ES2092016T3 - Metodo para pasivatizar la superficie interna de un reactor sujeto a coquizacion, mediante deposicion de un revestimiento ceramico, y metodo para pirolizar hidrocarburos. - Google Patents

Metodo para pasivatizar la superficie interna de un reactor sujeto a coquizacion, mediante deposicion de un revestimiento ceramico, y metodo para pirolizar hidrocarburos.

Info

Publication number
ES2092016T3
ES2092016T3 ES92203187T ES92203187T ES2092016T3 ES 2092016 T3 ES2092016 T3 ES 2092016T3 ES 92203187 T ES92203187 T ES 92203187T ES 92203187 T ES92203187 T ES 92203187T ES 2092016 T3 ES2092016 T3 ES 2092016T3
Authority
ES
Spain
Prior art keywords
passivate
coking
deposition
internal surface
ceramic coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92203187T
Other languages
English (en)
Inventor
Terence J Clark
Michael J Hanagan
Richard W Cruse
Veronika A Szalai
Stephen J Rohman
Robert M Mininni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Enichem SpA
Original Assignee
Enichem SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Enichem SpA filed Critical Enichem SpA
Application granted granted Critical
Publication of ES2092016T3 publication Critical patent/ES2092016T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32Carbides
    • C23C16/325Silicon carbide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006Controlling or regulating processes
    • B01J19/002Avoiding undesirable reactions or side-effects, e.g. avoiding explosions, or improving the yield by suppressing side-reactions
    • B01J19/0026Avoiding carbon deposits
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/02Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
    • C01B3/22Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by decomposition of gaseous or liquid organic compounds
    • C01B3/24Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by decomposition of gaseous or liquid organic compounds of hydrocarbons
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/455Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction
    • C04B41/4554Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction the coating or impregnating material being an organic or organo-metallic precursor of an inorganic material
    • CCHEMISTRY; METALLURGY
    • C10PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10GCRACKING HYDROCARBON OILS; PRODUCTION OF LIQUID HYDROCARBON MIXTURES, e.g. BY DESTRUCTIVE HYDROGENATION, OLIGOMERISATION, POLYMERISATION; RECOVERY OF HYDROCARBON OILS FROM OIL-SHALE, OIL-SAND, OR GASES; REFINING MIXTURES MAINLY CONSISTING OF HYDROCARBONS; REFORMING OF NAPHTHA; MINERAL WAXES
    • C10G9/00Thermal non-catalytic cracking, in the absence of hydrogen, of hydrocarbon oils
    • C10G9/14Thermal non-catalytic cracking, in the absence of hydrogen, of hydrocarbon oils in pipes or coils with or without auxiliary means, e.g. digesters, soaking drums, expansion means
    • C10G9/16Preventing or removing incrustation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • C23C16/345Silicon nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Ceramic Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Structural Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Production Of Liquid Hydrocarbon Mixture For Refining Petroleum (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

PARA REDUCIR LA VELOCIDAD DE FORMACION DE COQUE DURANTE LA PIROLISIS INDUSTRIAL DE HIDROCARBUROS, LA SUPERFICIE INTERNA DE LOS TUBOS DEL REACTOR SE REVISTEN CON UN CAPA FINA DE UN MATERIAL CERAMICO, ESTANDO DICHA CAPA DEPOSITADA POR DESCOMPOSICION TERMICA DE UN PRECUSOR ORGANOMETALICO DE SILICIO QUE NO CONTIENE OXIGENO EN LA FASE DE VAPOR, EN UNA ATMOSFERA DE GAS REDUCIDO O INERTE PARA MINIMIZAR LA FORMACION DE CERAMICAS DE OXIDO.
ES92203187T 1991-10-28 1992-10-17 Metodo para pasivatizar la superficie interna de un reactor sujeto a coquizacion, mediante deposicion de un revestimiento ceramico, y metodo para pirolizar hidrocarburos. Expired - Lifetime ES2092016T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/783,264 US5208069A (en) 1991-10-28 1991-10-28 Method for passivating the inner surface by deposition of a ceramic coating of an apparatus subject to coking, apparatus prepared thereby, and method of utilizing apparatus prepared thereby

Publications (1)

Publication Number Publication Date
ES2092016T3 true ES2092016T3 (es) 1996-11-16

Family

ID=25128685

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92203187T Expired - Lifetime ES2092016T3 (es) 1991-10-28 1992-10-17 Metodo para pasivatizar la superficie interna de un reactor sujeto a coquizacion, mediante deposicion de un revestimiento ceramico, y metodo para pirolizar hidrocarburos.

Country Status (8)

Country Link
US (1) US5208069A (es)
EP (1) EP0540084B1 (es)
AT (1) ATE142125T1 (es)
DE (1) DE69213387T2 (es)
DK (1) DK0540084T3 (es)
ES (1) ES2092016T3 (es)
GR (1) GR3021324T3 (es)
RU (1) RU2079569C1 (es)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SA05260056B1 (ar) 1991-03-08 2008-03-26 شيفرون فيليبس كيميكال كمبني ال بي جهاز لمعالجة الهيدروكربون hydrocarbon
US5413813A (en) * 1993-11-23 1995-05-09 Enichem S.P.A. CVD of silicon-based ceramic materials on internal surface of a reactor
US6274113B1 (en) 1994-01-04 2001-08-14 Chevron Phillips Chemical Company Lp Increasing production in hydrocarbon conversion processes
US6258256B1 (en) 1994-01-04 2001-07-10 Chevron Phillips Chemical Company Lp Cracking processes
DE4405884C1 (de) * 1994-02-21 1995-09-07 Mannesmann Ag Wärmeaustauschfläche in Reaktoren und/oder Wärmeaustauschern und Verfahren zur Herstellung einer katalytisch desaktivierten Metalloberfläche
US5424095A (en) * 1994-03-07 1995-06-13 Eniricerche S.P.A. Ceramic vapor deposited coating using a steam-containing carrier gas and non-alkoxy silane precursors
US5514350A (en) * 1994-04-22 1996-05-07 Rutgers, The State University Of New Jersey Apparatus for making nanostructured ceramic powders and whiskers
FR2721622B1 (fr) * 1994-06-24 1997-11-21 Inst Francais Du Petrole Méthode de passivation de pièces métalliques en super-alliage à base de nickel et de fer.
US6056870A (en) * 1994-08-25 2000-05-02 Reed; Larry E. Method of promoting the decomposition of silicon compounds in a process for depositing silicon upon a metal surface
US5565087A (en) * 1995-03-23 1996-10-15 Phillips Petroleum Company Method for providing a tube having coke formation and carbon monoxide inhibiting properties when used for the thermal cracking of hydrocarbons
US5807616A (en) * 1995-04-24 1998-09-15 Corning Incorporated Thermal cracking process and furnace elements
US6074713A (en) * 1995-04-24 2000-06-13 Corning Incorporated Preventing carbon deposits on metal
MX9700849A (es) * 1995-06-07 1997-08-30 Chevron Chem Co Utilizacion de corrientes de hidrocarburos para preparar una capa protectora metalica.
TW362118B (en) * 1995-10-30 1999-06-21 Dow Corning Method for depositing amorphous SiNC coatings
GB2306510B (en) * 1995-11-02 1999-06-23 Univ Surrey Modification of metal surfaces
CA2175439C (en) 1996-04-30 2001-09-04 Sabino Steven Anthony Petrone Surface alloyed high temperature alloys
US6503347B1 (en) 1996-04-30 2003-01-07 Surface Engineered Products Corporation Surface alloyed high temperature alloys
US6419986B1 (en) 1997-01-10 2002-07-16 Chevron Phillips Chemical Company Ip Method for removing reactive metal from a reactor system
DE69809735D1 (de) 1997-06-05 2003-01-09 Atf Resources Inc Verfahren und einrichtung zur entfernung und hemmung von koksanalge bei pyrolyse
US6287990B1 (en) 1998-02-11 2001-09-11 Applied Materials, Inc. CVD plasma assisted low dielectric constant films
US6054379A (en) * 1998-02-11 2000-04-25 Applied Materials, Inc. Method of depositing a low k dielectric with organo silane
US6660656B2 (en) 1998-02-11 2003-12-09 Applied Materials Inc. Plasma processes for depositing low dielectric constant films
US6303523B2 (en) * 1998-02-11 2001-10-16 Applied Materials, Inc. Plasma processes for depositing low dielectric constant films
US6159871A (en) * 1998-05-29 2000-12-12 Dow Corning Corporation Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
US6667553B2 (en) 1998-05-29 2003-12-23 Dow Corning Corporation H:SiOC coated substrates
US6316052B1 (en) 1998-08-19 2001-11-13 Anelva Corporation Method for the surface treatment of vacuum materials and surface treated vacuum
FR2784396B1 (fr) * 1998-10-09 2000-11-10 Commissariat Energie Atomique Revetements anti-cokage d'alliages refractaires utilises dans le domaine petrolier
US6358618B1 (en) 1999-09-22 2002-03-19 Corning Incorporated Protective coating on metal
FR2798939B1 (fr) * 1999-09-24 2001-11-09 Atofina Reduction du cokage dans les reacteurs de craquage
KR100619351B1 (ko) * 2000-07-26 2006-09-06 에스케이 주식회사 탄화수소 열분해 반응기 튜브 내벽에 코크 저감을 위한 코팅방법
US6461415B1 (en) * 2000-08-23 2002-10-08 Applied Thin Films, Inc. High temperature amorphous composition based on aluminum phosphate
US6709721B2 (en) 2001-03-28 2004-03-23 Applied Materials Inc. Purge heater design and process development for the improvement of low k film properties
US7678465B2 (en) 2002-07-24 2010-03-16 Applied Thin Films, Inc. Aluminum phosphate compounds, compositions, materials and related metal coatings
JP2005535554A (ja) * 2002-08-14 2005-11-24 アプライド シン フィルムズ,インコーポレイティッド リン酸アルミニウム化合物、組成物、材料及び関連複合体
KR20050110613A (ko) * 2002-12-23 2005-11-23 어플라이드 씬 필름스 인코포레이티드 알루미늄 포스페이트 코팅
RU2325425C2 (ru) * 2005-10-28 2008-05-27 Общество с ограниченной ответственностью научно-производственное предприятие "Химические композиционные материалы" (ООО НПП "Хикома") Способ пиролиза пропан-бутановой углеводородной смеси с повышенным выходом этилена и без образования кокса
US8017182B2 (en) * 2007-06-21 2011-09-13 Asm International N.V. Method for depositing thin films by mixed pulsed CVD and ALD
US7638170B2 (en) * 2007-06-21 2009-12-29 Asm International N.V. Low resistivity metal carbonitride thin film deposition by atomic layer deposition
US8057707B2 (en) * 2008-03-17 2011-11-15 Arkems Inc. Compositions to mitigate coke formation in steam cracking of hydrocarbons
US8163170B2 (en) * 2008-12-02 2012-04-24 Lummus Technology Inc. Coil for pyrolysis heater and method of cracking
RU2429310C2 (ru) * 2009-01-27 2011-09-20 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ защиты конструкционных деталей из металлов или их сплавов от расплава химически активного металла
KR101790206B1 (ko) 2010-10-05 2017-10-25 실코텍 코포레이션 내마모성 코팅, 물건 및 방법
RU2558812C1 (ru) * 2014-04-17 2015-08-10 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Сибирский Федеральный Университет" Способ получения покрытия из карбида кремния на кварцевом изделии
RU2606690C2 (ru) * 2015-07-13 2017-01-10 Закрытое акционерное общество Научно-инженерный центр "ИНКОМСИСТЕМ" Способ получения покрытия из аморфного кремния на внутренней поверхности металлического субстрата
WO2017040623A1 (en) 2015-09-01 2017-03-09 Silcotek Corp. Thermal chemical vapor deposition coating
US10087521B2 (en) * 2015-12-15 2018-10-02 Silcotek Corp. Silicon-nitride-containing thermal chemical vapor deposition coating
DE202017002044U1 (de) 2017-04-18 2017-05-09 Closed Joint Stock Company Research-Engineering Center "INCOMSYSTEM" Vorrichtung zur Passivierung der Oberfläche von Langrohren bei der induktiven Erwärmung
US11161324B2 (en) 2017-09-13 2021-11-02 Silcotek Corp. Corrosion-resistant coated article and thermal chemical vapor deposition coating process
CN113166928B (zh) * 2018-09-28 2024-01-30 康宁股份有限公司 用于无机颗粒的亚奥氏体转变温度沉积的方法及通过其生产的制品
WO2020252306A1 (en) 2019-06-14 2020-12-17 Silcotek Corp. Nano-wire growth
WO2021156748A1 (en) * 2020-02-06 2021-08-12 Sabic Global Technologies B.V. Systems and methods for steam cracking hydrocarbons
US12473635B2 (en) 2020-06-03 2025-11-18 Silcotek Corp. Dielectric article
CN114150293A (zh) * 2021-11-25 2022-03-08 四川大学 一种TiN与二氧化硅双层涂层的沉积方法及装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1234886A (en) * 1912-08-06 1917-07-31 Chemical Dev Company Process of making unsaturated hydrocarbons.
US2580002A (en) * 1949-12-24 1951-12-25 Standard Oil Dev Co Process for the production of ethylene
US3536776A (en) * 1967-08-24 1970-10-27 Mobil Oil Corp Hydrocarbon pyrolysis
US3796592A (en) * 1969-09-09 1974-03-12 Nasa Method and apparatus for stable silicon dioxide layers on silicon grown in silicon nitride ambient
DE1957952A1 (de) * 1969-11-18 1971-05-27 Siemens Ag Siliciumnitridbeschichtung an Quarzwaenden fuer Diffusions- und Oxydationsreaktoren
US3704333A (en) * 1970-08-20 1972-11-28 Continental Oil Co Thermal decomposition of organic compounds
US3781173A (en) * 1971-01-12 1973-12-25 J Napier Method for providing metallic carbide coatings on graphite
GB1483144A (en) * 1975-04-07 1977-08-17 British Petroleum Co Protective films
JPS5684789A (en) * 1979-12-13 1981-07-10 Toyo Eng Corp High-temperature treatment of hydrocarbon-containing material
US4371944A (en) * 1981-01-16 1983-02-01 Phillips Petroleum Company Ethylene process control
US4906442A (en) * 1982-09-30 1990-03-06 Stone & Webster Engineering Corporation Process and apparatus for the production of olefins from both heavy and light hydrocarbons
NL8401804A (nl) * 1984-06-06 1986-01-02 Pyrotec Nv Installatie voor het thermisch kraken van een koolwaterstofuitgangsmateriaal tot alkenen, kraakspiralen en buizenwarmtewisselaar ten gebruike in zo'n installatie en bekledingslak.
FR2584733B1 (fr) * 1985-07-12 1987-11-13 Inst Francais Du Petrole Procede ameliore de vapocraquage d'hydrocarbures
US4999228A (en) * 1988-05-06 1991-03-12 Shin-Etsu Chemical Co., Ltd. Silicon carbide diffusion tube for semi-conductor

Also Published As

Publication number Publication date
US5208069A (en) 1993-05-04
DE69213387D1 (de) 1996-10-10
DE69213387T2 (de) 1997-03-06
RU2079569C1 (ru) 1997-05-20
ATE142125T1 (de) 1996-09-15
EP0540084B1 (en) 1996-09-04
GR3021324T3 (en) 1997-01-31
EP0540084A1 (en) 1993-05-05
DK0540084T3 (da) 1996-12-09

Similar Documents

Publication Publication Date Title
ES2092016T3 (es) Metodo para pasivatizar la superficie interna de un reactor sujeto a coquizacion, mediante deposicion de un revestimiento ceramico, y metodo para pirolizar hidrocarburos.
RU92004436A (ru) Способ пассивации внутренней поверхности осаждением керамического покрытия на устройство, подвергаемое закоксовыванию, устройство, обработанное таким образом, и способ применения устройства
US5262199A (en) Coating porous materials with metal oxides and other ceramics by MOCVD
US4472476A (en) Composite silicon carbide/silicon nitride coatings for carbon-carbon materials
EP0671483B1 (en) Method for vapor deposition of a ceramic coating using a steam-containing carrier gas and non-alkoxy silane precursors
GB2087632B (en) Carbonaceous deposition reduction
GB1420483A (en) Carbon-coated articles and method of making same
US4487799A (en) Pyrolytic graphite pretreatment for carbon-carbon composites
IE71921B1 (en) Carbon-containing composite material part protected against oxidation and its production process
WO1994000870A2 (en) Chemical vapor deposition from single organometallic precursors
KR950703073A (ko) 결정성 질화규소의 저온 화학적 증기증착 방법(molybdenum enhanced lowtemperature deposition of crystalline silicon nitride)
CA2113366A1 (en) Coated articles and method for the prevention of fuel thermal degradation deposits
WO1994008076A1 (de) Heteroepitaktisch abgeschiedenes diamant
Liu et al. Reactions of trimethylaluminum and ammonia on alumina at 600 K—surface chemical aspects of AlN thin film growth
US4717693A (en) Process for producing beta silicon nitride fibers
NO921542L (no) Framgangsmaate for framstilling av syntetiske diamantsjiktpaa baerere
Bahlawane A high-temperature oxidation-resistant coating, for graphite, prepared by atmospheric pressure chemical vapor deposition
JP2684106B2 (ja) セラミックス被覆用黒鉛基材及びcvd炉用内部部品
GB1256110A (en) Fission product retaining fuel
JPH05105523A (ja) 熱分解窒化ほう素成形体の製造方法
GB2161151A (en) Composite SiC/Si3N4 coating for carbon-carbon materials
GB1168505A (en) Method of Coating Substrates with Firmly Adhering Layers of Pyrocarbons
KR900001544B1 (ko) 탄소-탄소 합성물질
US3484278A (en) Pyrolytic beryllia
RU2165903C1 (ru) Способ нанесения оптического покрытия и устройство для его осуществления

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 540084

Country of ref document: ES