTE CONVENCIONAL.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80119991A | 1991-12-02 | 1991-12-02 | |
PCT/US1992/010291 WO1993011280A1 (en) | 1991-12-02 | 1992-11-30 | Multiple solvent cleaning system |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2092277T3 true ES2092277T3 (es) | 1996-11-16 |
ES2092277T5 ES2092277T5 (es) | 2000-01-01 |
Family
ID=25180450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES93900721T Expired - Lifetime ES2092277T5 (es) | 1991-12-02 | 1992-11-30 | Sistema de limpieza con disolventes multiples. |
Country Status (16)
Country | Link |
---|---|
EP (1) | EP0643780B2 (es) |
JP (1) | JP2680930B2 (es) |
KR (1) | KR100248175B1 (es) |
CN (1) | CN1037201C (es) |
AU (1) | AU664586B2 (es) |
BR (1) | BR9206847A (es) |
CA (1) | CA2123207A1 (es) |
DE (1) | DE69213965T3 (es) |
ES (1) | ES2092277T5 (es) |
FI (1) | FI100541B (es) |
HK (1) | HK1007172A1 (es) |
MX (1) | MX9206771A (es) |
NO (1) | NO942026D0 (es) |
PL (1) | PL169599B1 (es) |
RU (1) | RU94030729A (es) |
WO (1) | WO1993011280A1 (es) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5696307A (en) * | 1994-01-21 | 1997-12-09 | Alliedsignal Inc. | Hydrofluoroalkanes as cleaning and degreasing solvents |
US6506459B2 (en) | 1995-01-20 | 2003-01-14 | 3M Innovative Properties Company | Coating compositions containing alkoxy substituted perfluoro compounds |
US5925611A (en) | 1995-01-20 | 1999-07-20 | Minnesota Mining And Manufacturing Company | Cleaning process and composition |
US6548471B2 (en) | 1995-01-20 | 2003-04-15 | 3M Innovative Properties Company | Alkoxy-substituted perfluorocompounds |
US5718293A (en) * | 1995-01-20 | 1998-02-17 | Minnesota Mining And Manufacturing Company | Fire extinguishing process and composition |
JP3783047B2 (ja) | 1995-12-15 | 2006-06-07 | スリーエム カンパニー | クリーニング方法および組成物 |
US5938856A (en) * | 1997-06-13 | 1999-08-17 | International Business Machines Corporation | Process of removing flux residue from microelectronic components |
US6552090B1 (en) | 1997-09-15 | 2003-04-22 | 3M Innovative Properties Company | Perfluoroalkyl haloalkyl ethers and compositions and applications thereof |
US6309561B1 (en) | 1997-12-24 | 2001-10-30 | 3M Innovative Properties Company | Liquid crystal compounds having a chiral fluorinated terminal portion |
US6159917A (en) * | 1998-12-16 | 2000-12-12 | 3M Innovative Properties Company | Dry cleaning compositions containing hydrofluoroether |
US6127430A (en) * | 1998-12-16 | 2000-10-03 | 3M Innovative Properties Company | Microemulsions containing water and hydrofluroethers |
FR2819201B1 (fr) * | 2001-01-09 | 2003-02-21 | Atofina | Procede de nettoyage d'une surface solide par elimination de salissures organiques et/ou minerales au moyen d'une microemulsion |
US6423673B1 (en) | 2001-09-07 | 2002-07-23 | 3M Innovation Properties Company | Azeotrope-like compositions and their use |
JP4407636B2 (ja) * | 2003-09-09 | 2010-02-03 | 日本ゼオン株式会社 | 洗浄剤組成物および洗浄方法 |
US10767143B2 (en) * | 2014-03-06 | 2020-09-08 | Sage Electrochromics, Inc. | Particle removal from electrochromic films using non-aqueous fluids |
JP5798211B1 (ja) * | 2014-05-14 | 2015-10-21 | 株式会社カネコ化学 | 共沸しない洗浄剤組成物を用いた洗浄システム及び洗浄方法 |
RU2655525C2 (ru) * | 2016-10-05 | 2018-05-28 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Волгоградский государственный медицинский университет" Министерства здравоохранения Российской Федерации ГБОУ ВПО ВолгГМУ МЗ РФ | Неводный способ очистки для удаления поверхностных загрязнений с ортопедических конструкций |
CN107946178A (zh) * | 2017-11-22 | 2018-04-20 | 奕铭(大连)科技发展有限公司 | 一种半导体芯片的清洗方法 |
KR102211622B1 (ko) * | 2018-07-11 | 2021-02-03 | (주)아이솔루션 | 반도체 설비 세정용 와이퍼 및 이를 가진 세정 팩 |
CN109763133B (zh) * | 2018-12-17 | 2022-01-04 | 上海利正卫星应用技术有限公司 | 一种镁合金防锈油用的除油剂及其制备方法 |
CN111330906B (zh) * | 2020-04-13 | 2021-06-29 | 中国原子能科学研究院 | 清洗工艺 |
CN114449779B (zh) * | 2020-10-30 | 2024-05-31 | 北京铁路信号有限公司 | 一种清洗装置 |
CN115537832A (zh) * | 2022-08-31 | 2022-12-30 | 深圳市鑫承诺环保产业股份有限公司 | 一种用于清洗金属件表面的碳氢清洗剂及其制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1440438A (en) * | 1972-09-07 | 1976-06-23 | Ici Ltd | Cleaning process |
EP0350316B1 (en) * | 1988-07-08 | 1997-05-02 | Rhone-Poulenc Chimie | Cleaning and drying of electronic assemblies |
AU635362B2 (en) * | 1989-12-07 | 1993-03-18 | Daikin Industries, Ltd. | Cleaning composition |
US5104564A (en) * | 1989-12-19 | 1992-04-14 | E. I. Du Pont De Nemours And Company | High-boiling hydrochlorofluorocarbon solvent blends |
WO1991011269A1 (en) * | 1990-01-24 | 1991-08-08 | Motorola, Inc. | A method for electrical assembly cleaning |
-
1992
- 1992-11-25 MX MX9206771A patent/MX9206771A/es not_active IP Right Cessation
- 1992-11-30 WO PCT/US1992/010291 patent/WO1993011280A1/en active IP Right Grant
- 1992-11-30 PL PL92304039A patent/PL169599B1/pl unknown
- 1992-11-30 BR BR9206847A patent/BR9206847A/pt not_active IP Right Cessation
- 1992-11-30 KR KR1019940701864A patent/KR100248175B1/ko not_active IP Right Cessation
- 1992-11-30 CA CA002123207A patent/CA2123207A1/en not_active Abandoned
- 1992-11-30 DE DE69213965T patent/DE69213965T3/de not_active Expired - Fee Related
- 1992-11-30 JP JP5510280A patent/JP2680930B2/ja not_active Expired - Lifetime
- 1992-11-30 ES ES93900721T patent/ES2092277T5/es not_active Expired - Lifetime
- 1992-11-30 EP EP93900721A patent/EP0643780B2/en not_active Expired - Lifetime
- 1992-11-30 AU AU32292/93A patent/AU664586B2/en not_active Ceased
- 1992-11-30 RU RU94030729/02A patent/RU94030729A/ru unknown
- 1992-12-02 CN CN92114105A patent/CN1037201C/zh not_active Expired - Fee Related
-
1994
- 1994-06-01 NO NO942026A patent/NO942026D0/no unknown
- 1994-06-02 FI FI942594A patent/FI100541B/fi active
-
1998
- 1998-06-24 HK HK98106340A patent/HK1007172A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NO942026L (no) | 1994-06-01 |
WO1993011280A1 (en) | 1993-06-10 |
MX9206771A (es) | 1993-06-01 |
AU3229293A (en) | 1993-06-28 |
KR100248175B1 (ko) | 2000-04-01 |
BR9206847A (pt) | 1995-11-21 |
EP0643780B1 (en) | 1996-09-18 |
DE69213965T3 (de) | 2000-07-27 |
EP0643780A1 (en) | 1995-03-22 |
DE69213965D1 (de) | 1996-10-24 |
HK1007172A1 (en) | 1999-04-01 |
FI942594A (fi) | 1994-06-02 |
PL169599B1 (pl) | 1996-08-30 |
CN1075988A (zh) | 1993-09-08 |
JP2680930B2 (ja) | 1997-11-19 |
JPH06510821A (ja) | 1994-12-01 |
CA2123207A1 (en) | 1993-06-10 |
ES2092277T5 (es) | 2000-01-01 |
EP0643780B2 (en) | 1999-09-01 |
FI942594A0 (fi) | 1994-06-02 |
FI100541B (fi) | 1997-12-31 |
AU664586B2 (en) | 1995-11-23 |
NO942026D0 (no) | 1994-06-01 |
DE69213965T2 (de) | 1997-01-30 |
RU94030729A (ru) | 1996-04-10 |
CN1037201C (zh) | 1998-01-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2092277T3 (es) | Sistema de limpieza con disolventes multiples. | |
CN109092801B (zh) | 一种蓝宝石晶片的清洗方法及其采用的设备 | |
JP2723359B2 (ja) | 洗浄方法および洗浄装置 | |
US5073291A (en) | Novel azeotrope-type solvent mixture of methanol and 1,4-dihydroperfluorobutane and process for cleaning electronic components with the aid of the same | |
WO1995005448A1 (fr) | Composition de solvant de nettoyage et procede pour nettoyer ou secher un article | |
TW200633813A (en) | CMP method, CMP apparatus, and manufacturing method of semiconductor device | |
ES2335362T3 (es) | Metodo de limpieza y enjuagado. | |
GB9505055D0 (en) | Cleaning process and apparatus | |
JP6246973B1 (ja) | 被洗浄物の脱脂及び溶剤除去洗浄方法 | |
KR100502532B1 (ko) | 마이크로에멀젼을 사용한 유기 및/또는 무기 오염물의제거에 의한 고형 표면의 세정 방법 | |
KR20060100365A (ko) | 전자 기판의 플럭스 제거를 위한 불소화 탄화수소 및 2차부탄올 기재 조성물 | |
JP5013562B2 (ja) | 洗浄方法及び装置 | |
JP2610552B2 (ja) | 洗浄方法 | |
EP0688860B1 (en) | Process for producing clean article | |
JPH0342002A (ja) | 物品の洗浄・水切り方法 | |
JP2004525753A5 (es) | ||
JP3246694B2 (ja) | 物品の洗浄方法 | |
JP2816928B2 (ja) | 洗浄方法 | |
Sanger et al. | Study of Solvent and Aqueous Cleaning of Fluxes | |
TH13135A (th) | ระบบทำความสะอาดด้วยตัวทำละลายพหุคูณ | |
TH13135EX (th) | ระบบทำความสะอาดด้วยตัวทำละลายพหุคูณ | |
JP7126830B2 (ja) | フッ素化液体の再生方法、及び該方法を用いる再生装置 | |
RU93058652A (ru) | Жидкие очищающие композиции, устройство очистки, способы удаления загрязнений с подложек | |
WO2002032592A1 (fr) | Procede et appareil de nettoyage d'un article | |
KR0174532B1 (ko) | 세정제용 푸르푸릴 알콜 혼합물 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 643780 Country of ref document: ES |