ES2070395T3 - Dispositivo para la creacion de un campo homogeneo de microondas. - Google Patents

Dispositivo para la creacion de un campo homogeneo de microondas.

Info

Publication number
ES2070395T3
ES2070395T3 ES91119433T ES91119433T ES2070395T3 ES 2070395 T3 ES2070395 T3 ES 2070395T3 ES 91119433 T ES91119433 T ES 91119433T ES 91119433 T ES91119433 T ES 91119433T ES 2070395 T3 ES2070395 T3 ES 2070395T3
Authority
ES
Spain
Prior art keywords
creation
microwave
homogeneous field
microwave homogeneous
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91119433T
Other languages
English (en)
Inventor
Michael Dr Geisler
Michael Dipl-Ing Jung
Bernhard Dipl-Ing Kessler
Fritz Dipl-Ing Leuterer
Max Dipl-Ing Munich
Rolf Dipl-Phys Wilhelm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of ES2070395T3 publication Critical patent/ES2070395T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/3222—Antennas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32247—Resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/08—Coupling devices of the waveguide type for linking dissimilar lines or devices

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

LA INVENCION TRATA DE UN DISPOSITIVO (1) PARA LA GENERACION DE UN CAMPO DEL MICROONDAS HOMOGENEO SOBRE UN RECORRIDO EXTENSO. ESTE DISPOSITIVO TIENE UN RESONADOR DE CAMARA HUECA (2), QUE SE PUEDE COLOCAR EN EL MICROONDAS. DE LAS ONDAS QUE SE FORMAN EN EL RESONADOR DE LA CAMARA DE VACIO SE ACOPLA DE FORMA INDUCTIVA O CAPACITIVA ENERGIA ELECTROMAGNETICA MEDIANTE UN ACOPLADOR ESPECIAL (21-28) EN LA CAMARA (3), DONDE SE ENCUENTRA EL PLASMA.
ES91119433T 1990-11-22 1991-11-14 Dispositivo para la creacion de un campo homogeneo de microondas. Expired - Lifetime ES2070395T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4037091A DE4037091C2 (de) 1990-11-22 1990-11-22 Vorrichtung für die Erzeugung eines homogenen Mikrowellenfeldes

Publications (1)

Publication Number Publication Date
ES2070395T3 true ES2070395T3 (es) 1995-06-01

Family

ID=6418687

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91119433T Expired - Lifetime ES2070395T3 (es) 1990-11-22 1991-11-14 Dispositivo para la creacion de un campo homogeneo de microondas.

Country Status (5)

Country Link
US (1) US5173640A (es)
EP (1) EP0486943B1 (es)
JP (1) JPH0563413A (es)
DE (2) DE4037091C2 (es)
ES (1) ES2070395T3 (es)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5283538A (en) * 1990-11-22 1994-02-01 Leybold Aktiengesellschaft Apparatus for coupling microwave power out of a first space into a second space
DE4119362A1 (de) * 1991-06-12 1992-12-17 Leybold Ag Teilchenquelle, insbesondere fuer reaktive ionenaetz- und plasmaunterstuetzte cvd-verfahren
DE4239843A1 (de) * 1992-11-27 1994-06-01 Leybold Ag Vorrichtung für die Erzeugung von Plasma, insbesondere zum Beschichten von Substraten
FR2722213B1 (fr) * 1994-07-05 1996-09-20 Plasmion Dispositif pour creer un faisceau d'ions d'energie ajustable notamment pour le traitement au defile et sous vide de surfaces de grandes dimensions
FR2746249B1 (fr) * 1996-03-13 1998-06-12 Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces
DE19700141A1 (de) * 1997-01-04 1998-07-09 Gero Hochtemperaturoefen Gmbh Brennofen für die Hochtemperaturbehandlung von Materialien mit niedrigem dielektrischem Verlustfaktor
US5998774A (en) * 1997-03-07 1999-12-07 Industrial Microwave Systems, Inc. Electromagnetic exposure chamber for improved heating
DE19812558B4 (de) * 1998-03-21 2010-09-23 Roth & Rau Ag Vorrichtung zur Erzeugung linear ausgedehnter ECR-Plasmen
US6153977A (en) * 1999-04-06 2000-11-28 Tokyo Seihinkaihatsu Kenkyusho ECR type plasma generating apparatus
US6265702B1 (en) 1999-04-28 2001-07-24 Industrial Microwave Systems, Inc. Electromagnetic exposure chamber with a focal region
KR19990068381A (ko) * 1999-05-11 1999-09-06 허방욱 마이크로웨이브플라즈마버너
DE19925493C1 (de) * 1999-06-04 2001-01-18 Fraunhofer Ges Forschung Linear ausgedehnte Anordnung zur großflächigen Mikrowellenbehandlung und zur großflächigen Plasmaerzeugung
DE19927806A1 (de) * 1999-06-18 2001-01-04 Bosch Gmbh Robert Vorrichtung und Verfahren zum Hochratenätzen eines Substrates mit einer Plasmaätzanlage und Vorrichtung und Verfahren zum Zünden eines Plasmas und Hochregeln oder Pulsen der Plasmaleistung
DE10034028C2 (de) * 2000-07-13 2002-05-02 Muegge Electronic Gmbh Mikrowellenanordnung
DE10200927A1 (de) * 2001-08-10 2003-03-06 Laempe Joachim Verfahren und Vorrichtung zur Herstellung von Formen oder Kernen für Giessereizwecke
MXPA04001086A (es) * 2001-08-10 2004-07-08 Laempe Joachim Metodo y dispositivo para produccion de moldes o machos para propositos de fundicion.
DE10220478A1 (de) 2002-05-07 2003-11-27 Framatome Anp Gmbh Elektrische Durchführung und Verwendung der elektrischen Durchführung
AU2003245761A1 (en) * 2002-07-01 2004-01-19 University Of Manitoba Measuring strain in a structure (bridge) with a (temperature compensated) electromagnetic resonator (microwave cavity)
US7806077B2 (en) * 2004-07-30 2010-10-05 Amarante Technologies, Inc. Plasma nozzle array for providing uniform scalable microwave plasma generation
CA2559694C (en) * 2005-09-23 2015-11-10 University Of Manitoba A sensing system based on multiple resonant electromagnetic cavities
US7589470B2 (en) * 2006-01-31 2009-09-15 Dublin City University Method and apparatus for producing plasma
EP1976346A1 (en) * 2007-03-30 2008-10-01 Ecole Polytechnique Apparatus for generating a plasma
KR101078164B1 (ko) * 2010-03-11 2011-10-28 포항공과대학교 산학협력단 전자빔 발생장치 및 이를 제조하는 방법
DE102011083668A1 (de) 2011-09-29 2013-04-04 Siemens Aktiengesellschaft HF-Resonator und Teilchenbeschleuniger mit HF-Resonator
FR2995493B1 (fr) * 2012-09-11 2014-08-22 Hydromecanique & Frottement Dispositif pour generer un plasma presentant une etendue importante le long d'un axe par resonnance cyclotronique electronique rce a partir d'un milieu gazeux

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE263648C (es) *
DE248904C (es) *
GB654224A (en) * 1941-09-10 1951-06-13 Univ Leland Stanford Junior Improvements relating to apparatus for the directional propagation or reception of electromagnetic waves
US2566386A (en) * 1944-10-24 1951-09-04 Univ Leland Stanford Junior Frequency and direction selective high-frequency transmission line apparatus
US2996715A (en) * 1955-03-10 1961-08-15 Victor H Rumsey Slot antenna with horn
DE1023538B (de) * 1956-12-24 1958-01-30 Mikrowellen Ges M B H Deutsche Einrichtung zur Behandlung von Holz mittels Mikrowellen
DE1070311B (es) * 1957-07-27 1959-12-03
DE1085625B (de) * 1958-02-27 1960-07-21 Mikrowellen Ges M B H Deutsche Mikrowellenstrahler, vorzugsweise fuer Kantenverleimung
GB1543980A (en) * 1975-05-19 1979-04-11 Matsushita Electric Ind Co Ltd Microwave heating apparatus
US4006339A (en) * 1975-12-31 1977-02-01 General Electric Company Microwave heating apparatus with multiple coupling elements and microwave power sources
DE2716592C3 (de) * 1976-04-15 1979-11-08 Hitachi, Ltd., Tokio Plasma-Ätzvorrichtung
US4160145A (en) * 1978-02-16 1979-07-03 Armstrong Cork Company Microwave applicator device
FR2489647A1 (fr) * 1980-08-28 1982-03-05 Applic Micro Ondes Ste Fse Dispositif de couplage electromagnetique entre un generateur de micro-ondes et une cavite, notamment une cavite a usage de four
NL8103419A (nl) * 1981-04-01 1982-11-01 Philips Nv Lijntestcircuit voor een abonneetelefoontoestel.
FR2520160A1 (fr) * 1982-01-20 1983-07-22 Sairem Sarl Dispositif de traitement ho
JPH06105597B2 (ja) * 1982-08-30 1994-12-21 株式会社日立製作所 マイクロ波プラズマ源
JPS6016424A (ja) * 1983-07-08 1985-01-28 Fujitsu Ltd マイクロ波プラズマ処理方法及びその装置
JPS61131454A (ja) * 1984-11-30 1986-06-19 Fujitsu Ltd マイクロ波プラズマ処理方法と装置
FR2583250B1 (fr) * 1985-06-07 1989-06-30 France Etat Procede et dispositif d'excitation d'un plasma par micro-ondes a la resonance cyclotronique electronique
DE3530647A1 (de) * 1985-08-28 1987-03-05 Kolbe & Co Hans Hohlraumresonator-antenne
DE3606959A1 (de) * 1986-03-04 1987-09-10 Leybold Heraeus Gmbh & Co Kg Vorrichtung zur plasmabehandlung von substraten in einer durch hochfrequenz angeregten plasmaentladung
DD248904A1 (de) * 1986-04-10 1987-08-19 Karl Marx Stadt Tech Hochschul Mikrowellen-breitstrahl-ionenquelle
DE3622614A1 (de) * 1986-07-05 1988-01-14 Philips Patentverwaltung Verfahren zur herstellung von elektrisch leitenden formkoerpern durch plasmaaktivierte chemische abscheidung aus der gasphase
DE3711184A1 (de) * 1987-04-02 1988-10-20 Leybold Ag Vorrichtung zur einbringung von mikrowellenenergie mit einem offenen mikrowellenleiter
KR880013424A (ko) * 1987-04-08 1988-11-30 미타 가츠시게 플라즈머 장치
US4866346A (en) * 1987-06-22 1989-09-12 Applied Science & Technology, Inc. Microwave plasma generator
KR920002864B1 (ko) * 1987-07-20 1992-04-06 가부시기가이샤 히다찌세이사꾸쇼 플라즈마 처리방법 및 그 장치
DD263648B5 (de) * 1987-08-31 1996-01-25 Buck Werke Gmbh Einrichtung zur erzeugungs eines Mikrowellenplasmas mit grosser Ausdehnung und Homogenitaet
DE3738352A1 (de) * 1987-11-11 1989-05-24 Technics Plasma Gmbh Filamentloses magnetron-ionenstrahlsystem
EP0334184B1 (en) * 1988-03-16 1996-08-14 Hitachi, Ltd. Microwave ion source
DE3834984A1 (de) * 1988-10-14 1990-04-19 Leybold Ag Einrichtung zur erzeugung von elektrisch geladenen und/oder ungeladenen teilchen
JP2993675B2 (ja) * 1989-02-08 1999-12-20 株式会社日立製作所 プラズマ処理方法及びその装置
US4906900A (en) * 1989-04-03 1990-03-06 Board Of Trustees Operating Michigan State University Coaxial cavity type, radiofrequency wave, plasma generating apparatus

Also Published As

Publication number Publication date
DE4037091C2 (de) 1996-06-20
US5173640A (en) 1992-12-22
DE59104602D1 (de) 1995-03-23
DE4037091A1 (de) 1992-05-27
EP0486943A1 (de) 1992-05-27
EP0486943B1 (de) 1995-02-15
JPH0563413A (ja) 1993-03-12

Similar Documents

Publication Publication Date Title
ES2070395T3 (es) Dispositivo para la creacion de un campo homogeneo de microondas.
EP0357453B1 (en) A discharge tube arrangement
ES2142106T3 (es) Dispositivo para producir plasma mediante microondas.
ES2189277T3 (es) Dispositivos de deflection de haz magnetico.
ES2113464T3 (es) Procedimiento y aparato de plasma plano electromagneticamente acoplado, para el ataque de oxidos.
ES2111126T3 (es) Resonador acustico.
FI863898A0 (fi) Foerfarande foer uppvaermning av glasroer, jaemte anordning.
FR2460589B1 (es)
ES2117442T3 (es) Disposiciones para reducir el campo electromagnetico emitido por un equipo electronico de potencia.
MX9305821A (es) Acelerador de particulas.
TW324831B (en) Plasma generating device
WO1996032735A3 (en) HOLLOW BEAM ELECTRON TUBE HAVING TM0x0 RESONATORS, WHERE x IS GREATER THAN 1
WO2004015735A3 (en) Ion source and coaxial inductive coupler for ion implantation system
AR044158A1 (es) Circuito resonante lc con dispositivo de amplificacion
CA1136230A (en) Power combiner
US5065075A (en) Launcher suitable for exciting surface waves in a discharge tube
ES2030376T3 (es) Fuente de plasma con acoplamiento capacitivo de radiofrecuencia.
FR2665323B1 (fr) Dispositif de production d'un plasma.
US2646511A (en) Electrical coupling structure
ATE112858T1 (de) Mikrowellen-näherungsschalter.
EP1087526A3 (en) Short-pulsed microwave generation
WO2001022783A3 (en) Apparatus and method for generating ultraviolet radiation
GB892681A (en) Resonant cavity
DK1360736T3 (da) Bölgeledergeneratoranordning for energitilförsel til en kavitet
FR2331192A1 (fr) Appareil tv rendu reversible par un jeu de ses pieds arrieres afin de faire fonction de table et de jeux dans la table

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 486943

Country of ref document: ES