ES2074115T3 - Pelicula fina dura y lubricante de carbono-hidrogeno-silico amorfo. - Google Patents

Pelicula fina dura y lubricante de carbono-hidrogeno-silico amorfo.

Info

Publication number
ES2074115T3
ES2074115T3 ES90125668T ES90125668T ES2074115T3 ES 2074115 T3 ES2074115 T3 ES 2074115T3 ES 90125668 T ES90125668 T ES 90125668T ES 90125668 T ES90125668 T ES 90125668T ES 2074115 T3 ES2074115 T3 ES 2074115T3
Authority
ES
Spain
Prior art keywords
carbon
hydrogen
amorphous
silic
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90125668T
Other languages
English (en)
Inventor
Tohru Arai
Kazuyuki Oguri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23776790A external-priority patent/JP2971928B2/ja
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Application granted granted Critical
Publication of ES2074115T3 publication Critical patent/ES2074115T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Lubricants (AREA)

Abstract

UNA FINA PELICULA, DURA Y LUBRICANTE DE SILICONA CARBONO HIDROGENA AMORFA Y EL PROCESO PARA SU FABRICACION. ESTA FINA PELICULA CONTIENE COMO PRINCIPALES COMPONENTES CARBONO E HIDROGENO, EL BALANCE CONTIENE MAYORMENTE MATERIAL DE BASE DE SILICONA, Y CARBONO EN FORMA DE DIAMANTE. EL CONTENIDO DE HIDROGENO ES DEL 30 AL 50 % POR ATOMICO, Y EL CONTENIDO DE CARBONO ES DEL 70 % O MAS POR ATOMICO, CON RESPECTO A LA COMPOSICION TOTAL EXCEPTO HIDROGENO. SE SUMINISTRAN TAMBIEN, UN MATERIAL METALICO DE BASE DE HIERRO QUE TIENE FORMADA AHI LA PELICULA DE SILICONA CARBONO HIDROGENA AMORFA Y EL PROCESO PARA SU FABRICACION. EL MATERIAL METALICO DE BASE DE HIERRO ES MUY DURO Y TIENE UN PEQUEÑO COEFICIENTE DE FRICCION.
ES90125668T 1989-12-28 1990-12-28 Pelicula fina dura y lubricante de carbono-hidrogeno-silico amorfo. Expired - Lifetime ES2074115T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP34086089 1989-12-28
JP34085889 1989-12-28
JP23776790A JP2971928B2 (ja) 1989-12-28 1990-09-07 潤滑性を有する硬質非晶質炭素―水素―珪素薄膜、表面に該薄膜を有する鉄系金属材料、およびその製造方法

Publications (1)

Publication Number Publication Date
ES2074115T3 true ES2074115T3 (es) 1995-09-01

Family

ID=27332504

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90125668T Expired - Lifetime ES2074115T3 (es) 1989-12-28 1990-12-28 Pelicula fina dura y lubricante de carbono-hidrogeno-silico amorfo.

Country Status (5)

Country Link
US (1) US5198285A (es)
EP (1) EP0435312B1 (es)
AU (1) AU631037B2 (es)
DE (1) DE69017631T2 (es)
ES (1) ES2074115T3 (es)

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EP0484699B1 (de) * 1990-11-05 1993-08-18 Detlev Dr. Repenning Reibpaarung und Verfahren zu ihrer Herstellung
JPH07109034B2 (ja) * 1991-04-08 1995-11-22 ワイケイケイ株式会社 硬質多層膜形成体およびその製造方法
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5728465A (en) * 1991-05-03 1998-03-17 Advanced Refractory Technologies, Inc. Diamond-like nanocomposite corrosion resistant coatings
US5786068A (en) * 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
US5718976A (en) * 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
FR2678955B1 (fr) * 1991-07-12 1994-04-15 Applications Couches Minces Substrat revetu d'une couche mince a base de carbone et de silicium, sa preparation et son utilisation.
US5707717A (en) * 1991-10-29 1998-01-13 Tdk Corporation Articles having diamond-like protective film
US5541003A (en) * 1991-10-31 1996-07-30 Tdk Corporation Articles having diamond-like protective thin film
US5827613A (en) * 1992-09-04 1998-10-27 Tdk Corporation Articles having diamond-like protective film and method of manufacturing the same
US6805941B1 (en) * 1992-11-19 2004-10-19 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US5309874A (en) * 1993-01-08 1994-05-10 Ford Motor Company Powertrain component with adherent amorphous or nanocrystalline ceramic coating system
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
JP2574934Y2 (ja) * 1993-03-02 1998-06-18 シチズン時計株式会社 編機用部品
US6001480A (en) * 1993-06-11 1999-12-14 Zexel Corporation Amorphous hard carbon film and mechanical parts coated therewith
KR0134942B1 (ko) * 1993-06-11 1998-06-15 이다가끼 유끼오 비정질 경질 탄소막 및 그 제조 방법
DE19544498C2 (de) * 1994-12-10 1997-10-30 Antec Angewandte Neue Technolo Verfahren zur plasmaunterstützten Abscheidung von dünnen Schichten
US5670213A (en) * 1995-03-14 1997-09-23 Hilite Industries, Inc. Process for increasing torque generated by a clutch
US5614477A (en) * 1995-09-07 1997-03-25 Kompan; Vladimir Anti-friction additive and method for using same
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5638251A (en) * 1995-10-03 1997-06-10 Advanced Refractory Technologies, Inc. Capacitive thin films using diamond-like nanocomposite materials
US5795648A (en) * 1995-10-03 1998-08-18 Advanced Refractory Technologies, Inc. Method for preserving precision edges using diamond-like nanocomposite film coatings
US5900289A (en) * 1995-11-29 1999-05-04 Antec Angewandte Neue Technologien Gmbh Method of producing a colorating coating
US6080470A (en) * 1996-06-17 2000-06-27 Dorfman; Benjamin F. Hard graphite-like material bonded by diamond-like framework
US5771873A (en) * 1997-04-21 1998-06-30 Ford Global Technologies, Inc. Carbonaceous deposit-resistant coating for engine components
US6013980A (en) 1997-05-09 2000-01-11 Advanced Refractory Technologies, Inc. Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
US6548173B2 (en) 1998-04-20 2003-04-15 Argonne National Laboratory Method of produce ultra-low friction carbon films
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
WO2000079020A1 (fr) * 1999-06-18 2000-12-28 Nissin Electric Co., Ltd. Film de carbone, procede de formation associe, article recouvert de ce film, et procede de preparation de cet article
EP2000560B1 (en) * 1999-07-08 2013-10-02 Sumitomo Electric Industries, Ltd Hard coating and coated member
US7291229B2 (en) * 2000-07-12 2007-11-06 Osaka Prefecture Method of surface treatment of titanium metal
JP4022048B2 (ja) * 2001-03-06 2007-12-12 株式会社神戸製鋼所 ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
EP1477577B1 (en) * 2001-09-04 2007-06-20 Kabushiki Kaisha Toyota Chuo Kenkyusho Aluminum alloy, cast article of aluminum alloy, and method for producing cast article of aluminum alloy
JP4304598B2 (ja) * 2001-09-27 2009-07-29 株式会社豊田中央研究所 高摩擦摺動部材
EP1870611B1 (en) * 2001-12-25 2009-09-30 Jtekt Corporation Coupling device
JP3961879B2 (ja) * 2002-05-24 2007-08-22 株式会社豊田中央研究所 摩擦クラッチ及び駆動力伝達装置
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US20040231843A1 (en) * 2003-05-22 2004-11-25 Simpson Nell A. A. Lubricant for use in a wellbore
US6974143B2 (en) * 2003-07-03 2005-12-13 Showa Corporation Hydraulic shock absorber for vehicle
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
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JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
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US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (en) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Transmission comprising low-friction sliding members and transmission oil therefor
JP4725085B2 (ja) * 2003-12-04 2011-07-13 株式会社豊田中央研究所 非晶質炭素、非晶質炭素被膜部材および非晶質炭素膜の成膜方法
JP4572688B2 (ja) * 2004-04-27 2010-11-04 株式会社豊田中央研究所 低摩擦摺動部材
EP2361882B9 (en) * 2006-05-22 2017-03-15 Kabushiki Kaisha Toyota Chuo Kenkyusho Conductive member provided with amorphous carbon film and fuel cell separator
JP5033432B2 (ja) * 2007-01-30 2012-09-26 株式会社豊田自動織機 摺動部品
DE102008025681A1 (de) * 2008-05-29 2009-12-10 Federal-Mogul Nürnberg GmbH Kolbenbolzen für einen Verbrennungsmotor
US20100326271A1 (en) 2009-06-25 2010-12-30 Omax Corporation Reciprocating pump and method for making a system with enhanced dynamic seal reliability
DE102009057444A1 (de) 2009-12-08 2011-06-09 Dürr Systems GmbH Lackieranlagenbauteil mit einer Oberflächenbeschichtung
DE102012219930A1 (de) * 2012-10-31 2014-04-30 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung
US10808688B1 (en) 2017-07-03 2020-10-20 Omax Corporation High pressure pumps having a check valve keeper and associated systems and methods
EP4127479A1 (en) 2020-03-30 2023-02-08 Hypertherm, Inc. Cylinder for a liquid jet pump with multi-functional interfacing longitudinal ends

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DE3246361A1 (de) * 1982-02-27 1983-09-08 Philips Patentverwaltung Gmbh, 2000 Hamburg Kohlenstoff enthaltende gleitschicht
JPS63162872A (ja) * 1986-12-25 1988-07-06 Nec Corp 硬質非晶質炭素膜
JPS63162871A (ja) * 1986-12-25 1988-07-06 Nec Corp 硬質非晶質炭素膜
JPH0672303B2 (ja) * 1987-05-29 1994-09-14 日本電気株式会社 硬質非晶質炭素膜

Also Published As

Publication number Publication date
US5198285A (en) 1993-03-30
DE69017631T2 (de) 1995-06-29
DE69017631D1 (de) 1995-04-13
AU631037B2 (en) 1992-11-12
EP0435312B1 (en) 1995-03-08
AU6846790A (en) 1991-07-04
EP0435312A1 (en) 1991-07-03

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