DE69017631T2 - Harte und schmierende dünne Schicht aus amorphem Kohlenstoff-Wasserstoff-Silizium, damit beschichtete Eisenbasis-Werkstoffe und Verfahren zu ihrer Herstellung. - Google Patents

Harte und schmierende dünne Schicht aus amorphem Kohlenstoff-Wasserstoff-Silizium, damit beschichtete Eisenbasis-Werkstoffe und Verfahren zu ihrer Herstellung.

Info

Publication number
DE69017631T2
DE69017631T2 DE1990617631 DE69017631T DE69017631T2 DE 69017631 T2 DE69017631 T2 DE 69017631T2 DE 1990617631 DE1990617631 DE 1990617631 DE 69017631 T DE69017631 T DE 69017631T DE 69017631 T2 DE69017631 T2 DE 69017631T2
Authority
DE
Germany
Prior art keywords
iron
silicon
hydrogen
coated
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1990617631
Other languages
English (en)
Other versions
DE69017631D1 (de
Inventor
Tohru Arai
Kazuyuki Oguri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23776790A external-priority patent/JP2971928B2/ja
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Publication of DE69017631D1 publication Critical patent/DE69017631D1/de
Application granted granted Critical
Publication of DE69017631T2 publication Critical patent/DE69017631T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Lubricants (AREA)
DE1990617631 1989-12-28 1990-12-28 Harte und schmierende dünne Schicht aus amorphem Kohlenstoff-Wasserstoff-Silizium, damit beschichtete Eisenbasis-Werkstoffe und Verfahren zu ihrer Herstellung. Expired - Fee Related DE69017631T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP34086089 1989-12-28
JP34085889 1989-12-28
JP23776790A JP2971928B2 (ja) 1989-12-28 1990-09-07 潤滑性を有する硬質非晶質炭素―水素―珪素薄膜、表面に該薄膜を有する鉄系金属材料、およびその製造方法

Publications (2)

Publication Number Publication Date
DE69017631D1 DE69017631D1 (de) 1995-04-13
DE69017631T2 true DE69017631T2 (de) 1995-06-29

Family

ID=27332504

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1990617631 Expired - Fee Related DE69017631T2 (de) 1989-12-28 1990-12-28 Harte und schmierende dünne Schicht aus amorphem Kohlenstoff-Wasserstoff-Silizium, damit beschichtete Eisenbasis-Werkstoffe und Verfahren zu ihrer Herstellung.

Country Status (5)

Country Link
US (1) US5198285A (de)
EP (1) EP0435312B1 (de)
AU (1) AU631037B2 (de)
DE (1) DE69017631T2 (de)
ES (1) ES2074115T3 (de)

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EP0484699B1 (de) * 1990-11-05 1993-08-18 Detlev Dr. Repenning Reibpaarung und Verfahren zu ihrer Herstellung
JPH07109034B2 (ja) * 1991-04-08 1995-11-22 ワイケイケイ株式会社 硬質多層膜形成体およびその製造方法
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5728465A (en) * 1991-05-03 1998-03-17 Advanced Refractory Technologies, Inc. Diamond-like nanocomposite corrosion resistant coatings
US5786068A (en) * 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
US5718976A (en) * 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
FR2678955B1 (fr) * 1991-07-12 1994-04-15 Applications Couches Minces Substrat revetu d'une couche mince a base de carbone et de silicium, sa preparation et son utilisation.
US5707717A (en) * 1991-10-29 1998-01-13 Tdk Corporation Articles having diamond-like protective film
US5541003A (en) * 1991-10-31 1996-07-30 Tdk Corporation Articles having diamond-like protective thin film
US5827613A (en) * 1992-09-04 1998-10-27 Tdk Corporation Articles having diamond-like protective film and method of manufacturing the same
US6805941B1 (en) * 1992-11-19 2004-10-19 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US5309874A (en) * 1993-01-08 1994-05-10 Ford Motor Company Powertrain component with adherent amorphous or nanocrystalline ceramic coating system
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition
JP2574934Y2 (ja) * 1993-03-02 1998-06-18 シチズン時計株式会社 編機用部品
US6001480A (en) * 1993-06-11 1999-12-14 Zexel Corporation Amorphous hard carbon film and mechanical parts coated therewith
KR0134942B1 (ko) * 1993-06-11 1998-06-15 이다가끼 유끼오 비정질 경질 탄소막 및 그 제조 방법
DE19544498C2 (de) * 1994-12-10 1997-10-30 Antec Angewandte Neue Technolo Verfahren zur plasmaunterstützten Abscheidung von dünnen Schichten
US5670213A (en) * 1995-03-14 1997-09-23 Hilite Industries, Inc. Process for increasing torque generated by a clutch
US5614477A (en) * 1995-09-07 1997-03-25 Kompan; Vladimir Anti-friction additive and method for using same
US5638251A (en) * 1995-10-03 1997-06-10 Advanced Refractory Technologies, Inc. Capacitive thin films using diamond-like nanocomposite materials
US5795648A (en) * 1995-10-03 1998-08-18 Advanced Refractory Technologies, Inc. Method for preserving precision edges using diamond-like nanocomposite film coatings
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5900289A (en) * 1995-11-29 1999-05-04 Antec Angewandte Neue Technologien Gmbh Method of producing a colorating coating
US6080470A (en) * 1996-06-17 2000-06-27 Dorfman; Benjamin F. Hard graphite-like material bonded by diamond-like framework
US5771873A (en) * 1997-04-21 1998-06-30 Ford Global Technologies, Inc. Carbonaceous deposit-resistant coating for engine components
US6013980A (en) 1997-05-09 2000-01-11 Advanced Refractory Technologies, Inc. Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
US6548173B2 (en) 1998-04-20 2003-04-15 Argonne National Laboratory Method of produce ultra-low friction carbon films
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
WO2000079020A1 (fr) * 1999-06-18 2000-12-28 Nissin Electric Co., Ltd. Film de carbone, procede de formation associe, article recouvert de ce film, et procede de preparation de cet article
DE60040365D1 (de) * 1999-07-08 2008-11-13 Sumitomo Electric Industries Harte Beschichtung und beschichtetes Bauteil
US7291229B2 (en) * 2000-07-12 2007-11-06 Osaka Prefecture Method of surface treatment of titanium metal
JP4022048B2 (ja) * 2001-03-06 2007-12-12 株式会社神戸製鋼所 ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
JP4145242B2 (ja) * 2001-09-04 2008-09-03 株式会社豊田中央研究所 鋳物用アルミニウム合金、アルミニウム合金製鋳物およびアルミニウム合金製鋳物の製造方法
US7537835B2 (en) * 2001-09-27 2009-05-26 Kabushiki Kaisha Toyota Chuo Kenkyusho High friction sliding member
EP1870611B1 (de) * 2001-12-25 2009-09-30 Jtekt Corporation Kopplungsvorrichtung
JP3961879B2 (ja) * 2002-05-24 2007-08-22 株式会社豊田中央研究所 摩擦クラッチ及び駆動力伝達装置
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US20040231843A1 (en) * 2003-05-22 2004-11-25 Simpson Nell A. A. Lubricant for use in a wellbore
US6974143B2 (en) * 2003-07-03 2005-12-13 Showa Corporation Hydraulic shock absorber for vehicle
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
US8206035B2 (en) 2003-08-06 2012-06-26 Nissan Motor Co., Ltd. Low-friction sliding mechanism, low-friction agent composition and method of friction reduction
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005090489A (ja) * 2003-08-11 2005-04-07 Nissan Motor Co Ltd 内燃機関用バルブリフター
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
JP4725085B2 (ja) * 2003-12-04 2011-07-13 株式会社豊田中央研究所 非晶質炭素、非晶質炭素被膜部材および非晶質炭素膜の成膜方法
JP4572688B2 (ja) * 2004-04-27 2010-11-04 株式会社豊田中央研究所 低摩擦摺動部材
EP2020400B1 (de) * 2006-05-22 2014-02-26 Kabushiki Kaisha Toyota Chuo Kenkyusho Amorpher kohlenstofffilm, verfahren zur bildung eines amorphen kohlenstofffilms, leitfähiges element, das mit einem amorphen kohlenstofffilm versehen ist, und brennstoffzellenseparator
JP5033432B2 (ja) * 2007-01-30 2012-09-26 株式会社豊田自動織機 摺動部品
DE102008025681A1 (de) * 2008-05-29 2009-12-10 Federal-Mogul Nürnberg GmbH Kolbenbolzen für einen Verbrennungsmotor
US20100326271A1 (en) 2009-06-25 2010-12-30 Omax Corporation Reciprocating pump and method for making a system with enhanced dynamic seal reliability
DE102009057444A1 (de) * 2009-12-08 2011-06-09 Dürr Systems GmbH Lackieranlagenbauteil mit einer Oberflächenbeschichtung
DE102012219930A1 (de) * 2012-10-31 2014-04-30 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung
US10808688B1 (en) 2017-07-03 2020-10-20 Omax Corporation High pressure pumps having a check valve keeper and associated systems and methods
KR20230005840A (ko) 2020-03-30 2023-01-10 하이퍼썸, 인크. 다기능 접속 종방향 단부들을 갖는 액체 제트 펌프를 위한 실린더

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DE3246361A1 (de) * 1982-02-27 1983-09-08 Philips Patentverwaltung Gmbh, 2000 Hamburg Kohlenstoff enthaltende gleitschicht
JPS63162872A (ja) * 1986-12-25 1988-07-06 Nec Corp 硬質非晶質炭素膜
JPS63162871A (ja) * 1986-12-25 1988-07-06 Nec Corp 硬質非晶質炭素膜
JPH0672303B2 (ja) * 1987-05-29 1994-09-14 日本電気株式会社 硬質非晶質炭素膜

Also Published As

Publication number Publication date
US5198285A (en) 1993-03-30
AU6846790A (en) 1991-07-04
AU631037B2 (en) 1992-11-12
EP0435312B1 (de) 1995-03-08
EP0435312A1 (de) 1991-07-03
ES2074115T3 (es) 1995-09-01
DE69017631D1 (de) 1995-04-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee